• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.103-103
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• 2000

강한 결정 방향 의존성과 낮은 항정계를 갖는 Bi4Ti3O12 강유전체 박막은 NDRO형 비휘발성 강유전체 메모리 분야에서 매우 유망한 재료이다. 이를 위해서는 실리콘 기판과의 계면조절과 실리콘 기판성에서 고품질의 강유전성 박막을 성장시키는 기술이 필수적이다. MOCVD에 의한 Bi4Ti3O12 의 증착에서는 Bi 성분의 강한 휘발 특성과 낮은 반응성으로 인하여 조성과 두께 등의 조절이 매우 어렵다. 따라서 화학기상증착의 기구를 이해하고 제어하는 기술이 양질의 박막을 얻는데 필수적이다. 본 연구에서는 유기금속 원료 TPB, TIP 과 산소를 이용하여 실리콘 기판위에 Bi4Ti3O12 강유전체 박막을 증착할 때, 증착 변수의 변화에 따른 박막의 증착 거동과 구조적, 전기적 특성을 연계하여 분석하였다. 특히 기판부착력이 낮고 휘발성이 강한 Bi의 특성으로 인한 문제를 개선하기 위하여 TIP원료를 주기적으로 공급, 중단을 반복하는 펄스주입법을 고안하여 그 효과를 살펴보았다. 실리콘 기판위에서 TiO2의 증착속도는 실험온도 영역에서 온도에 따라 변화하지 않는 전형적인 물질 전달에 의해 지배되는 양상을 나타내었다. 반면 Bi2O3 경우에는 50$0^{\circ}C$ 이상에서 급격하게 증착속도가 감소하는 특이한 경향을 나타내었으며 이는 Bi2O3의 높은 휘발성 때문일 것이다. Bi4Ti3O12 박막은 온도증가에 따라 증착속도가 증가한 후 $600^{\circ}C$ 이상에서 포화되는 경향을 보였다. 이로부터 실리콘 기판위에서의 Bi4Ti3O12 박막의 증착 모델을 제시하였다. Bi2O3에 비해 상대적으로 표면 부착력이 월등히 큰 TiO2가 우선적으로 실리콘 펴면에 형성된 후 TPB 유기금속 원료가 이 TiO2와 반응하는 과정으로 Bi4Ti3O12 박막이 증착된다. $600^{\circ}C$이상에서는 증착 변수들을 바꾸어도 물성이 변하지 않는 자기조절기능이 있음을 알 수 있었는데 이는 고온에서의 Bi2O3의 강한 휘발성 때문일 것이다. 실리콘 기판에서 층상 페로브스카이트 상은 58$0^{\circ}C$ 이상에서 형성되며, 매우 좁은 온도 변화에도 결정구조, 박막현상 및 성분이 크게 바뀌는 온도에 민감한 증착거동이 관찰되었다. 증착 모델에서 예견되는 Bi의 불리함을 개선하기 위해 펄스주입법을 실시한 경우 Bi의 성분량이 증가되었고 결정성이 향상되었다. 이로부터 펄스주입법이 박막내에 부족하기 쉬운 Bi를 보충하여 박막의 특성을 개선함을 확인하였다. Bi4Ti3O12 박막의 증착온도에 따른 누설전류 특성 측정 결과 증착온도가 감소할수록 누설전류가 감소함을 알 수 있었고 펄스주입법이 연속주입법보다 더 낮은 누설전류를 보임을 알았다. 펄스주입법의 경우 -2.5V 인가 시의 누설전류는 7.4$\times$10-8A/cm2에서 1.3$\times$10+7A/cm2의 매우 우수한 값을 가졌다. 연속 주입법에 의해 증착된 박막은 C-V 측정 결과 강유전성 이력이 나타나지 않았으나, $600^{\circ}C$ 이상에서 펄스주입법에 의해 증착된 박박은 강유전성 이력을 나타내었다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.05a
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• pp.3-3
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• 2003

고밀도 플라즈마를 생산할 수 있는 대면적용 플라즈마 소스의 개발은 미세전자구조 산업에서부터 FPD 산업에 이르기까지 많은 영역에 걸쳐 필수 불가결한 기술요소가 되어가고 있 다. 이러한 대면적용 고밀도 플라즈마에의 적용을 위하여 새로운 유도결합형 플라즈마 소오스의 개발이 진행되고 있으며, 차세대 반도체 식각 및 세정 공정을 위하여 여러 형태의 안 테나가 연구되어지고 있다. 그러나 TFT -LCD에 적용이 가능하게끔 기존의 ICP 소오스를 직 접적으로 대면적화 하는 데에는 여러 가지 문제점들로 인해 그 한계점이 들어났다. 그 예로 안테나의 길이가 길어짐에 따른 안테나 저항 값이 커지며, 안테나 소스 길이자체가 사용하는 인가전력(13.56MHz)의 반파장에 해당되는 길이가 되었을 경우 생기는 심각한 정상파 효과, 유전물질의 두께 증가 및 그에 따른 재료비의 상승 및 관리상의 어려움들이 바로 그것 이라 할 수 있겠다. 그러므로, 본 연구에서는 차세대 TFT -LCD 대면적 공정에 적용 가능한 고밀도 플라즈마 를 발생시키기 위해서 내장형 유도결합형 선혈 안테나를 사용하였다. 내장형 유도결합형 선 혈 안테나가 가지고 있는 고유의 정전기적 결합효과를 최소화시키기 위해 직사각형모앙의 플라즈마 댐버(830mm*1,020mm)에서 영구자석을 사용하여 multi-cusp 자장효과 및 다양 한 자장의 배열에 따른 플라즈마 특성변화를 살펴보았다. 영구자석을 사용하여 외부자장을 인가하였을 때가, 그럴지 않은 때보다 RF 안테나 코일의 전압을 낮춰주었으며, 영구자석의 배열에 따라 코일의 인덕턴스의 값이 크게 변함을 알 수 있었다. 그리고 최적화된 자장의 배열은 플라즈마의 이온밀도를 증가시켰으며, 플라즈마의 균일도도 10% 이내로 유지됨을 알 수 있었다. 또한 영구자석에 의한 자장의 유무 및 공정압력과 인가전력에 따른 P Photoresist Film의 식각특성에 관해 살펴보았다.증을 위한 실험.측정장비의 구입 및 업계와의 공동활용, 국내.외 최신기술 정보자료의 수집과 신속제공, 국내.외 전문가 초청 활 용, 미래 지향적 목적활용 기초연구사업 수행, 미래기술 동향예측 및 홍보 등을 통해 서 국내 도금기술의 기술자립 및 고도화를 위한 여건마련을 위하여 노력하고 있다.빛 이때의 부식속도(선형분극법), 인위적인 피막 파괴 전,후 의 전위 변화 및 부식속도 측정법에 의한 국부부식 발달 저지능 등을 평가하여 각 실험결과를 비교분석하여 보았다. 수록 민감하여 304 의 IGSCC 와 매우 유사한 거동을 보인다. 본 강연에서는 304 와 600 의 고온 물에서 일어나는 IGSCC 민감도에 미치는 환경, 예민화처리, 합금원소의 영향을 고찰하고 이에 대한 최근의 연구 동향과 방식 방법을 다룬다.다.의 목적과 지식)보다 미학적 경험에 주는 영향이 큰 것으로 나타났으며, 모든 사람들에게 비슷한 미학적 경험을 발생시키는 것 이 밝혀졌다. 다시 말하면 모든 사람들은 그들의 문화적인 국적과 사회적 인 직업의 차이, 목적의 차이, 또한 환경의 의미의 차이에 상관없이 아름다 운 경관(High-beauty landscape)을 주거지나 나들이 장소로서 선호했으며, 아름답다고 평가했다. 반면에, 사람들이 갖고 있는 문화의 차이, 직업의 차 이, 목적의 차이, 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에도 $\ulcorner$순응$\lrcorner$과 $\ulcorner$표현$\lrcorner$

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.4
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• pp.166-173
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• 2021

The rutile phase of TiO₂ forms a stable phase at high temperatures compared to anatase phase, but the stable temperature range of anatase changes depending on the synthesis conditions. In this study, nano-sized TiO₂ was synthesized by the Sol-gel method using TiOSO₄ and a mixed solvent of ethanol and distilled water, and the phase change of anatase and rutile according to pH and heat treatment temperature was investigated. Changes in the ratio of anatase and rutile were observed by changing the pH (3, 5, 7, 9) and heat treatment temperature (500, 600, 700, 800, 900℃) conditions of the prepared TiO₂. As a result of observing these changes through XRD and FE-SEM analysis, anatase TiO₂ at 500℃ and rutile TiO₂ at 900℃ were observed. According to the pH, at these intermediate temperatures of 600, 700 and 800℃, the ratio of anatase and rutile changes. At 700℃, it was concluded that pH = 3~5 had a larger ratio of anatase TiO₂, and pH = 7~9 had a larger ratio of rutile TiO₂.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.4
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• pp.91-96
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• 2020

The 33-mode dielectric and piezoelectric properties of Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 piezoelectric single crystals were measured under large electric field and compressive stress. The phase transition from the low temperature rhombohedral to the high temperature tetragonal structure was observed in the range of 110~140℃, and the Curie temperature changing to the cubic structure was about 165℃. The polarization change according to the compressive stress and electric field was measured. Relative dielectric constant was calculated from the slope of the polarization curve applied to the electric field, and the calculated relative dielectric constant increased as the applied stress increased, and the relative dielectric constant decreased as the applied electric field increased. The strain according to the compressive stress and electric field change was measured, the piezoelectric constant was calculated from the slope of the curve, and the phase transition according to the application of pressure was confirmed. In the case of practical application as an underwater or medical ultrasonic actuator, it is necessary to properly design the magnitude of the compressive stress applied to the device and the DC bias in order to maintain linear driving.

• Journal of Sericultural and Entomological Science
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• v.16 no.2
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• pp.1-34
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• 1974

These experiments pertain to various factors influencing the quantitative characters of cocoon crops in summer and early autumn seasons. Initially, in order to establish the possible ways of the silkworm rearing more than three times a year in Korea, the author attempted to get further information about the various factors affecting the cocoon crop in every silkworm rearing season. The trials were conducted eleven times a year at four places for three years. The field trial was conducted with 19 typical sericultural farmers who had been surveyed. At the same time the author statistically analyzed the various factors in close relation to tile cocoon crop in autumn season. The effect of guidance on 40 sericultural farmers was analyzed, comparing higher level farmers with lower level farmers ; and the author surveyed 758 non-guided farmers near the guided farmers during both spring and autumn seasons. In addition, another trial on the seasonal change of leaf quality was attempted with artificial diets prepared with leaves grown in each season. It was found that related factors to cocoon crops in summer and early autumn seasons appeared to be leaf quality, and temperature for young and grown larvae. A 2$^4$ factorial experiment was designed in summer season, and another design with one more level of varied temperature or hard leaf added to a 24 factorial experiment was conducted in early autumn. The experimental results can be summarized： 1. Study on the cocoon crops in the different rearing seasons 1) It was shown that earlier brushing of silkworm generally produced the most abundant cocoon crop in spring season, and earlier or later than the conventional brushing season, especially earlier brushing was unfavorable for the abundant cocoon crop in autumn season. 2) The cocoon crop was affected by the rearing season, and decreases in order of sire with spring, autumn, late autumn, summer and early autumn seasons. 3) It was Proved that ordinary rearing and branch rearing were possibles 4 times a year ; in the 1st, 3rd, 8th, and 10th brushing season. But the 11th brushing season was more favorable for the most abundant cocoon crop of branch rearing, instead of the 10th brushing season with ordinary rearing. 2. Study on the main factors affecting the cocoon crop in autumn season 1) Accumulated pathogens were a lethal factor leading to a bad cocoon crop through neglect of disinfection of rearing room and instruments. 2) Additional factors leading to a poor cocoon crop were unfavorable for rearing temperature and humidity, dense population, poor choice of moderately ripened leaf, and poor feeding techniques. However, it seemed that there was no relationship between the cocoon crop and management of farm. 3) The percentage of cocoon shell seemed to be mostly affected by leaf quality, and secondarily affected by the accumulation of pathogens. 3. Study on the effect of guidance on rearing techniques 1) The guided farms produced an average yearly yield of 29.0kg of cocoons, which varied from 32.3kg to 25.817g of cocoon yield per box in spring versus autumn, respectively. Those figures indicated an annual average increase of 26% of cocoon yield over yields of non-guided farmers. An increase of 20% of cocoon yield in spring and 35% of cocoon yield in autumn were responsible. 2) On guided farms 77.1 and 83.7% of total cocoon yields in the spring and autumn seasons, respectively, exceeded 3rd grade. This amounted to increases of 14.1 and 11.3% in cocoon yield and quality over those of non-guided farms. 3) The average annual cocoon yield on guided farms was 28.9kg per box, based on a range of 31.2kg to 26.9kg per box in spring and autumn seasons, respectively. This represented an 8% increase in cocoon yield on farms one year after guidance, as opposed to non-guided farms. This yield increase was due to 3 and 16% cocoon yield increases in spring and autumn crops. 4) Guidance had no effect on higher level farms, but was responsible for 19% of the increases in production on lower level farms. 4. Study on the seasonal change of leaf quality 1) In tests with grown larvae, leaves of tile spring crop incorporated in artificial diets produced the best cocoon crop; followed by leaves of the late autumn, summer, autumn, and early autumn crops. 2) The cocoon crop for young larvae as well as for grown larvae varied with the season of leaf used. 5. Study on factors affecting the cocoon crops in summer and early autumn A. Early autumn season 1) Survival rate and cocoon yield were significantly decreased at high rearing temperatures for young larvae 2) Survival rate, cocoon yield, and cocoon quality were adversely affected by high rearing temperatures for grown larvae. Therefore increases of cocoon quantity and improvement of cocoon quality are dependent on maintaining optimum temperatures. 3) Decreases in individual cocoon weight and longer larval periods resulted with feeding of soft leaf and hard leaf to young larvae, but the survival rate, cocoon yield and weight of cocoon shell were not influenced. 4) Cocoon yield and cocoon quality were influenced by feeding of hard leaf to grown larvae, but survival rate was not influenced by the feeding of soft leaf and hard leaf. 5) When grown larvae were inevitably raised at varied temperatures, application of varied temperature in the raising of both young and grown larvae was desirable. Further research concerning this matter must be considered. B. Summer season 1) Cocoon yield and single cocoon weight were decreased at high temperatures for young larvae and survival rate was also affected. 2) Cocoon yield, survival rate. and cocoon quality were considerably decreased at high rearing temperatures for grown larval stages.

• Korean Chemical Engineering Research
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• v.49 no.2
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• pp.256-262
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• 2011

Amine can undergo irreversible reactions by $O_{2}$ and high temperature in amine scrubbing process and these phenomena are called "degradation". Degradation causes not only a loss of valuable amine, but also operational problems such as foaming, corrosion and fouling. In this study, using various chemical absorbents(MEA; monoethanolamine, AMP; 2-amino-2-methyl-1-propanol, DAM; 1,8-diamino-p-menthane), we examined the following variable. I) loading ratio of $CO_{2}$ at $50^{\circ}C$ and $120^{\circ}C$, ii) concentration variation and initial degradation rate constant of absorbent in $CO_{2}$ and $CO_{2}/O_{2}$ system, and iii) effect of degradation by $O_{2}$. The $CO_{2}$ loading of 20 wt% DAM was 400% and 270% higher than that of 20 wt% MEA and AMP at 50, respectively and was the largest the difference of $CO_{2}$ loading between absorption $(50^{\circ}C)$ and regeneration $(120^{\circ}C)$ condition. The initial degradation rate constant of 20 wt% DAM was $2.254{\times}10^{-4}cycle^{-1}$ which was slower than that of MEA $(2.761{\times}10^{-4}cycle^{-1})$ and AMP $(2.461{\times}10^{-4}cycle^{-1})$ in $CO_{2}$ system. Also, it was increased 30% by $O_{2}$ that effects on the degradation by $O_{2}$ was less than 100% increased. these degradation reactions was able to identify by formation of new peak in GC and FT-IR spectrum analysis.

• Korean Journal of Remote Sensing
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• v.24 no.2
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• pp.189-194
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• 2008

Middle-infrared (MIR) spectral region between 3.0 and $5.0\;{\mu}m$ in wavelength is useful for observing high temperature events such as volcanic activities and forest fire. However, atmospheric effects and sun irradiance in day time has not been well studied for this MIR spectral band. The objectives of this basic study is to evaluate atmospheric effects and eventually to estimate surface temperature from a single channel MIR image, although a typical approach utilize split-window method using more than two channels. Several parameters are involved for the correction including various atmospheric data and sun-irradiance at the area of interest. To evaluate the effect of sun irradiance, MODIS MIR images acquired in day and night times were used for comparison. Atmospheric parameters were modeled by MODTRAN, and applied to a radiative transfer model for estimating the sea surface temperature. MODIS Sea Surface Temperature algorithm based upon multi-channel observation was performed in comparison with results from the radiative transfer model from a single channel. Temperature difference of the two methods was $0.89{\pm}0.54^{\circ}C$ and $1.25{\pm}0.41^{\circ}C$ from the day-time and night-time images, respectively. It is also shown that the emissivity effect has by more largely influenced on the estimated temperature than atmospheric effects. Although the test results encourage using a single channel MR observation, it must be noted that the results were obtained from water body not from land surface. Because emissivity greatly varies on land, it is very difficult to retrieval land surface temperature from a single channel MIR data.

• Elastomers and Composites
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• v.45 no.4
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• pp.263-271
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• 2010

Intermittent CSR testing was used to investigate the degradation of an FKM O-ring, also the prediction of its life-time. An intermittent CSR jig was designed taking into consideration the O-ring's environment under use. The testing allowed observation of the effects of friction, heat loss, and stress relaxation by the Mullins effect. Degradation of O-rings by thermal aging was observed between 60 and $160^{\circ}C$. In the high temperature of range ($100-160^{\circ}C$) O-rings showed linear degradation behavior and satisfied the Arrhenius relationship. The activation energy was about 60.2 kJ/mol. From Arrhenius plots, predicted life-times were 43.3 years and 69.9 years for 50% and 40% failure conditions, respectively. Based on TTS (time-temperature superposition) principle, degradation was observed at $60^{\circ}C$, and could save testing time. Between 60 and $100^{\circ}C$ the activation energy decreased to 48.3 kJ/mol. WLF(William-Landel-Ferry) plot confirmed that O-rings show non-linear degradation behavior under $80^{\circ}C$. The life-time of O-rings predicted by TTS principle was 19.1 years and 25.2 years for each failure condition. The life-time predicted by TTS principle is more conservative than that from the Arrhenius relationship.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.37 no.1
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• pp.93-103
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• 1992

Experiments were conducted in the research field of the Wheat and Barley Research Institute with three barley cultivars, Olbori, Kangbori and Suwon 18, which showed different growth characteristics. The highest rates of daily dry matter accumulation in grains were 1.03 1.94 mg / grain / day in early and optimum sowings and 0.88 1.88 mg / grain / day in late sowings, which occurred around 20～30 days after heading in early and optimum sowings and 15～20 days after heading in late sowings. Grains reached their maximum weight by 40 days after heading in early and optimum sowings and 35 days after heading in late sowings. Total sugar content in grains followed a pattern of linear increase immediately after heading, but it started to decrease around 20 days after heading. On the other hand, starch content continued to increase until maturity. The contents of both components were high in the order of ＆apos;Olbori＆apos; ＆gt; ＆apos;Kangbori＆apos; ＆gt; ＆apos;Suwon 18＆apos;, but they did not respond in a regular pattern to different sowings. 1,000 grain weight showed highly significant positive correlation(r=0.767$^{**}$) with the duration of grain growth, but it had negative correlations with the average (r=-0.548$^{**}$) or the sum (r=-0.595$^{**}$) of post-anthesis daily mean temperature.ature.

• Journal of the Korean Vacuum Society
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• v.22 no.5
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• pp.238-244
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• 2013

Doping process using laser is an important process in fabrication of solar cell for heat treatment. However, the process of using the furnace is difficult to form a selective emitter doping region. The case of using a selective emitter laser doping is required an expensive laser equipment and induce the wafer's structure damage due to high temperature. This study, we fabricated a new costly plasma source. Through this, we research the selective emitter doping. We fabricated that the atmospheric pressure plasma jet injected Ar gas is inputted a low frequency (a few tens kHz). We used shallow doping wafers existing PSG (Phosphorus Silicate Glass) on the shallow doping CZ P-type wafer. Atmospheric plasma treatment time was 15 s and 30 s, and current for making the plasma is 40 mA and 70 mA. We investigated a doping profile by using SIMS (Secondary Ion Mass Spectroscopy) and we grasp the sheet resistance of electrical character by using doping profile. As result of experiment, prolonged doping process time and highly plasma current occur a deeper doping depth, moreover improve sheet resistance. We grasped the wafer's surface damage after atmospheric pressure plasma doping by using SEM (Scanning Electron Microscopy). We check that wafer's surface is not changed after plasma doping and atmospheric pressure doping width is broaden by increase of plasma treatment time and current.