A Study on the Characteristics of $(Ti_{1-x}Al_x)N$ Coatings Deposited by Plasma Enhanced Chemical Vapor Deposition after Heat Treatment
(플라즈마 화학 증착법으로 제조된 $(Ti_{1-x}Al_x)N$ 박막의 열처리에 따른 특성 평가)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2001.11a
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- pp.28-28
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- 2001