• Journal of the Korean Electrochemical Society
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• v.16 no.1
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• pp.1-8
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• 2013

This review article summarizes metal-assisted chemical etching (MAC etch or MACE), an anisotropic etching method for Si, and describes principles, main factors, and recent achievements in literature. In 1990, it was discovered that, with metal catalyst on surface and $H_2O_2$/HF as etchant, Si substrate can be etched anisotropically, in even in solution. In contrast to high-cost vacuum-based dry etching methods, MAC etch enables to fabricate a variety of high aspect ratio nanostructures through wet etching process.

• New & Renewable Energy
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• v.9 no.3
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• pp.20-28
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• 2013

The gasification process has developed to convert coal into the more useful energy and material since decades. Despite the numberous design of ones, entrained flow gasifier of the major companies has had an advantage on the market. Because it has a merit of full-scale and high performance plant. In this paper, the gasification technologies of GE energy, Phillips, Siemens and Shell have been reviewed to compare their characteristics and a high performance gasification process was suggested. And the simulation model of gasifiers using Aspen Plus offered the quantitative comparison data for difference designs. The simulation results revealed the poor performance of the slurry feed than dry design. The corresponding cold gas efficiency of 77% is much lower than the 80.3% for the dry feed cases. The exergy analysis of the difference syngas quenching system showed that chemical quenching is superior to another. The results of analysis recommend the two stage gasifier with dry multi-feeder as the energy effective design.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.48 no.1
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• pp.1-6
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• 2011

We have developed the process of forming one body S-type cantilever probe in the recessed trench for fine-pitched MEMS probe card. The probe (cantilever beam and pyramid tip) was formed using Deep RIE etching and wet etching. The pyramid tip was formed by the wet etching using KOH and TMAH. The process of forming the curved probe was also developed by the wet etching. Therefore, the fabricated probe is applicable for the probe card for DRAM, Flash memory and RF devices tests and probe tip for IC test socket.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.138-138
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• 2003

광대역 LiNbO$_3$ 광변조기의 초고속 광 변조 구현을 위해서는 RF/ optical 속도 정합 및 임피던스 매칭 조건 하에서 낮은 구동전압을 얻을 수 있는 ridge 구조의 제작이 필수적이며 이런 구조 제작하기 위해서는 식각 속도와 식각면 거칠기 식각 profile 및 식각 과정에서의 반응물의 감소 등과 같은 개선을 위한 연구가 필요하다. 본 연구에서는 LiNbO$_3$ 기판 위에 메탈 마스크를 형성한 후 비등방성 (anisotropic) 건식 식각 방법인 NLD (Neutral Loop Discharge)로 플라즈마 식각을 하였다. NLD plasma 식각은 1Pa 이하의 압력에서 낮은 전자 온도를 갖는 고밀도 플라즈마를 생성하고 이온 플라즈마를 형성하여 LiNbO$_3$ 표면의 원자와 분자를 이온충돌효과를 이용하여 물리적인 식각과 discharge로 형성된 레디칼 (radical)과의 상호작용에 의한 화학적 식각 메커니즘에 의한 방법으로 plasma에 의한 시편의 손상이 적으며 식각 속도가 또한 높은 것이 특징이다. 본 논문에서는 안테나 파워와 가스의 유량에 따른 LiNbO$_3$ 식각 profile 특성에 관하여 연구 하고자 한다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.1
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• pp.23-28
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• 2008

Due to the modem MEMS technologies, the electron lenses that are used in the microcolumn can have much smaller optical aberrations compared with conventional electron lenses for the bulky electron columns. Since the electron lens system have great effect on the performance of the microcolumn, it is important to study the dependence of image quality on the configuration of the electronic imaging system, among which the source-lens part is most sensitive. In this work, we investigated the electron beam characteristics according to the shapes of extractor and limiting aperture that are elements of the source-lens part. By analyzing the data obtained, we proposed the optimum configuration of the electron lens system.

• Transactions of Materials Processing
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• v.14 no.1 s.73
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• pp.71-77
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• 2005

Thermal stability and dry sliding wear behavior of ultra-fine grained 6061 Al alloy fabricated by an accumulative roll-bonding (ARB) process have been investigated. After 4 ARB cycles, an ultra-fine grained microstructure of the 6061 Al alloy composed of grains with average size of 500nm, and separated mostly by high-angle boundaries was obtained. Though hardness and tensile strength of the ARB processed Al alloy increased with ARB cycles up to 4 cycles, the processed alloy exhibited decreased ductility and little strain hardening. Thermal stability of the ARB-processed microstructure was studied by annealing of the severely deformed alloy at $423K{\sim}573K$. The refined microstructure of the alloy remained stable up to 473K, and the peak aging treatment of the alloy at 450K for 8 hrs increased the thermal stability of the alloy. Sliding-wear rates of the alloy increased with the number of ARB cycles in spite of the increased hardness with the cycles. Wear mechanisms of the ultra-fine grained alloy were investigated by examining worn surfaces, wear debris, and cross-sections by a scanning electron microscopy (SEM).

• Journal of Korean Society for Atmospheric Environment
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• v.33 no.5
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• pp.521-528
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• 2017

In the combustion treatment of explosive gases with a high heating value such as $H_2$ and $NH_3$ used in semiconductor and chemical processes, the heat recovery modeling and exergy analysis of the process using the Aspen Plus simulator and its thermodynamic data were performed to examine the recovery of high temperature thermal energy. The heat recovery process was analyzed through this process modeling while the exergy results clearly confirmed that the rigorous reaction mainly occurs in the condenser and the chamber. In addition, the process modeling demonstrated that approximately 95% of the exergy is destructed on the basis of the exergies injected and the exergy being exhausted. Using the exergy technique, which can quantitatively analyze the energy, we could understand the energy flow in the process and confirm that our heat recovery process was efficiently designed.

• Proceedings of the IEEK Conference
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• 1998.06a
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• pp.409-412
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• 1998

BCl/sub 3/ 및 Cl/sub 2/ 반응가스를 사용하여 RIE 장치로 GaN의 건식식각을 연구하였다. RF 전력, 반응가스의 유량 및 반응가스의 혼합비 등의 변화에 따른 최적의 식각공정 조건 및 결합특성을 연구하였다. RF 전력에 따른 GaN의 식각율은 챔버압력 25mTorr, BCl/sub 3/ 유량 40 sccm의 조건에서 RF 전력이 100W일때 17nm/min을 얻었다. BCl/sub 3/의 유량에 따른 식각율은 RF 전력 100W 챔버압력 20mTorr, Cl/sub 2/ 유량 5sccm의 조건에서 BCl/sub 3/ 유량이 40 sccm일때 65nm/min을 얻었다. Cl/sub 2//BCl/sub 3/ 혼합가스 비율에 따른 식각율은 Cl/sub 2/ 유량을 5sccm으로 고정하고 BCl/sub 3/ 유량을 변화시켰을때 RF 전력 100W 및 챔버압력 20mTorr의 조건에서 혼합비가 0.25일때 50nm/min을 얻었다. RF 전력에 따른 PR의 식각율은 챔버압력 25mTorr, Cl/sub 2/ 유량 0 sccm 및 BCl/sub 3/ 유량 40 sccm의 조건에서 RF 전려이 100W일때 15nm/min을 얻었다. 또한, 챔버압력 20mTorr, Cl/sub 2/ 유량 5 sccm 및 BCl/sub 3/ 유량 20sccm의 조건에서 RF 전력이 100W 일때 82nm/min을 얻었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.600-603
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• 2000

In the high carbon steel wire drawing process, the wire temperature increases as the drawing speed is faster in order to increase the production rate in the shop floor. The rapid temperature rise causes the wire fracture in the dry wire drawing process. So, in this paper, the isothermal pass schedule program, which includes the calculation method of wire temperature at each pass, is proposed to prevent the wire fracture due to the temperature rise. Using the isothermal pass schedule program, it is newly proposed the pass schedule design system that prevents the cup-cone defects, improves the elongation of the final products and assures further deformation. As a result, the temperature rise of the wire was decreased and the production rate of the final product is remarkably grown up according to the increase of the final drawing speed than that of the conventional process. Also, the proposed pass schedule design system could give a useful information to the process designer who would design the high carbon steel wire drawing process.

• Proceedings of the Korean Nuclear Society Conference
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• 1998.05b
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• pp.409-414
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• 1998

5 년간의 기술실증 및 안전성 검토를 거쳐 한국원자력연구소내 실증소각시설을 자체발생 가연성 $\beta$/${\gamma}$폐기물을 소각하는 시설로 인허가를 얻었다. 동위원소포함 모의폐기물 및 원전발생 가연성폐기물 실증소각 결과에 기준을 두고 연간 배출오염원 및 가상 사고시의 방사학적 위해성을 평가하여 저준위 폐기물을 부지내에서 소각처리할 때 그 위해성은 무시할 수 있을 것으로 미미함 을 확인하였다. 실증시험으로 주된 배출 방사선원은 고온의 소각로에서 휘발성이 크고 저준위 폐기물내 농도가 큰 반휘발성 Cs-137 및 Cs-134로, 발전소 가연성폐기물과 같은 핵종조성을 가진 0.109 mCi/kg 의 소각시 Cs-137 및 Cs-134의 배출농도가 공기중허용농도의 10%를 약간 상회하는 것으로 평가되었다. 비방사성 CsCI을 이용한 시험소각을 통하여 사용되는 저온배기체처리계통 에서의 휘발된 Cs의 배기체 냉각시 입자화 및 제거특성을 고찰한 결과 휘발된 기체상 Cs성분은 건식배기체 냉각공정을 거치면서 대부분 마이크론 크기이하의 입자로 생성되지만 5% 미만이 전이영역 크기에 분포하여 주여과장치인 여과포집진기에서 제거효율이 99.9% 이상이었다.