• Journal of the Korean Society for Precision Engineering
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• v.16 no.12
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• pp.174-181
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• 1999

This paper describes the effect of the stylus tip size on the shape error in surface topography measurement. To analyze the distortional effect of an actual surface geometry origination from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. The magnitude of this distortion is defined as the ration of standard deviation, and this is expressed as an analytic function of the stylus tip radius and the geometrical parameter of a sinusoid. In this paper, the spectrum analysis of the profile is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is proposed to assess the shape error of measured data according to the various stylus tip sizes. From these results, a new method to select proper stylus tip radius is proposed.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.79-87
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• 2004

The light pattern reflected from a machined surface contains some information like roughness and profile on the projected surface as expected in the Beckmann-Spizzichino model. In applying the theory into a real reliable measuring device, many parameters such as incident light power, wave length, spot size should be kept a constant optical value. However, the reflected light power is likely to change with the environmental noise, the variations of the light source, the reflectivity of the surface, etc. even though the incident light power is constant. In this study, a method for adjusting the incident light power to keep the reflected light power projected on a CMOS image sensor constant was proposed and a simple adjustment algorithm based on PI digital control was examined. Experiments verified that the proposed method made the surface roughness measurement better and more reliable even under variations of the height of light source.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.681-686
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• 2000

Machining information such as machined form and surface roughness accuracy is an important factor for manufacturing precise parts. To this regard, OMM(On the Machine Measurement) has been issued for last several decades to alternate with CMM. In this research, measuring system consisting of a laser probe is developed for machined form and surface roughness measurement on the machine tool. The obtained machined form accuracy is compared with reference one defined in CAD model. The measured surface roughness data is compared with measured master surface beforehand. Furthermore, using the pre-defined volumetric error map approach compensates the geometric accuracy of the machine tool. The overall performance is compared with CMM, and verified the feasibility of the measurement system.

• Proceedings of the Korea Information Processing Society Conference
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• 2016.10a
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• pp.699-701
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• 2016

최근 산업에서는 기계구성 부품과 고정밀 가공에 대한 요구가 높아지고 있으며, 생산 현장에서는 기계를 효율적으로 운용하는 것의 필요성과 정밀도향상의 요구가 높아지고 있다. 하지만 이를 위해서는 가공된 제품을 정밀히 관찰, 분석 할 수 있어야 하며, 이를 위해서는 사람의 눈으로 볼 수 없는 미세한 차이를 구분 할 수 있어야 한다. 이를 위해서 본 논문에서는 백색광 간섭 측정계를 이용해 측정된 데이터를 시각화 하고, 더 나아가서 6가지의 거칠기 파라미터를 제공하여 관찰, 분석에 있어서 유용한 정보를 제공하고자 한다.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.232-240
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• 2000

Machining information such as machined form and surface roughness accuracy is an important factor for manufacturing precise parts. To this regard, OMM(On the Machine Measurement) has been issued for last several decades to alternate with CMM. In this research, measuring system consisting of a laser probe is developed for machined form and surface roughness measurement on the machine tool. The obtained machined form accuracy is compared with reference one defined in CAD model. The measured surface roughness data is compared with measured master surface beforehand. Furthermore, using the pre-defined volumetric error map approach compensates the geometric accuracy of the machine tool. The overall performance is compared with CMM, and verified the feasibility of the measurement system.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.82-82
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• 2011

본 연구에서는 이온빔 스퍼터링 방법으로 증착한 Cr2O3, Ta2O5, HfO2 산화물박막의 구조적 특성변화를 관찰하였다. 금속박막에서 표면이 산화되는 문제를 해결하기위하여 산화물 박막을 증착시켰다. 이온빔 스퍼터링으로 박막 증착 시 산화물 타겟을 사용할 때 발생되는 전하의 영향을 상쇄하기 위하여 neutralizer를 사용하였다. 박막 증착 후 XRR (X-ray Reflectometer)을 이용하여 박막의 두께, 거칠기 및 밀도를 확인하였으며, AFM (Atomic Force MicroScope)을 통하여 증착한 박막표면 거칠기 측정을 하여 XRR로 얻은 데이터와 비교하여 살펴보았다. 또한 XPS (X-ray photoelectron spectroscopy)측정을 통해 제조된 박막의 화학적 결합상태를 확인하였다. 여러 가지 조건변화와 기판의 차이에 따라 제작된 산화물 박막 중 실리콘 기판을 사용하여 증착시킨 박막은 XRR측정시 반사율 곡선에서 자연 산화막에 의한 영향이 나타났다. 반면 glass나 sapphire에 증착시킨 산화물 박막은 실리콘기판에서 나타난 자연 산화막의 영향을 받지 않음을 확인하였다. 기판과 산화물 박막사이에 계면층에 나타나는 영향을 최소화시킴으로써 양질의 박막을 제작할 수 있을 것으로 기대된다.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.4
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• pp.46-54
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• 1995

This paper presents a simple method for measurenemt of roughness of ground surfaces. The present method utilizes fluxes of scattered lights condensed through lenses aligned along the specular direction. A theoretical analysis is preformed for the purpose of investigating the possibility of the method as well as determining the experimental condition. Experiments are also performed to show the effectiveness and robustness of the proposed method. The theoretical and experimental results show that the proposed method is simple enouth to implement and has a potential to identify a wide range of roughness of ground surfaces.

• Journal of Korean Society of Forest Science
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• v.112 no.3
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• pp.374-381
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• 2023

The travel time of flash floods along mountain streams is mainly governed by reach-average velocity, rather than by the point velocity of the locations of interest. Reach-average velocity is influenced by various factors such as stream geometry, streambed materials, and the hydraulic roughness of streams. In this study, the reach-average velocity in mountain streams was measured for storm periods using rhodamine dye tracing. The point cloud data obtained from a LiDAR survey was used to extract the average hydraulic roughness height, such as R_a, R_max, and R_z. The size distribution of the streambed materials (D₅₀, D₈₄) was also considered in the estimation of the roughness height. The field experiments revealed that the reach-average velocities had a significant relationship with flow discharges (v = 0.5499Q^0.6165 ), with an R² value of 0.77. The root mean square error in the roughness height of the R_a-based estimation (0.45) was lower than those of the other estimations (0.47-1.04). Among the parameters for roughness height estimation, the R_a -based roughness height was the most reliable and suitable for developing the reach-average velocity equation for estimating the travel time of flood waves in mountain streams.

• Proceedings of the Korean Society for Rock Mechanics Conference
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• 2011.09a
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• pp.213-217
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• 2011

• Proceedings of the KSEEG Conference
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• 2005.04a
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• pp.156-159
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• 2005