• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.4
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• pp.325-330
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• 2005

A lever type CO micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material, $SnO_2$, to a target temperature, a micro heater was built on the gas sensor. The heater and electrodes were hanged on the air as a bridge type to minimize the heat loss to the silicon base. The sensing material laid on the heater and electrodes and did not contact with the silicons base. The temperature distribution of micro gas sensor was analyzed by a CFD program, FLUENT. The results showed that the temperature of silicon wafer base was almost similar to that of the room temperature, which indicates that the heat generated at the micro heater heated up effectively the sensing material. The required electric current of micro heater to heat up the sensing material to the target temperature could be predicted.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.2
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• pp.93-100
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• 2021

Copper sheets has been used widely in electric and electron industry fields because they have good electric and heat conduction property of the material. And, in order to bond copper material, a kind of soldering process is generally used. But, because it is difficult to bond by soldering between overlapped thin copper sheets, so, another kind of brazing bonding process can be used in that case. But, because the brazing process needs wide bonding area, it needs heat treatment process in electric furnace. Generally, for spot welding of sheets, a conventional electric Resistance Spot Welding process(RSW) has been used, it has welding characteristics using contact resistance heating induced by electric current flow between sheets. But, because copper sheets has the low electric resistance, it is difficult to weld by electric resistance spot welding. So, in this study, an electric Resistance heated Surface Friction Spot Welding process(RSFSW) is suggested and is testified for the spot welding ability of thin copper sheets. It is known from the experimental results and simulation that the suggested spot welding process will be able to improve the spot welding ability of copper sheets by the combined three kinds of heating generated by surface friction by rotating pin, and conducted from heated steel electrode, and generated by contact resistance of electricity.

• Journal of the Korean Electrochemical Society
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• v.2 no.3
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• pp.156-162
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• 1999

Various types of iron oxide based materials as a cathode of lithium secondary battery have been prepared and their electrochemical characteristics have been also observed. In order to understand the fundamental characteristics of iron oxide electrode, three kinds of iron oxides such as iron oxides formed by direct oxidation of iron plate or iron powders and FeOOH powders were tested with cyclic voltammetry. The oxidation and reduction peaks due to the reaction of intercalation and deintercalation were not observed for the iron oxide prepared with iron plate and FeOOH powders. In case of iron oxide prepared from iron powders, only one reduction peak was observed. A layered form of $LiFeO_2$ was synthesized directly from $FeCl_3\cdot6H_2O,\;NaOH\;and\;LiOH$ and LiOH by hydrothermal reaction. The effect of NaOH on the electrode performance was examined. When increasing NaOH, it provides the electrode with less discharge capacity and efficiency, however, decreasing rate of discharge capacity became smaller. $LiFeO_2$ synthesized with the molar ratio of $NaOH/FeCl_3/LiOH$, 2/1/7 showed the largest capacity, but the discharging efficiency was sharply decreased after 30 cycles.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.370-370
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• 2008

ITO 박막은 현재 차세대 디스플레이인 LCD, PDP, ELD 등의 평판 디스플레이의 화소전극 및 공통전극으로 가장 많이 적용되고 있는 소재이며, 최근에는 태양전지의 투명전극으로 그 용도가 더욱 증가되고 있다. 이러한 소자들의 투명 전도막으로 사용되기 위해서는 가시광선 영역에서 80% 이상의 높은 투과도와 낮은 면 저항을 가져야 한다. 광 투과도와 면 저항은 ITO 박막의 증착조건에 따라 변하게 되는데 본 연구에서는 DC 마그네트론 스퍼터링법을 이용하여 Indium-Tin Oxide (ITO) 박막을 제작하고, 제작된 ITO 박막의 전기적 특성과 광학적 특성을 측정하여 공정조건에 따른 박막의 특성 변화를 평가하였다. 증착 조건은 주로 기판 온도와 증착 시간을 변화시켰다. 본 실험에서는 $In_2O_3$ : $SnO_2$의 조성비가 9:1 비율의 순도 99.99% ITO 타겟을 사용하였으며, coming 1737 glass를 30$\times$30 mm 크기로 가공하여 기판온도와 증착시간을 변화시키면서 ITO 박막을 제조하였다. 예비실험을 통해 인가전력 50W, 초기 진공 $2\times10^{-6}$ Torr, 작업 진공 $3.5\times10^{-2}$ Torr, 기판과 타겟 사이의 거리를 10 cm로 고정하였다. 기판 온도는 히터를 가열하지 않은 상온 ($25^{\circ}C$)에서 $400^{\circ}C$까지의 범위에서 변화시켰고, 증착시간은 5분에서 30분까지의 범위에서 변화시켰다. 증착된 박막의 면 저항 촉정을 위해 4 point probe를 사용하였고, 홀 (hall) 계수 측정기 (HMS-300)를 이용하여 홀 계수를 측정하였으며, 또한 박막의 두께는 $\alpha$-step을 사용하여 측정하였다. ITO 박막의 상분석을 위해 XRD를 사용 하였고, SEM을 이용하여 미세구조를 관찰하였다. 실험 결과로는 기판온도 $400^{\circ}C$, 증착시간 15분 이상에서는 면 저항이 모두 $8\Omega$/$\Box$이하로 낮게 나왔으며, 투과율 또한 모두 80% 이상의 높은 투과도를 보였다. 또한 ITO박막의 전기 전도도는 캐리어 농도와 이동도의 측정을 통해 두 가지 인자들에 의해 비례되는 것을 확인하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.5
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• pp.454-462
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• 2023

Flash lamp annealing (FLA) of metal nanoparticle (NP) ink has provided powerful strategies to fabricate high-performance electrodes on a flexible substrate because of its rapid processing capability (in milliseconds), low-temperature process, and compatibility with to roll-to-roll process. However, metal NPs [e.g., gold (Au), silver (Ag), copper (Cu), etc.] have limitations such as difficulty in synthesizing fine metal NPs (diameter less than 10 nm), high price, and degradation during ink storage and FLA processing. In this regard, organometallic ink has been proposed as a material that can replace metal NPs due to their low-cost (usually 1/100 times cheaper than metal nano inks), low-temperature processability, and high material stability. Despite these advantages, the fabrication of flexible electrodes through FLA treatment of organometallic compounds has not been extensively researched. In this paper, we experimentally guide how to determine the optimal conditions for forming electrodes on flexible substrates by considering material parameters, and flashlight processing parameters (energy density, pulse duration, etc) to minimize the difficulties that may arise during the FLA of organometallic ink.

• 한국신재생에너지학회:학술대회논문집
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• 2010.11a
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• pp.41.1-41.1
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• 2010

전기수력학적 분무를 이용한 액적 미립화 기술은 나노사이즈의 액적 형성, 쿨롱 반발력에 의한 균일한 액적 형성, 그리고 향상된 액적 타겟팅을 가능하게 한다. 따라서 이를 이용하여 매우 균일한 박막 코팅이 가능하다. 이러한 점에 힘입어 현재 진공 공정으로 제작되고 있는 CIGS태양전지의 광흡수층을 비진공 공정중 하나인 전기수력학적 미립화를 이용하여 실험하였다. Ethanol-based 의 CIGS나노 입자를 포함하는 콜로이드 상태의 전구체를 이용하여 적절히 가열된 몰리브덴 배면 전극위에 적용하였다. 미립화한 액적은 접지된 몰리브덴 층에 부착되는 즉시 증발하여 CIGS입자를 남긴다. 여기서 가장 중요하게 다루어야 할 조건은 기판의 온도, 인가 전압, 전구체의 유량이다. 분사 모드는 Cone-jet을 적용하였으며 5~15kV의 인가 전압에서 1ml/hr내외의 유량을 공급하여 3분 이내에 적절한 광흡수층 두께인 1마이크론 내외에 도달할 수 있다. 이와같은 조건으로 형성된 박막층에 관한 SEM image를 통해 다른 비진공 코팅 방식과 비교하였다.

• 한국신재생에너지학회:학술대회논문집
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• 2005.06a
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• pp.291-295
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• 2005

The PEMFC behavior is quite complex and is influenced by several factors, including composition and structure of electrodes and membrane type. Fabrication of MFA is important factor for proton exchange membrane fuel cell. MFA of PEMFC with hot pressing and direct coating method were prepared, and performances were evaluated and compared each other. The effect of MEA preparation methods, hot pressing methods and direct coating methods, on the cell performance was analyzed by impedance spectroscopy and SEM. The performance of PEMFC wi th direct coat ing method was better than wi th hot pressing method because membrane internal resistance and membrane-:-interfacial resistance were reduced by elimination of hot pressing process in MEA fabrication. In addition the micro structure of MEA with direct coating method reveals uniform interface between membrane and catalyst layer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.230-234
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• 2005

Fabrication of MEA is important factor for proton exchange membrane fuel cell (PEMFC). MEA of PEMFC with hot pressing and direct coating method were prepared, and performances were evaluated and compared each other. The effect of MEA preparation methods, hot pressing methods and direct coating methods, on the cell performance was analyzed by impedance spectroscopy and SEM. The performance of PEMFC with direct coating method was better than with hot pressing method because membrane internal resistance and membrane-interfacial resistance were reduced by elimination of hot pressing process in MEA fabrication. In addition the micro structure of MEA with direct coating method reveals uniform interface between membrane and catalyst layer.

• Proceedings of the KIEE Conference
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• 1989.11a
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• pp.151-154
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• 1989

In the measurement of plasma parameters of the plasma C.V.D with probe method, the most important problem is the contamination of the probe surface. In this paper, we observe the surface contamination of probe surface with microscope and determine the critical current and the critical time to sustain the clean surface of probe in the plasma C.V.D.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.268-268
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• 2010

단일벽 탄소 나노튜브(SWCNT)는 그 뛰어난 전기적, 물리적 특성 때문에 반도체 공정에 있어서 중요한 p-type 채널 물질로 꼽히고 있다. 본 연구에서는 SWCNT를 성장하여 이를 이용한 전계효과 트랜지스터를 제작하고 또한, 부분적인 폴리머의 코팅으로 타입을 변화하는 연구를 보이고자 한다. Ferritin용액을 DI-water에 2000배 희석하여 SiO2 기판 위에 뿌린 뒤 Methanol을 이용하여 기판 표면에 촉매가 붙어있게 한다. 이 기판을 $900^{\circ}C$로 가열하여 유기물질을 제거한 뒤 화학 기상 증착(Chemical Vapor Deposition)방법으로 SWCNT를 성장하게 된다. 이렇게 성장된 SWCNT는 촉매의 농도에 비례하는 밀도를 가지게 되며 이 위에 전극을 증착하고 back-gate를 설치하여 FET를 제작한다. 메탈릭한 SWCNT는 breakdown 공정을 통하여 제거한 뒤, 전자 농도가 높은 NADH를 전체적으로 코팅을 한다. NADH는 기존의 다른 폴리머(polyethyleneimine: PEI)에 비교하여 코팅 후 전자 제공 효과가 크며 그 성질의 재현성이 높고 공기 중에서 안정성을 유지하는 능력이 있다. 이러한 NADH의 코팅으로 n-type으로의 SWCNT FET를 제작하였으며 type conversion 현상을 이용하면 국부적인 NADH의 코팅으로 homojunction-diode의 제작 등 다양한 소자의 제작에 적용될 것으로 예상한다.