• Journal of the Korea institute for structural maintenance and inspection
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• v.21 no.2
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• pp.87-94
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• 2017

In the nuclear power plant, the steel or polymer liner plates are adopted to prohibit the inner concrete surface from contacting with gas or liquid materials. If there is an accident, the plate may be damaged, and, in this case, concrete shall have the final responsibility to safety requirements. In this paper, an experimental research was carried out to investigate the effects of construction joint and wet and loading conditions on the permeability of concrete. The test results showed that, under a construction joint in the wet condition, leakage of gas pressure has been started from $1kg/cm^2$. However, when there are no construction joints, it is initiated from $2kg/cm^2$. In addition, under the air dried and unloading condition, regardless of with or without the presence of the construction joint, since the gas passage that exist in concrete is constant, leakage has a constant tendency to increase. Finally, under the loading condition, as described in Reference 1, since leakage is inversely proportional to the thickness of the wall, and, considering the wall thickness of the actual plant, it is found that there will not be no problem in the sealing of the gas.

• Journal of the Korean Institute of Gas
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• v.12 no.4
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• pp.8-13
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• 2008

The stray current interference problem could induce the corrosion of near-by structure and rail itself. Many efforts has been concentrated on the reduction of the interference. In this work the influences of separation distance, soil resistivity, pipe coating resistance, leak resistance of rail were studied using the numerical analysis methods. These analysis could be used to estimate the sensitivity of each variables in the study of the mitigation method and their numerical analysis.

• Journal of the Korean Institute of Gas
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• v.8 no.4 s.25
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• pp.1-7
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• 2004

In this paper, the FE analysis has been presented for the leakage safety of the membrane LNG storage tank based on the thermal resistance effects between the insulation panel and prestressed concrete structure. The FEM calculated results show that the leakage safety of plywood and polyurethane materials does not guarantee any more due to a strength failure of the insulation structure. But the PC structure of outer tank may delay leaked LNG of 10 days even though the inner tank and insulation structure are simultaneously failed. This means that the membrane LNG storage tank may be safe because of the stiffness of the outer tank.

• Journal of the Korean Institute of Gas
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• v.12 no.4
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• pp.14-20
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• 2008

In this numerical study, the leakage safety of the LNG tank in which is constructed by membrane inner tank-plywood-polyurethane form-plywood-prestressed concrete structures has been presented for four leakage analysis models. The LNG leak criterion of the tank wall with a storage capacity of $200,000\;m^3$ is analyzed based on the thermal resistance technique. This means that if the cryogenic temperature of a leaked LNG is detected at the outer side of the PC wall, it may be leaked through the wall thickness of the tank. The calculated results based on the thermal resistance method between two walls show that the plywood, PUF, and another plywood walls may block the leakage of the leaked LNG even though the strength of these walls is already collapsed by a leaked LNG pressure. But, the leaked LNG may pass the thickness of the prestressed concrete wall for a period of elapsed time even though the PC outer tank supports the leaked LNG pressure. Thus, the PC outer tank may extend the leakage time of a leaked LNG.

• Journal of Biosystems Engineering
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• v.17 no.4
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• pp.305-313
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• 1992

Dynamic seals have been continue to be one of the major technical problems facing stirling engine designers. Most of the modern engines use some version of the dry ring seal for piston and displacer seals. Friction power losses associated with seals are typically several percent of gross output power, with piston ring seals usually being the main contributor. Much effort has been expended to develop the seal mechanism of piston, but the performance of these seal devices is very poor. This study was conducted to examine the efficiency of the various types of the trial-made piston seal mechanism with reference to leakage of working fluid and friction losses. This paper described the successful hardware implementation of a stainless steel bellows element in stirling engine application with test data in power performance. The indicated power by use of the bellows was more than two times as that by use of the piston ring types. As the result of this study, bellows was provide as a reliable and efficient seal mechanism for any stirling engine application.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.176-176
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• 2012

본 연구는 GaN 기반의 전자소자의 표면 패시베이션 방법으로 열산화 공정을 이용한 알루미늄산화막 패시베이션 공정에 대하여 연구하였다. 결정질의 알루미늄산화물은 경도가 크고 화학적으로 안정적이기 때문에 외부 오염에 대한 소자 표면을 효과적으로 보호할 수 있으며, 열적안정성이 뛰어나 공정중 또는 공정 후의 고온 환경에서의 열 손상이 적은 장점을 가진다. 결정질 알루미늄산화막($Al_2O_3$)을 소자 표면에 형성하기 위해서 일반적으로 TMA (trimethlyaluminium)와 오존($O_3$)가스를 이용한 ALD 공정법이 사용되고 있으나 공정 비용이 비싸고 열산화막에 비해 전자 trapping이 많이 발생하여 전자이동도가 저하되는 단점이 있어, 본 연구에서는 열산화 공정을 이용하여 소자의 전기적 특성 저하를 발생시키지 않는 알루미늄산화막 패시베이션을 수행하였다. 실험에 사용된 기판은 AlGaN/GaN 이종접합 구조가 증착된 HEMT 제작용 기판을 사용하였으며 TLM 구조를 제작하여 소자의 채널 면저항 및 절연영역간 누설전류 특성을 확인하였다. TLM 구조가 제작된 샘플 위에 알루미늄을 100 ${\AA}$ 두께로 소자위에 증착하고 $O_2$ 분위기에서 약 $525{\sim}675^{\circ}C$ 온도로 3분간 열처리하여 알루미늄 산화막을 형성한 후 $950^{\circ}C$ 온도로 $N_2$ 분위기에서 30초간 안정화열처리 하여 안정한 알루미늄 산화막 패시베이션을 형성하였다. 알루미늄산화막 패시베이션 후 소자의 절연영역 사이의 누설전류는 패시베이션 전과 비슷한 크기를 나타냈고 패시베이션 후 채널의 면저항이 패시베이션 전에 비해 약 20% 감소한 것을 확인하였다. 또한 패시베이션된 소자와 패시베이션되지않은 소자에 대해 $900^{\circ}C$ 온도로 30초간 열처리한 결과 패시베이션 되지 않은 소자는 74%만큼 채널 면저항이 증가하였으며, 절연영역 누설전류가 다섯오더 크기로 증가한 반면 알루미늄산화막 패시베이션한 소자는 단지 13%의 채널 면저항의 증가를 나타내었고 절연영역 누설전류는 100배 감소한 값을 보여 알루미늄산화막 패시베이션이 소자의 열적 안정성을 향상시키는 것을 확인하였다.

• Journal of the Korean Institute of Gas
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• v.9 no.1 s.26
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• pp.1-8
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• 2005

In this study, the FE analysis has been presented for the leakage safety of $9\%$ nickel type LNG storage tank based on the thermal resistance effects between insulation panels, comer protection and prestressed concrete(PC) structures. The FEM calculated results show that the leakage safety of fiber glass blanket, perlite powder and cellular glass insulators does not guarantee any more due to a strength failure of the insulation structure. But the corner protection and PC structure of outer tank may delay or sustain the leaked LNG of 10 days even though the inner tank and insulation structure are simultaneously failed. This means that $9\%$ nickel steel type LNG storage tank may be safe because of a high strength of the corner protection and outer tank structures.

• Journal of the Korean Vacuum Society
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• v.10 no.2
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• pp.189-193
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• 2001

We have characterized physical and electrical properties of W-TiN stacked gate electrode structure with TiN as a diffusion barrier of fluorine. As the $N_2/Ar$ gas ratio increased during sputter deposition, TiN thin films became N-rich, and the resistivity of the films increased. However, the resistivity of W-TiN stacked gate reduced as a result of the crystallization of tungsten with the increase of $N_2/Ar$ gas ratio. On the other hand, tungsten in W-TiN stacked gate structure have the (100)-oriented crystalline structure although TiN films were subjected to annealing at high temperature (600~$800^{\circ}C$). Leakage currents of W-TiN gate MOS capacitors were less than $10^{-7}\textrm{/Acm}^2$ and also were lowered by the order of 2 compared with those of pure W gate electrode.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.456-456
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• 2010

CMOS 소자가 서브마이크론($0.1\;{\mu}m$) 이하로 스케일다운 되면서 단채널 효과(short channel effect), 게이트 산화막(gate oxide)의 누설전류(leakage current)의 증가와 높은 직렬저항(series resistance) 등의 문제가 발생한다. CMOS 소자의 구동전류(drive current)를 높이고, 단채널 효과를 줄이기 위한 가장 효율적인 방법은 소스 및 드레인의 얕은 접합(shallow junction) 형성과 직렬 저항을 줄이는 것이다. 플라즈마 도핑 방법은 플라즈마 밀도 컨트롤, 주입 바이어스 전압 조절 등을 통해 저 에너지 이온주입법보다 기판 손상 및 표면 결함의 생성을 억제하면서 고농도로 얕은 접합을 형성할 수 있다. 그리고 얕은 접합을 형성하기 위해 주입된 불순물의 활성화와 확산을 위해 후속 열처리 공정은 높은 온도에서 짧은 시간 열처리하여 불순물 물질의 활성화를 높여주면서 열처리로 인한 접합 깊이를 얕게 해야 한다. 그러나 접합의 깊이가 줄어듦에 따라서 소스 및 드레인의 표면 저항(sheet resistance)과 접촉저항(contact resistance)이 급격하게 증가하는 문제점이 있다. 이러한 표면저항과 접촉저항을 줄이기 위한 방안으로 실리사이드 박막(silicide thin film)을 형성하는 방법이 사용되고 있다. 본 논문에서는 (100) p-type 웨이퍼 He(90 %) 가스로 희석된 $PH_3$(10 %) 가스를 사용하여 플라즈마 도핑을 실시하였다. 10 mTorr의 압력에서 200 W RF 파워를 인가하여 플라즈마를 생성하였고 도핑은 바이어스 전압 -1 kV에서 60 초 동안 실시하였다. 얕은 접합을 형성하기 위한 불순물의 활성화는 ArF(193 nm) excimer laser를 통해 $460\;mJ/cm^2$의 에니지로 열처리를 실시하였다. 그리고 낮은 접촉비저항과 표면저항을 얻기 위해 metal sputter를 통해 TiN/Ti를 $800/400\;{\AA}$ 증착하고 metal RTP를 사용하여 실리사이드 형성 온도를 $650{\sim}800^{\circ}C$까지 60 초 동안 열처리를 실시하여 $TiSi_2$ 박막을 형성하였다. 그리고 $TiSi_2$의 두께를 측정하기 위해 TEM(Transmission Electron Microscopy)을 측정하였다. 화학적 결합상태를 분석하기 위해 XPS(X-ray photoelectronic)와 XRD(X-ray diffraction)를 측정하였다. 접촉비저항, 접촉저항과 표면저항을 분석하기 위해 TLM(Transfer Length Method) 패턴을 제작하여 I-V 특성을 측정하였다. TEM 측정결과 $TiSi_2$의 두께는 약 $580{\AA}$ 정도이고 morphology는 안정적이고 실리사이드 집괴 현상은 발견되지 않았다. XPS와 XRD 분석결과 실리사이드 형성 온도가 $700^{\circ}C$에서 C54 형태의 $TiSi_2$ 박막이 형성되었고 가장 낮은 접촉비저항과 접촉저항 값을 가진다.

• Journal of the Korean Institute of Gas
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• v.7 no.3 s.20
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• pp.13-17
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• 2003

A membrane unit for Liquefied Natural Gas (LNG) storage tank is a structural member which is designed specifically for preventing undesirable LNG leakage. Membrane units have to endure gas and liquid pressures by LNG and thermal stresses by the contact with cryogenic liquid of $-162^{\circ}C$. It is of importance to assure the strengths of membrane by experimental stress analysis under the temperature of LNG. In this paper, we proposed measurement system using commercial electrical strain gage and mechanical extension meter designed for this study.