• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• Design & Manufacturing
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• v.11 no.1
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• pp.50-54
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• 2017

In this study, researches were conducted as follows. First, as the basic experiment, the cutting speed, feedrate, and the depth of cut were set as the process parameters, and by setting the surface roughness as the factor of measurement for each of the combinations, and the analysis about cutting tendency of the material was conducted by proceeding the turning process of Co-Cr-Mo alloy. Second, by setting the feature of the surface roughness according to the 'turning processing condition' that was confirmed in the previous experiment, and by applying the Taguchi Method, the conditions that influence the features of the surface roughness according to the 'turning processing condition' of Co-Cr-Mo was analyzed, and also by measuring the surface roughness according to each of the 'cutting conditions', the optimal processing condition was generated. As the result of analysis, it was possible to understand that the factor that mostly affects the surface roughness was the cutting speed, followed by the dept of cutting and transfer speed, and as for the optimal processing condition, it was possible to find that the cutting speed was 5,000rpm, and the depth of cut was 0.1mm, and the feedrate was 0.003mm/rev, and the value of the surface roughness at this point is $0.197{\mu}m$.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2011.05a
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• pp.676-677
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• 2011

Rhenium-Iridium(Re-Ir) thin films were deposited onto the tungsten carbide(WC) molding core by sputtering system. The Re-Ir thin films on tungsten carbide molding core were analyzed by scanning electron microscope(SEM) and surface roughness. The Re-Ir coating technique has been intensive efforts in the field of coating process because the coating technique and process have been their feature, like hardness, high elasticity, adrasion resistance and mechanical stability and also have been applied widely the industrial and biomedical areas. In this report, tungsten carbide(WC) molding core was manufactures using high performance precision machining and the efforts of Re-Ir coating on the surface roughness.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.9
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• pp.2089-2104
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• 1995

A novel and efficient cutter path planning method for machining intricately shaped curved surfaces, called the steepest directed tree method, is presented. The curved surface is defined by triangular facets, the density and structure of which are determined by the intricacy and form accuracy of the surface. Geometrical form definition and recognition of the topological features are used to connect the nodes of the triangulated surface meshes for the successive and interconnected steepest pathways, which makes good use of end milling characteristics. The planetary cutter centers are determined to locate along smoothly changing paths and then the height values of the cutter are adjusted to avoid surface interference. Several machined examples of intersecting and intricate surfaces are presented to illustrate the benefits of the new approach. It is shown that due to more consistent geometry matching between cutter and surface(in comparison with the current CC Cartesian method) surface finish can be typically improved. Moreover, the material in concave fillets which is difficult to be removed by ball mills can be removed efficiently. The built-in positioning of cutter to avoid interference runs minutely in the sharp and discontinuous regions. The steepest upward movement of the cutter gives a stable dynamic cutting state and allows increase in the feedrate and spindle speed while remaining the stable cutting state.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.828-829
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• 2010

Rhenium-Iridium(Re-Ir) thin films were deposited onto the tungsten carbide(WC) molding core by sputtering system. The Re-Ir thin films on tungsten carbide molding core were analyzed by scanning electron microscope(SEM) and surface roughness. The Re-Ir coating technique has been intensive efforts in the field of coating process because the coating technique and process have been their feature, like hardness, high elasticity, adrasion resistance and mechanical stability and also have been applied widely the industrial and biomedical areas. In this report, tungsten carbide(WC) molding core was manufactures using high performance precision machining and the efforts of Re-Ir coating on the surface roughness.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.3
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• pp.219-223
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• 2011

Rhenium-Iridium(Re-Ir) thin films were deposited onto the tungsten carbide(WC) molding core by sputtering system. The Re-Ir films were prepared by multi-target sputtering with iridium, rhenium and chromium as the sources. Argon and nitrogen were inlet into the chamber to be the plasma and reactive gases. The Re-Ir thin films were prepared with targets having atomic percent of 3:7 and the Re-Ir thin films were formed with 240 nm thickness. The Re-Ir thin films on tungsten carbide molding core were analyzed by scanning electron microscope(SEM) and surface roughness. Also, adhesion strength and coefficient friction of Re-Ir thin film were examined. The Re-Ir coating technique has been intensive efforts in the field of coating process because the coating technique and process have been their feature, like hardness, high elasticity, abrasion resistance and mechanical stability and also have been applied widely the industrial and biomedical areas. In this report, tungsten carbide(WC) molding core was manufactures using high performance precision machining and the efforts of Re-Ir coating on the surface roughness.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.10
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• pp.88-94
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• 2021

Machining operations require the removal of chips to keep the water-soluble cutting oil clean and fresh throughout the operation time. Water-soluble cutting oil for metal processing is diluted using a 3-8% solution in water which is generally replaced every three to six months. This study aims to develop multiple purification devices to efficiently remove fine contaminating particles from water-soluble cutting oil. The 2D concept designs were created using AutoCAD. The designs were drawn using the 3D modelling feature of CATIA. Flow analysis was performed in a bubble purifier using Ansys computational fluid dynamics (CFD). This analysis has aided in improving the design and structure of the device to create the final prototype. Experiments were conducted to check the prototype's performance. Comparisons of the effects of each process variable on the experiment was carried out using ANOVA.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.5
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• pp.98-107
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• 1995

The in-process detection of drill wear and breakage is one of the most importnat technical problems in unmaned machining system. In this paper, the monitoring system is developed to monitor abnormal drilling states such as drill breakage, drill wear and unstable cutting using motor current. Drill breakage is detected by level monitoring. Tool wear is classified by fuzzy pattern recognition. The key feature for classification of tool wear is the estimated flank wear which is calculated by the proposed flank wear model. The characteristic of the model is not sensitive to the variation of cutting conditions but is sensitive to drill wear state. Unstable cutting states due to the unsmooth chip disposal and the overload are monitored by the variance/mean ratio of spindle motor current. Variance/mean ratio also includes the information about the prediction of drill wear and drill breakage. The evaluation experiments have shown that the developed system works very well.

• Korean Journal of Materials Research
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• v.17 no.1
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• pp.31-36
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• 2007

Nanoimprint lithography (NIL) is a new lithographic method that offers a sub-10nm feature size, high throughput, and low cost. One of the most serious problems of NIL is the stiction between mold and resist. The antistiction layer coating is very effective to prevent this stiction and ensure the successful NIL results. In this paper, an antistiction layer was deposited by VSAM (vapor self assembly monolayer) method on silicon samples with FOTS (perfluoroctyltrichlorosilane) as a precursor for making an antistiction layer. A specially designed LPCVD (low pressure chemical vapor deposition) was used for this experiment. All experiments were achieved after removing the humidity. First, the evaporation test of FOTS was performed for checking the evaporation temperature at low pressure. FOTS was evaporated at 5 Tow and $110^{\circ}C$. In order to evaluate the temperature effect on antistiction layer, chamber temperature was changed from 50 to $170^{\circ}C$ with 0.1ml of FOTS for 1 minute. Good hydrophobicity of all samples was shown at about $110^{\circ}$ of contact angle and under $20^{\circ}$ of hysteresis. The surface energies of all samples calculated by Lewis acid/base theory was shown to be about 15mN/m. The deposited thicknesses of all samples measured by ellipsometry were almost 1nm that was similar value of the calculated molecular length. The surface roughness of all samples was not changed after deposition but the friction force showed relatively high values and deviations deposited at under $110^{\circ}$. Also the white circles were founded in LFM images under $110^{\circ}$. High friction forces were guessed based on this irregular deposition. The optimized VSAM process for FOTS was achieved at $170^{\circ}C$, 5 Torr for 1 hour. The hot embossing process with 4 inch Si mold was successfully achieved after VSAM deposition.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.40 no.2
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• pp.145-149
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• 2017

One of the challenges facing precision manufacturers is the increasing feature complexity of tight tolerance parts. All engineering drawings must account for the size, form, orientation, and location of all features to ensure manufacturability, measurability, and design intent. Geometric controls per ASME Y14.5 are typically applied to specify dimensional tolerances on engineering drawings and define size, form, orientation, and location of features. Many engineering drawings lack the necessary geometric dimensioning and tolerancing to allow for timely and accurate inspection and verification. Plus-minus tolerancing is typically ambiguous and requires extra time by engineering, programming, machining, and inspection functions to debate and agree on a single conclusion. Complex geometry can result in long inspection and verification times and put even the most sophisticated measurement equipment and processes to the test. In addition, design, manufacturing and quality engineers are often frustrated by communication errors over these features. However, an approach called profile tolerancing offers optimal definition of design intent by explicitly defining uniform boundaries around the physical geometry. It is an efficient and effective method for measurement and quality control. There are several advantages for product designers who use position and profile tolerancing instead of linear dimensioning. When design intent is conveyed unambiguously, manufacturers don't have to field multiple question from suppliers as they design and build a process for manufacturing and inspection. Profile tolerancing, when it is applied correctly, provides manufacturing and inspection functions with unambiguously defined tolerancing. Those data are manufacturable and measurable. Customers can see cost and lead time reductions with parts that consistently meet the design intent. Components can function properly-eliminating costly rework, redesign, and missed market opportunities. However a supplier that is poised to embrace profile tolerancing will no doubt run into resistance from those who would prefer the way things have always been done. It is not just internal naysayers, but also suppliers that might fight the change. In addition, the investment for suppliers can be steep in terms of training, equipment, and software.