• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.211.2-211.2
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• 2014

Epitaxial complex oxide thin film heterostructures have attracted a great attention for their multifunctional properties, such as ferroelectricity, and ferromagnetism. Two dimensional electron gas (2DEG) confined at the interface between two insulating perovskite oxides such as LaAlO3/SrTiO3 interface, provides opportunities to expand various electronic and memory devices in nano-scale. Recently, it was reported that the conductivity of 2DEG could be controlled by external electric field. However, the switched conductivity of 2DEG was not stable with time, resulting in relaxation due to the reaction between charged surface on LaAlO3 layer and atmospheric conditions. In this report, we demonstrated a way to control the conductivity of 2DEG in non-volatile way integrating ferroelectric materials into LAO/STO heterostructure. We fabricated epitaxial Pb(Zr0.2Ti0.8)O3 films on LAO/STO heterostructure by pulsed laser deposition. The conductivity of 2DEG was reproducibly controlled with 3-order magnitude by switching the spontaneous polarization of PZT layer. The controlled conductivity was stable with time without relaxation over 60 hours. This is also consistent with robust polarization state of PZT layer confirmed by piezoresponse force microscopy. This work demonstrates a model system to combine ferroelectric material and 2DEG, which guides a way to realize novel multifunctional electronic devices.

• Transactions on Electrical and Electronic Materials
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• 제15권2호
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• pp.96-99
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• 2014

We fabricated $(Li_{0.5-x}Na_xLa_{0.5})Ti_{0.8}Zr_{0.2}O_3$(LNTLZ)ceramics ($0{\leq}x{\leq}0.4$) with a perovskite structure via standard solid state synthesis. The influence of Na content on the structural and electrical properties of LNTLZ ceramics was also investigated. During XRD patterns analysis, all of the samples showed orthorhombic structure. The resistance of LNTLZ ceramics decreased as Na content increased, and the maximum activation energy shows 0.56 eV at x=0.4 at room temperature. These results indicated that LNTLZ ceramics are a candidate for use Lithium ion batteries as electrolytes.

• 한국표면공학회지
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• 제47권5호
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• pp.263-268
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• 2014

Nanocrystalline diamond(NCD) coated SiC balls were applied in a ball-on-disk tribometer. After seeding in an ultrasonic bath containing nanometer diamond powders, $2.2{\mu}m$ thick NCD films were deposited on sintered 3 mm diameter SiC balls at $600^{\circ}C$ in a 2.45 GHz microwave plasma CVD system. Bare $ZrO_2$ and SiC balls were prepared for comparison as test balls. Tribology tests were performed in air with pairs of three different balls and mirror polished steel(SKH51) disk. The wear tracks on balls and disks were examined by optical microscope and alpha step profiler. Under the load of 3 N, the friction coefficients of steel against $ZrO_2$, SiC and NCD-coated balls were between 0.4 and 0.8. After a few thousands sliding laps, the friction coefficient of NCD-coated balls dropped from 0.45 to below 0.1 and maintained thereafter. Under a higher load of 10 N or 20 N with a long sliding distance of 2 km, $ZrO_2$ and SiC balls exhibited the similar friction coefficients as above. The friction coefficient of NCD-coated balls was less than 0.1 from the beginning and increased to above 0.1 steadily or with some fluctuations as sliding distance increased. NCD coating layers were found worn out after long duration and/or high load sliding test, which resulted in the friction coefficient higher than 0.1.

• 대한화학회지
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• 제55권3호
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• pp.418-429
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• 2011

[ $N^1,N^2$ ]bis(3-((3-hydroxynaphthalen-2-yl)methylene-amino)propyl)phthalamide ($H_4L$, 1) 의 새로운 크롬(III), 망간(II), 철(III), 코발트(II), 니켈(II), 구리(II), 루테늄(III) 및 산화 지르코늄(II) 착물을 합성하여 원소분석, 물리적 성질 및 분광학적으로 특성을 규명하였다. 분광학적 결과를 통해 이 리간드는 $[H_4LMX_2(H_2O)]{\cdot}nH_2O$ (M = Cu(II), Ni(II), Co(II), X = Cl 또는 $NO_3$)의 일반식을 갖는 착물2-5에서는 중성의 삼배위 리간드로 행동한다. 또는 $[H_4L(ZrO)_2Cl_2]{\cdot}8H_2O$ 의 일반식을 갖는 착물 6-9 에서는 이염기성 육배위 리간드로 행동한다. DMF 용액에서의 몰전기전도도 실험결과 이들 착물은 비이온성을 나타낸다. 고체 구리착물 2, 5 및 6 의 ESR 스펙트럼에서 $g_{\parallel}$ >g> $g_e$을 보이는데, 이는 일그러진 팔면체구조와 큰 공유결합성을 갖는 $d{_x}^2{_{-y}}^2$ 오비탈에 비공유 전자쌍이 존재함을 의미한다. 이합체 구리(II) 착물 $[H_2LCu_2Cl_2(H_2O)_4]{\cdot}3H_2O$ (6)에 대해 두 구리원자 사이의 거리를 ESR 스펙트럼으로부터 추정한 parallel component 의 field zero splitting 파라메타를 이용하여 계산하였다. 이들 화합물의 항박테리아 및 항균 활성도를 측정한 결과, 몇가지 금속 착물의 경우 표준시약인 tetracycline (박테리아) 및 Amphotricene B (균류)보다 더 큰 저해효과를 보였다.

• Bulletin of the Korean Chemical Society
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• 제29권9호
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• pp.1737-1741
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• 2008

The electrochemical and thermal stability of $LiNi_{0.8}Co_{0.16}Al_{0.04}O_2$ were studied before and after $Co_3(PO_4)_2$ coating. Different to conventional coating material such as $ZrO_2$ or AlPO4, the coating layer was not detected clearly by TEM analysis, indicating that the $Co_3(PO_4)_2$ nanoparticles effectively reacted with surface impurities such as $Li_2CO_3$. The coated sample showed similar capacity at a low C rate condition. However, the rate capability was significantly improved by the coating effect. It is associated with a decrease of impedance after coating because impedance can act as a major barrier for overall cell performances in high C rate cycling. In the DSC profile of the charged sample, exothermic peaks were shifted to high temperatures and heat generation was reduced after coating, indicating the thermal reaction between electrode and electrolyte was sucessfully suppressed by $Co_3(PO_4)_2$ nanoparticle coating.

• 한국재료학회지
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• 제9권2호
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• pp.188-194
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• 1999

2원계 (Zr-xNb, Zr-xSnl 와 3원계 (Zr-O.8Sn-xNb, Zr-O.4Nb-xSnl Zr합금의 기계적 특성에 미치는 Nb와 Sn의 영향올 조사하기 위하여 인장시험 빛 마세조직 분석을 실시하였다. Nb와 Sn량이 많이 첨가될수록 2원계와 3원계 합금의 강도는 정진적으로 증가하는 경향을 보이는데, Nb와 Sn이 고용도 이상으로 첨가될 때 강도중가는 더욱 두드러진 것으로 냐타났다. 강도 증가현상을 고용강화, 석출강화, 결정립 미세화에 의한 강화, 집합조직에 의한 강화효과 관정에서 분석한 결과, 고용강화 효과가 가장 두드러지며 Nb와 Sn이 고용도 이상에서는 석출강화가 강도에 기여하는 것으로 냐타났다. 합금원소 첨가에 따른 결정립미세화도 강도에 약간은 영향을 미치는 것으로 사료된다. 그러나 집합조직은 합금원소 변화에 따라서 거의 변화가 없는 것으로 냐타났으므로 집합조직은 강도증가에 기여하지 않는 것으로 생각된다.

• The Korean Journal of Ceramics
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• 제5권3호
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• pp.217-223
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• 1999

Proten-conductive $SrZr_{0.95} Y_{0.05} O_{2.975}$ powder was prepared by citrate gel method its characteristics and sinterability were investigated. Amorphous gel could be obtained from a citric acid solution that $SrCO_3$ and metal nitrates were dissolved. The initial decomposition of the gel proceeded up to $250^{\circ}C$, followed by combustion of its decomposition products in the temperature range from $250^{\circ}C$ to $500^{\circ}C$. A well-crystallized perovskite phase with a stoichiometric composition after calcination at $1000^{\circ}C$. Sintering green compacts of this powder for 6 h showed a considerable densification to start at $1200^{\circ}C$ and resulted in 86.8% and 96.5% relative densities at $1400^{\circ}C$ and $1600^{\circ}C$, respectively. Whereas, the powder compacts prepared by solid state reaction had much lower relative densities, 73% at $1400^{\circ}C$ and 92% at $1600^{\circ}C$.

• 한국재료학회지
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• 제8권12호
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• pp.1152-1157
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• 1998

금속 타겟들을 이용한 반응성 스퍼터링법으로 $460~540^{\circ}C$범위에서 $Pt/Ti/SiO_2$/Si 기판위에 PZT 박막을 증착하였다. Perovskite상의 핵형성을 위해 Pb 휘발이 적은 저온($480^{\circ}C$)에서 짧은 시간 동안 PZT 박막을 증착한 후 Pb가 PBT 박막내에 과잉으로 함유되는 것을 억제하기 위하여 증착 온도를 증가시켜 박막을 증착하는 2단계 증착법을 사용한 결과 54$0^{\circ}C$의 고온에서도 perovskite 단일상과 화학양론비에 가까운 조성을 얻을 수 있었다. 2단계 증착법으로 제조된 PZT 박막은 우수한 전기적 특성을 나타내었으며 후속 RTA 처리로 더욱 특성을 향상시킬 수 있었는데 $17\mu$C/$\textrm{cm}^2$의 잔류분극, 45kv/cm의 coercive field, 그러고 -500kv/cm의 높은 전기장에서도 $10^{-4}$ A/$\textrm{cm}^2$의 양호한 누설전류 특성을 나타내었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.296-296
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• 2016

ITO films doped with a small amount of high-permittivity materials not only retain the basic properties of ITO films but also improve some of their properties. We report the highly conductive and transparent (ITO:Zr) films with various substrate (RT to 300oC) temperatures on glass substrate for the HIT solar cell applications. We observed a decrease in sheet resistance from 36 to $11.8{\Omega}/{\Box}$ with the increasing substrate temperature from RT to 300oC, respectively. The ITO:Zr films showed also lowest resistivity of $1.38{\times}10-4{\Omega}.cm$ and high mobility of 42.37cm-3, respectively. The surface and grain boundaries are improved with the increase of substrate temperature as shown by SEM and AFM surface morphologies. The highly conductive and transparent ITO:Zr films were employed as front electrode in HIT solar cell and the best performance of device was found to be Voc = 710 mV, Jsc = 33.70 mA/cm2, FF = 0.742, ${\eta}=17.76%$ at the substrate temperature of $200^{\circ}C$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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• pp.56-59
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• 2000

In this study, Ferroelectric $Pb(Zr_x,Ti_{1-x})O_3$(x=0.53) thin films were fabricated by the spin-coating on the Pt/Ti/$SiO_2$/Si substrate using the PZT metal alkoxide solutions with various excess Pb contents. Etching of PZT film was performed using planar inductively coupled Ar(20)$/Cl_2/BCl_3$ plasma. The etch rate of PZT film was 2450 ${\AA}/min$ at Ar(20)$/BCl_3$(80) gas mixing ratio and substrate temperature of $80^{\circ}C$. The leakage current densities of before etching and after etching PZT thin film were $6.25\times10^{-8}A/cm^2$, $8.74\times10^{-7}A/cm^2$ with electric field of 0.07MV/em, respectively.