• 제목/요약/키워드: $TiO_2-_xN_x$

검색결과 386건 처리시간 0.028초

고체산화물 연료전지용 Strontium Titanate 세라믹 접속자 소재의 소결 거동 및 전기적 특성 (Sintering Behavior and Electrical Properties of Strontium Titanate-Based Ceramic Interconnect Materials for Solid Oxide Fuel Cells)

  • 박범경;이종원;이승복;임탁형;박석주;송락현;신동열
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 추계학술대회 초록집
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    • pp.80.1-80.1
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    • 2010
  • A strontium titanate ($SrTiO_3$)-based material with a perovskite structure is considered to be one of the promising alternatives to $LaCrO_3$-based materials since $SrTiO_3$ perovskite shows a high chemical stability under both oxidizing and reducing atmospheres at high temperatures. $SrTiO_3$ materials exhibit an n-type semiconducting behavior when it is donor-doped and/or exposed to a reducing atmosphere. In this work, $Sr_{1-x}La_xTi_{1-y}M_yO_3$ materials doped with $La^{3+}$ in A-sites and aliovalent transition metal ions ($M^{n+}$) in B-sites were synthesized by the modified Pechini method. The X-ray diffraction analysis indicated that the materials synthesized by the Pechini process exhibited a single curbic perovskite-type structure without any impurity phases, and are tolerant, to some extent, to cation doping. The sintering behaviors of $Sr_{1-x}La_xTi_{1-y}M_yO_3$ in $H_2/N_2$ and air were characterized by dilatometry and microstructural observations. The electrical conduction mechanism and the dopant effect are discussed based on the defect structures and the electrical conductivities measured at various oxygen partial pressures and temperatures.

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졸-겔 방법으로 제조한 TiN 박막에 관한 연구 (A Study on the TiN Thin Film by Sol-Gel Method)

  • 김왕섭;선효님;김경용;김병호
    • 한국세라믹학회지
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    • 제29권4호
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    • pp.328-334
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    • 1992
  • TiO2 sols were prepared by hydrolysis and polymerization of titanium tetra-isopropoxide (TTIP) in the presence of diethanolamine (DEA). The optimal mole ratio of water to TTIP is 2 and the concentration of the TiO2 sol 0.7 M. Golden TiN films without cracks were obtained by dipping Si(110) wafers into the TiO2 sol and followed by nitridation in NH3 at 1100$^{\circ}C$ for 5 h. The TiN films were studied by an optical microscope, DTA, TGA and X-ray analysis.

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$(Sr_{1-x}.Ca_x)TiO_3$입계층 세라믹의 유전 및 전기전도특성에 관한 연구 (A study on the dielectric and electrical conduction properties of$(Sr_{1-x}.Ca_x)TiO_3$ grain boundary layer ceramics)

  • 최운식;김충혁;이준웅
    • E2M - 전기 전자와 첨단 소재
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    • 제8권5호
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    • pp.611-618
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    • 1995
  • The (Sr$_{1-x}$ .Ca$_{x}$)TiO$_{3}$+0.6[mol%]Nb$_{2}$O$_{5}$ (0.05.leq.x.leq.0.2) ceramics were fabricated to form semiconducting ceramics by sintering at about 1350[.deg. C] in a reducing atmosphere(N$_{2}$ gas). Metal oxides, CuO, was painted on the both surface of the specimens to diffuse to the grain boundary. They were annealed at 1100 [.deg. C] for 2 hours. The 2nd phase formed by thermal diffusing from the surface lead to a very high apparent dielectric constant. According to increase of the frequency as a functional of temperature, all specimens used in this study showed the dielectric relaxation, and the relaxation frequency was above 106 [Hz], it move to low frequency with increasing resistivity of grain. The specimens showed three kinds of conduction mechanisms in the temperature range 25-125 [.deg. C] as the current increased: the region I below 200 [V/cm] shows the ohmic conduction. The region rt between 200 [V/cm] and 2000 [V/cm] can be explained by the Poole-Frenkel emission theory, and the region III above 2000 [V/cm] is dominated by the tunneling effect.fect.

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Ion assisted deposition of $TiO_2$, $ZrO_2$ and $SiO_xN_y$ optical thin films

  • Cho, H.J.;Hwangbo, C.K.
    • 한국진공학회지
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    • 제6권S1호
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    • pp.75-79
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    • 1997
  • Optical and mechanical characteristics of $TiO-2, ZrO_2 \;and\; SiO_xN_y$ thin films prepared by ion assisted deposition (IAD) were investigated. IAD films were bombarded by Ar or nitrogen ion beam from a Kaufman ion source while they were grown in as e-beam evaporator. The result shows that the Ae IAD increases the refractive index and packing density of $TiO_2 films close to those of the bulk. For $ZrO_2$ films the Ar IAD increases the average refractive index decreases the negative inhomogeneity of refractive index and reverses to the positive inhomogeneity. The optical properties result from improved packing density and denser outer layer next to air The Ar-ion bombardment also induces the changes in microstructure of $ZrO_2$ films such as the preferred (111) orientation of cubic phase increase in compressive stress and reduction of surface roughness. Inhomogeneous refractive index SiOxNy films were also prepared by nitrogen IAD and variable refractive index of $SiO_xN_y$ film was applied to fabricate a rugate filter.

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TiAl-W-Zr 합금에 생성된 고온산화막 분석 (Characterization of Oxide Scales Formed on TiAl-W-Zr Alloys)

  • 우성욱;이동복
    • 한국재료학회지
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    • 제14권6호
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    • pp.394-398
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    • 2004
  • A Ti47Al1.7W-3.7Zr alloy was oxidized between $900^{\circ}C$ and $1050^{\circ}C$, and the oxide scales formed were studied. The oxide scales consisted primarily of an outer$TiO_2$ layer, an intermediate $Al_2$$O_3$-rich layer, and an inner mixed ($TiO _2$ + $Al_2$$O_3$) layer. Besides $TiO_2$ and $Al_2$$O_3$, oxidation led to the formation of some $Ti_2$AlN and TiN. Both W and Zr were preferentially segregated below the intermediate $Al_2$$O_3$-rich layer. Tungsten in the oxide scale was present as $WO_3$ and ${Ti}_{x}$$W_{1-x}$, whereas zirconium as monoclic-$ZrO_2$ and tetragonal-$ZrO_2$.

Pb(Sb1/2Sn1/2)O3-PbTiO3-PbZrO3 세라믹스의 유전 및 압전 특성에 관한 연구 (A Study on the Dielectric and Piezoelectric properties of the Pb(SbS11/2TSnS11/2T)OS13T-PbTiOS13T-PbZrOS13T Ceramics)

  • 정장호;류기원;이성갑;이영희
    • 대한전기학회논문지
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    • 제41권5호
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    • pp.517-524
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    • 1992
  • In this study, 0.10Pb(SbS11/2TSnS11/2T)OS13T-(0.90-x)PbZrOS13T (0.25 x 0.40) ceramics were fabricated by the atmospheric method. The sintering temperature and time were 1250[$^{\circ}C$] and 2[2hr], respectively. The structureal, dielectric and piezoelectric properties with composition of PbTiOS13T were studied. As the results of XRD ans SEM, the crystal structure of a specimen was rhombohedral, lattice constant and average grain size were decreased with increasing the contents of PbTiOS13T. Relative dielectric constant and Curie temperature were increased with increasing the contents of PbTiOS13T, 0.10PSS-0.40PT-0.50PZ specimen had the highest values of 904 and 265[$^{\circ}C$], respectively. In increasing of PbTiOS13T contents form 25[mol%] to 40[mol%], piezoelectric charge constant and electromechanical coupling factors were increased form 114[pC/N] to 142[pC/N], 17[%] to 24[%] and mechanical quality factor were decreased with increasing the contents of PbTiOS13T. In the 0.10PSS-0.40PT-0.50PZ specimens, those values were 14.2[kV/cm] and 9.43[x10S0-6TC/cmS02T], resectively.

BCl3/He 유도결합 플라즈마를 이용한 TiN 박막의 식각 특성 (Dry Etching Characteristics of TiN Thin Films in BCl3/He Inductively Coupled Plasma)

  • 주영희;우종창;김창일
    • 한국전기전자재료학회논문지
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    • 제25권9호
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    • pp.681-685
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    • 2012
  • We investigated the dry etching characteristics of TiN in $TiN/Al_2O_3$ gate stack using a inductively coupled plasma system. TiN thin film is etched by BCl3/He plasma. The etching parameters are the gas mixing ratio, the RF power, the DC-bias voltages and process pressures. The highest etch rate is in $BCl_3/He$ (25%:75%) plasma. The selectivity of TiN thin film to $Al_2O_3$ is pretty similar with $BCl_3/He$ plasma. The chemical reactions of the etched TiN thin films are investigated by X-ray photoelectron spectroscopy. The intensities of the Ti 2p and the N 1s peaks are modified by $BCl_3$ plasma. Intensity and binding energy of Ti and N could be changed due to a chemical reaction on the surface of TiN thin films. Also we investigated that the non-volatile byproducts such as $TiCl_x$ formed by chemical reaction with Cl radicals on the surface of TiN thin films.

Sonochemical Synthesis and Sonocatalysis Performance Behavior of Ag2Se and Ag2Se/TiO2 Nanocomposites

  • Zhu, Lei;Oh, Won-Chun
    • 한국세라믹학회지
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    • 제52권6호
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    • pp.489-496
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    • 2015
  • In this study, novel $Ag_2Se$ sensitized $TiO_2$ nanocomposites were prepared by facile sonochemical assisted synthesis method. The as-prepared products were characterized by X-ray diffraction (XRD), Scanning electron microscopy (SEM) with energy dispersive X-ray (EDX) analysis, transmission electron microscopy (TEM), and N2 adsorption BET analysis. The as-prepared $Ag_2Se/TiO_2$ nanocomposites simultaneously possessed great adsorptivity for organic dyes and efficient charge separation properties. In the decolorization of rhodamine B, a significant enhancement in the reaction rate was observed for the $Ag_2Se/TiO_2$ nanocomposite compared to the cases of using pure P25 or $TiO_2$. The sonocatalysis activity was higher due to the greater formation of reactive radicals, as well as to the increase of the active surface area of the $Ag_2Se/TiO_2$ nanocomposite.

Preparation and photocatalytic activity of ACF/$TiO_2$ composites by using titanium n-butoxide and acid modified activated carbon fiber

  • Oh, Won-Chun;Kwon, Ho-Joug;Chen, Ming-Liang;Zhang, Feng-Jun;Ko, Weon-Bae
    • 한국결정성장학회지
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    • 제19권3호
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    • pp.144-151
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    • 2009
  • Photocatalytic degradation of methylene blue (MB) in aqueous solution was investigated using $TiO_2$ coated on various acid modified activated carbon fiber (ACF). The ACFs/$TiO_2$ composites were prepared from titanium n-butoxide (TNB) as titanium precursor and various acid modified ACFs. The prepared samples are heat treated at 973 K. Then the ACF/$TiO_2$ composites were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), energy dispersive X-ray analysis (EDX). Moreover, photocatalytic degradation of MB by the ACF/$TiO_2$ composites was determined under UV irradiation. The results shows that the photocatalytic activity of ACF/$TiO_2$ composites ($AT1{\sim}AT4$) prepared with TNB and various acid modified ACF was much better than that of ACF/$TiO_2$ composite (AT) prepared with TNB and non-acid modified ACF, and the effects improved with order of sample AT3 > AT4 > AT1 > AT2.

($Sr_{1-x}Ca_x)TiO_3$ 세라믹 박막의 제조 및 유전특성 (Fabrication and Dielectric Properties of $(Sr_{1-x}Ca_x)TiO_3$ Ceramic Thin Films)

  • 김진사;조춘남;오용철;신철기;김충혁;송민종;소병문;최운식;이준웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 C
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    • pp.1496-1498
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    • 2003
  • The $(Sr_{0.85}Ca_{0.15})TiO_3$(SCT) thin films were deposited on Pt-coated electrode (Pt/TiN/$SiO_2$/Si) using RF sputtering method according to the deposition condition. The optimum conditions of RF power and Ar/$O_2$ ratio were 140[W] and 80/20, respectively. Deposition rate of SCT thin films was about 18.75[${\AA}/min$] at the optimum condition. The capacitance characteristics had a stable value within ${\pm}4[%]$. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films were observed above 200[kHz].

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