• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1991.10a
• /
• pp.20-23
• /
• 1991

In this study, 0.05Pb(Mn$\_$1/3/Nb$\_$2/3/)O$_3$+ 0.95Pb(Zr/Ti)O$_3$+x[wt%]Cr$_2$O$_3$piezoelectric ceramics were fabricated by Hot-press method, and its structural, dielectrical, piezoelectrical properties, temperature stability and aging characteristics were investigated. Among the MPB and tetragonal compositions, the specimens with 0.2, 0.3 and 0.4 [wt%] Cr$_2$O$_3$ additive amount had the poisson ratio more than 1/3. At tetragonal phase, the aging was small, and the temperature stability was improved by Cr addition. The specimen most suitable to the HF device substrate was the one with the composition of 47/53 (Zr/Ti) an 0.4 [wt%] Cr$_2$O$_3$addition.

• Journal of the Korean Ceramic Society
• /
• v.25 no.3
• /
• pp.231-236
• /
• 1988

In order to investigate the effect of second phase on $Al_2O_3$ matrix, SiC particles were dispersed in $Al_2O_3$ matrix as a second phase over the content range of 5 vol.% to 20 vol.%. To this mixture, $Y_2O_3$ or $TiO_2$ powders were added as a sintering additive before isostatically pressing and pressurelessly sintering at 180$0^{\circ}C$ for 90 min in $N_2$ atmosphere. With increasing SiC content, relative densities of composites were decreased but mechanical properties of composites were improvjed. In the case of adding $Y_2O_3$ as a sintering additive, maximum values of flexural strength, hardness and fracture toughness were 525 MPa, 17.1 GPa, 4.1 MPa.m1/2 respectively. In the case of adding X$TiO_2$ as a sintering additive, maximum values of flexural strength, hardness were 285 MPa, 12.1 GPa respectively. Improved mechanical properties were found to be the results of grain growth control of $Al_2O_3$ matrix and crack deflection by the second phase SiC particles.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.16 no.1
• /
• pp.33-38
• /
• 2003

Highly homogeneous PZT powder was prepared by a partial oxalate method using chemicals of (Z $r_{0.53}$ $Ti_{0.47}$) $O_2$, Pb(N $o_3$)$_2$and (COOH)$_2$ㆍ2$H_2O$. N $b_2$ $O_{5}$ addition effect on microstructure and electrical properties of PZT ceramics was investigated. When the precursors were calcined at 71$0^{\circ}C$, a single perovskite phase was obtained. After sintering at 110$0^{\circ}C$, X-ray diffraction Patterns showed coexistence of rhombohedral and tetragonal phases regardless of the N $b_2$ $O_{5}$ content. As the content of N $b_2$ $O_{5}$ increased, grain size decreased but sintered density increased. The electromechanical coupling factor of kp and the piezoelectric constant of $d_{31}$ increased linearly with the content of N $b_2$ $O_{5}$, and those values reached 0.7 and -200, respectively, when 1.2 mol% of N $b_2$ $O_{5}$ is added. is added.ded.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2012.05a
• /
• pp.84-84
• /
• 2012

소자가 고집적화 됨에 따라, 비저항이 낮고 electro migration (EM), Stress Migration (SM) 특성이 우수한 구리(Cu)를 배선재료로서 사용하고 있다. 그러나, 구리는 Si과 $SiO_2$의 내부로 확산이 빠르게 일어나, Si 소자 내부에 deep donor level을 형성하고, 누설 전류를 증가시키는 등 소자의 성능을 저하시킬 수 있는 문제점을 가지고 있다. 그러나, electroplating 을 이용하여 증착한 Cu 박막은 일반적으로 확산 방지막으로 쓰이는 TiN, TaN, 등의 물질과의 접착 (adhesion) 특성이 나쁘다. 따라서, Cu CMP 에서 증착된 Cu 박막의 벗겨지거나(peeling), EM or SM 저항성 저하 등의 배선에서의 reliability 문제를 야기하게된다. 따라서 Cu 와 접착 특성이 좋은 새로운 확산방지막 또는 adhesion layer의 필요성이 대두되고 있다. 본 연구에서는 이러한 Cu 배선에서의 접착성 문제를 해결하고자 Metal organic chemical vapor deposition (MOCVD)을 이용하여 제조한 코발트(Co) 박막을 $Cu/TaN_x$ 사이의 접착력 개선을 위한 adhesion layer로 적용하려는 시도를 하였다. Co는 비저항이 낮고, Cu 와 adhesion이 좋으며, Cu direct electroplating 이 가능하다는 장점을 가지고 있다. 하지만, 수소 분위기에서 $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) 전구체에 의한 MOCVD Co 박막의 경우 탄소, 산소와 같은 불순물이 다량 함유되어 있어, 비저항, surface roughness 가 높아지게 된다. 따라서 구리 전착 초기에 구리의 핵 생성(nucleation)을 저해하고 핵 생성 후에도 응집(agglomeration)이 발생하여 연속적이고 얇은 구리막 형성을 방해한다. 이를 해결하기 위해, MOCVD Co 박막 증착 시 수소 반응 가스에 암모니아를 추가로 주입하여, 수소/암모니아의 분압을 1:1, 1:6, 1:10으로 변화시켜 $Co/TaN_x$ 박막의 특성을 비교 분석하였다. 각각의 수소/암모니아 분압에 따른 $Co/TaN_x$ 박막을 TEM (Transmission electron microscopy), XRD (X-ray diffraction), AES (Auger electron spectroscopy)를 통해 물성 및 조성을 분석하였고, AFM (Atomic force microscopy)를 이용하여, surface roughness를 측정하였다. 실험 결과, $Co/TaN_x$ 박막은 수소/암모니아 분압 1:6에서 90 ${\mu}{\Omega}-cm$의 낮은 비저항과 0.97 nm 의 낮은 surface roughness 를 가졌다. 뿐만 아니라, MOCVD 에 의해 증착된 Co 박막이4-6 % concentration 의 탄소 및 산소 함량을 가지는 것으로 나타났고, 24nm 크기의 trench 기판 위에 약 6nm의 $Co/TaN_x$ 박막이 매우 균일하게 형성된 것을 확인 할 수 있었다. 이러한 결과들은, 향후 $Co/TaN_x$ 박막이 Cu direct electroplating 공정이 가능한 diffusion barrier로서 성공적으로 사용될 수 있음을 보여준다.

• Journal of Korean Ophthalmic Optics Society
• /
• v.8 no.2
• /
• pp.111-117
• /
• 2003

We collected the domestic and foreign half-mirror coating lens for sunglasses. Their reflectance is measured using Spectrophotometer in order to analysis their optical property and the result which is calculated using Macleod program was compared with measured reflectance. In addition, we designed the new half-mirror coating lens with gold color using TiN material and investigated the optical property of the new half-mirror coating lens. The results obtained from analysis of half-mirror coating lenses are as follow : Two-tone half-mirror coating with silver color is fabricated with [air|$SiO_2$(or $Al_2O_3$)|Cr|glass]. The role of $SiO_2$(or $Al_2O_3$) on Cr improve the hardness of the lens and the thickness of the $Al_2O_3$ with 10 nm is good to show the lens silver color. Incase of color half-mirror coating lens. Blue system is designed by [air|$SiO_2$(66.3)|$TiO_2$(129.0)|$SiO_2$(62.9)|$SiO_2$(26.0)|$TiO_2$(120.3)|$SiO_2$(9.1)|glass], gold system [air|$SiO_2$(60.6)|$TiO_2$(86.2)|$SiO_2$(13.5)|$TiO_2$(86.8)|$SiO_2$(214.38)|glass], green system[air|$SiO_2$(74.3)|$TiO_2$(75.8)|$SiO_2$(44.3)|$TiO_2$(11.6)|$SiO_2$(160.8)|$TiO_2$(12.9)|$SiO_2$(183.3)|$TiO_2$(143.8)|glass], silver system[air|$SiO_2$(21.2)|$TiO_2$(49.7)|$SiO_2$(149.3)|glass]. White half-mirror coating lens has [air|$SiO_2$(17 nm)|$TiO_2$(43 nm)(or $ZrO_2$)|$SiO_2$(87 nm)|polysiloxane($4.46{\mu}m$|glass or CR-19]. It has half-mirror coaling lens which has about 19% reflectance and about 80% transmittance in the range of visible light(400~700nm). we designed the new half-mirror coating lens with gold color, the (x, y) value of the CIE is almost similar to the CIE value of [air|$SiO_2$(170 nm)|TiN(15 nm)|glass].

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2006.12a
• /
• pp.123-125
• /
• 2006

The $TiO_2$ sol was prepared hydrothermally in an autoclave from aqueous $TiOCl_2$ solutions as a starting precursor. Hollow fibers were obtained when the sol-gel-derived $TiO_2$ sol was treated chemically with a NaOH solution and subsequently heated in the autoclave under various conditions. A systematic analysis of the influence of different NaOH concentrations on the formation of nanotubes was carried out. The details of the nanotubular structure were investigated by using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and X-ray diffraction (XRD). From the TEM images, the outer and the inner diameters of the tubes were measured to be about 8 and 4 nm, respectively, the lengths were measured to be several hundreds of nanometers.

• Transactions of the Korean hydrogen and new energy society
• /
• v.31 no.2
• /
• pp.177-183
• /
• 2020

To utilize hydrogen energy, high-yield, high-purity hydrogen needs to be produced; therefore, hydrogen separation membrane studies are being conducted. The membrane reactor that fabricates hydrogen needs to have high hydrogen permeability, selective permeability, heatresistant and a stable mechanical membrane. Dense membranes of Pd and Pd alloys are usually used, but these have drawbacks associated with high cost and durability. Therefore, many researchers have studied replacing Pd and Pd alloys. Dense TiN membrane is highly selective and can separate high-purity hydrogen. The porous alumina has a high permeation rate but low selectivity; therefore, separating high-purity hydrogen is difficult. To overcome this drawback, the two materials are combined as composite reclamations to produce a separation membrane with a high penetration rate and high selectivity. Accordingly, TiN-alumina was manufactured using a high-energy ball mill. The TiN-alumina membrane was characterized by X-ray diffraction analysis, scanning electron microscopy, and energy dispersive spectroscopy. The hydrogen permeability of the TiN-alumina membrane was estimated by a Sievert-type hydrogen permeation membrane apparatus. Due to the change in the diffusion mechanism, the transmittance value was lower than that of the general TiN ceramic separator.

• Journal of the Korean Ceramic Society
• /
• v.54 no.1
• /
• pp.23-27
• /
• 2017

A series of $CeO_2-TiO_2$ composite samples with different Ce/Ti molar ratios were prepared by the paper template. Powder X-ray diffraction (XRD) and transmission electron microscopy (TEM) were used to confirm a face-centered cubic lattice of $CeO_2$ with Ce/Ti =8:2 or 9:1 and a two phase mixture of anatase titania and face-centered cubic ceria with Ce/Ti = 7 : 3. The field emission scanning electron microscopy (FESEM) results suggest that the products are micron braid structures consisting of fibers with diameters in a range of $1-6{\mu}m$ and lengths of several hundred micrometers. $N_2$ absorption-desorption testing shows that the composite at Ce/Ti molar fraction of 8 : 2 has the largest BET surface area (about $81m^2{\cdot}g^{-1}$). Compared to the pure $CeO_2$ sample, the composites show superior catalytic activity for $H_2$ reduction and CO oxidation. For the micron braid structure $CeO_2-TiO_2$ composite (Ce/Ti = 8 : 2), due to the high surface area and the solid solution with appropriate $Ti^{4+}$ incorporation, the CO conversion at about $280^{\circ}C$ was above 50% and at $400^{\circ}C$ was 100%.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07b
• /
• pp.965-968
• /
• 2004

Effective transverse Piezoelectric Coefficients $(e_{31,f})$ of thick PZT $(Pb(Zr_{0.52}Ti{0.48}Ti_{0.48})O_3)$ films on $SiN_x/Si$ substrates were measured with PZT thicknesses and top electrode dimensions. $e_{31,f}$ is one of important Parameters characterizing Piezoelectricity of PZT films. Thick PZT films have been used as various sensors and actuators because of their high driving force and high breakdown voltage. Thick PZT films were fabricated on Pt/Ta/$SiN_x$/Si substrates using sol-gel method. Thicknesses of PZT films were $1{\mu}m$ and $1.8{\mu}m$. $|e_{31,f}|$ values of $1.8{\mu}m$-thick-PZT films were higher than those of $1{\mu}$-thick-PZT films. Maximum $|e_{31,f}|$ of $1.8{\mu}$-thick-PZT films was about $50^{\circ}C/m^2$.

• Korean Journal of Materials Research
• /
• v.5 no.6
• /
• pp.748-753
• /
• 1995

Solid solution of NaNb $O_3$70 mol% and SrTi $O_3$30 mol% was single phase. A broad dielectric peak was found at about l00K. Crystal structure was analysed at room temperature and 12K using Rietveld analysis. The unit cell was assigned to have a a doubled lattice parameter of simple perovskite sturcture at room temperatue, the structure was orthorombic with space group Pmmn. At 12K, the structure was also orthorombic with space group Pnma. This structure change with temperature was due to the distortion of oxygen octahedron. This distortion of oxygen octahedron was made by the decrease of (Ti, Nb)-O bounds length with no variation of (Ti, Nb)-O-(Ti, Nb) bound angle. Therefore the broad dielectirc peak about l00K was attributed to the structural change casued by oxygen octahedron distortion.