• Title/Summary/Keyword: $TiO_2-SiO_2$

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Optical Properties and Structure of BaO-TiO2-SiO2 Glass Ceramics

  • Kim, Tae-Ho;Kim, Young-Suck;Jeong, Young-Joon;Na, Young-Hoon;Lim, Hwan-Hong;Cha, Myoung-Sick;Ryu, Bong-Ki
    • Journal of the Korean Ceramic Society
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    • v.45 no.12
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    • pp.821-826
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    • 2008
  • Nanocrystallized glasses with the composition of $(50-x)BaO-xTiO_2-50SiO_2$ (x=10, 15, 16.7 and 20) have been prepared by heat-treatment at $T_x$ (crystallization onset temperature) for 3 h, and their optical properties, photoluminescence (PL), XRD and Raman spectra have been examined. The absorption edges of the glasses were red-shifted and the absorption coefficient increased with an increase of $TiO_2$. The glass subjected to the heat-treatment showed a dense formation of ${Ba_2}{TiSi_2}{O_8}$ crystals. The XRD and Raman results show that the nanocrystallized glasses formed fresnoite phase up to $TiO_2$ concentrations of 15 mol%. Further-more, blue luminescence with a peak at the wavelength of around 470nm was observed in the nanocrystallized glass, demon strating the optical multifunctional nanocrystallized material such as non-linear optics and photo-luminescence. It is thought that the blue luminescence from the ${Ba_2}{TiSi_2}{O_8}$ nanocrystallized glass originated from the presence of $Ti^{4+}$ incorporated into the fresnoite-type structure.

A Study on the Fabrication of Reinforced Reaction Bonded Alumina Ceramics (반응결합 강화 알루미나세라믹스의 제조에 관한 연구)

  • 김일수;강민수;박정현
    • Journal of the Korean Ceramic Society
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    • v.35 no.4
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    • pp.311-318
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    • 1998
  • The reaction bonded alumina ceramics with reinforced particles which have low shrinkage were pro-duced by blending of SiC or TiC or ZrO2 powders to the mixture of Al metal and Al2O3 powder. The powd-ers were attrition milled isostantically pressed and preheated tio 110$0^{\circ}C$ with a heating rate of $1.5^{\circ}C$/min The specimens were then sintered at the temperature range 1500 to 1$600^{\circ}C$ for 5 hours with a heating rate of 5$^{\circ}C$/min. The specimens showed 5-9% weight gain and 2-9% dimensional expansion through the complete oxidation of Al after preheating up to 11--$^{\circ}C$ the overall dimensional change of the specimens after the reaction sintering at 1500-1$600^{\circ}C$ was 6-12% The maximum densities were 92% theoretical. The fine grain-ed(average grain size :0.4 ${\mu}{\textrm}{m}$) microstructure were observed in the specimen with ZrO2 and SiC. But the microstructure of specimen with TiC was relatively coarse.(average grain size : 2.1 ${\mu}{\textrm}{m}$) The mullite phase was formed by the reaction of Al2O3 and SiO2 in a specimen with SiC. In the TiC contained specimen TiC was oxidized into TiO2 and finally reacted with Al2O3 to form Al2TiO5 during sintering.

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The Thermal Reaction and Oxygen Behavior in the Annealed TiN/Ti/Si Structures (열처리에 따른 TiN/Ti/Si 구조의 열적반응 및 산소원자의 거동에 관한 연구)

  • 류성용;신두식;최진성;오원웅;오재응;백수현;김영남;심태언;이종길
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.29A no.7
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    • pp.73-81
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    • 1992
  • We have investigated the thermal reaction property and the oxygen behavior of TiN/Ti/Si structure after different hear treatments using x-ray photoelectron spectroscopy and cross-sectional transmission electron microscopy measurements. During the heat treatment in N$_2$ amibient, the considerable amount of oxygen atoms incorporates into TiN/Ti/Si Structures. It is found that oxygen atoms pile up at the top surface of TiN and TiN/Ti interface, forming a compound of TiO$_2$ above $600^{\circ}C$. Inside the TiN film, the oxygen content increases as the annealing temperature increases, mostly TiO and Ti$_2$O$_3$ rather than thermodynamically stable TiO$_2$. Above the annealing temperature of 55$0^{\circ}C$, the TiSi$_2$ formation has initiated. One thing to note is that a severe blistering is observed in the sample annealed at $600^{\circ}C$, due to (1) the difference of thermal expansion coefficient between TiN and Si` (2) the compressive stress induced by the volume reduction caused by the Ti-Silicide grain while elevating temperatures.

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펄스 레이저 방식으로 증착된 $MgTiO_3$ 박막의 전기적 특성 분석

  • 안순홍;노용한;강신충;이재찬
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.71-71
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    • 2000
  • 본 연구에서는 차세대 마이크로파 유전체 소자로서의 응용을 목적으로 펄스 레이저 방식에 의하여 증착된 MgTiO3 박막의 전기적 특성을 종합적으로 연구 분석하였다. 이를 바탕으로 MgTiO3 박막의 유전손실 등과 같은 열화를 야기시키는 박막 내부 또는 박막과 기판간의 결함의 특성을 파악하여 열화 메카니즘을 분석하였다. MgTiO3는 마이크로파 영역에서의 우수한 유전특성과 같은 낮은 유전손실을 가지며, 온도 안정성 또한 우수하다. 현재까지 벌크 세라믹 MgTiO3 의 응용 광범위하게 연구되어 왔으나 박막의 제조공정 및 전기적 특성 분석은 미흡한 형편이다. 따라서 벌크 세라믹과는 특성이 상이한 박막의 전기적 특성분석 및 연구가 필요하다. 분석을 위한 소자의 기본 구조로서 Metal-Insulator-Semiconductor(MIS) 구조를 채택하였다. MgTiO3 박막을 증착하기 위한 기판으로는 n형 Si(100)기판과 p형 Si(100)기판을 사용하였고, Si 기판 위에 급속 열처리기 (RTP)를 이용하여 SiO2를 ~100 두께로 성장시킨 것과 성장시키지 않은 것으로 구분하여 제작하였다. MgTiO3 박막은 펄스 레이저 증착 방식(PLD)에 의하여 약 2500 두께로 증착되었으며, 200mTorr 압력의 산소 분위기 하에서 기판의 온도를 40$0^{\circ}C$~55$0^{\circ}C$까지 5$0^{\circ}C$간격으로 변화시키며 제작하였다. 상하부의 전극 금속으로는 Al을 이용하였으며, 열증발 증착기로 증착하였다. 증착된 MgTiO3 박막의 결정구조를 확인하기 위하여 XRD 분석을 수행하였으며, 박막의 전기적 특성을 분석하기 위해 Boonton7200 C-V 측정기와 HP4140P를 이용한 경우에는 C-V 곡선에 이력현상이 나타났으나, MgTiO3/SiO2를 이용한 경우에는 이력현상이 나타나지 않았고, 유전율은 감소하는 것으로 나타났다. I-V 측정 결과, 절연층으로 MgTiO3/SiO2를 이용한 경우에는 MgTiO3만을 절연층으로 사용한 경우에 비해 동일한 전계에서 낮은 누설전류 값을 가짐을 알 수 있었다. 또한 박막의 증착온도가 증가함에 따라서 C-V 곡선의 위치가 양의 방향으로 이동함을 확인하였다. 위의 현상은 기판의 종류에 관계없이 발생하는 것으로 보아 벌크 또는 계면에 존재하는 결함에 의한 것으로 추정된다. 현재 C-V 곡선의 이동 원인과 I-V 곡선의 누설전류 메카니즘을 분석 중에 있으며 그 결과를 학회에서 발표할 예정이다.

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An Experimental Study on Composition Characteristics of SiO$_2$/TiO$_2$/Multicomponent Particle Generated in a Coflow Diffusion Flame (화염중 발생하는 SiO$_2$/TiO$_2$/다성분입자의 조성특성에 관한 실험적 연구)

  • Kim, Tae-O;Seo, Jeong-Su;Choe, Man-Su
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.9
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    • pp.1175-1182
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    • 2001
  • Chemical compositions of polydisperse SiO$_2$/TiO$_2$multicomponent aggregates were measured for different heights from the burner surface and different mobility diameters of aggregates. SiO$_2$/TiO$_2$multicomponent particles were generated in a hydrogen/oxygen coflow diffusion flame from two sets of precursors: TTIP(titanium tetraisopropoxide), TEOS(tetraethylorthosilicate). To maintain 1:1 mole ratio of TTIP:TEOS vapor, flow rate of carrier gas $N_2$was fixed at 0.6lpm for TTIP, at 0.1lpm for TEOS. In-situ sampling probe was used to supply particles into DMA(differential mobility analyzer) which was calibrated with using commercial DMA(TSI, model 3071A) and classifying monodisperse multicomponent particles. Classified monodisperse particles were collected with electrophoretic collector. The distributions of composition from particles to particle were determined using EDS(energy dispersive spectrometry) coupled with TEM(transmission electron microscope). The chemical(atomic) compositions of classified monodisperse particle were obtained for different heights; z=40mm, 60mm, 80mm. The results suggested that the chemical(atomic) composition of SiO$_2$decreased with the height from burner surface and the composition of SiO$_2$and TiO$_2$approached to the value of 1 to 1 fat downstream. It is also found that the composition of SiO$_2$decreases as the mobility diameter of aggregate increases.

Effect of $Si_3N_4$ Addition on the Microstructure and PTCR Characteristics in Semiconducting $BaTiO_3$ Ceramics (반도성 $BaTiO_3$ 세라믹스의 미세구조 및 PTCR 특성에 미치는 $Si_3N_4$ 첨가효과)

  • 김준수;정윤해;이병하
    • Journal of the Korean Ceramic Society
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    • v.31 no.10
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    • pp.1089-1098
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    • 1994
  • The effect of Si3N4 addition on the microstructure and PTCR characteristics of BaTiO3 was studied. When 0.1 mol% Sb2O3-doped BaTiO3 codoped with Si3N4 (0.1, 0.25, 0.5, 0.75, and 1 wt%, respectively) were sintered, their microstructures were changed by the amount of the liquid phase as a result of eutectic reaction at 126$0^{\circ}C$. By these microstructural changes, the specific resistivity ratio($\rho$max/$\rho$min) with Si3N4 content variation of 0.1 mol% Sb2O3-doped BaTiO3 ceramics sintered at 130$0^{\circ}C$ for 1 hour varied between 3.70$\times$102(0.1 wt% Si3N4) to 1.16$\times$103 (1wt% Si3N4).

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The structural properties of the (Ba,Sr)(Nb,Ti)$O_3$[BSNT] thin films with $Ar/O_2$ rates ($Ar/O_2$비에 따른 (Ba, Sr)(Nb, Ti)$O_3$[BSNT] 박막의 구조적 특성)

  • Nam, Sung-Pill;Lee, Sang-Chul;Kim, Ji-Heon;Park, In-Gil;Lee, Young-Hie
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.609-612
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    • 2002
  • In this study, the electrical properties were investigated for the deposited Ba,Sr)(Nb,Ti)$O_3$[BSNT] thin films grown on $Pt/TiO_2/SiO_2/Si$ substrate by RF sputtering method. The structural properties of the BSNT thin films affected by the $Ar/O_2$ rates were investigated. In the case of the BSNT thin films deposited with condition of 60/40$(Ar/O_2)$ ratio, the $BaTiO_3$, $SrTiO_3$ and $BaNbO_3$ phases were showed. The composition ratio of Nb and Ti in the BSNT thin films were nearly equivalent. Also, in the BSNT thin films deposited with condition of 60/40 and 80/20$(Ar/O_2)$ ratios, the composition of Ba, Sr, Nb and Ti were relatively uniform. The Ba, Sr, Nb and Ti in the BSTN thin films were not diffused into the Pt layer.

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Mechanical Strength and Thermal Conductivity of Silica Aerogels Opacified by Adding Oxides (산화물 첨가에 의한 불투명화 실리카 에어로겔의 기계작 강도 및 열전도도)

  • 손봉희;김계태;현상훈;성대진
    • Journal of the Korean Ceramic Society
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    • v.36 no.8
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    • pp.829-834
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    • 1999
  • The silica aerogels opacified via adding oxides were prepared by the sol-gel supercritical drying technique and their characteristics of mechanical strength and thermal conduction were investigated. The compressive strength of SiO2-10 mol% TiO2 and SiO2-10mol% Fe2O3 aerogels were 0.11 and 0.047 MP a respectively much higher than 0.025 MPa of pure silica aerogels. The thermal conductivity of silica aerogels opacified by TiO2 was as low as 0.02505 W/m${\cdot}$K at $400^{\circ}C$ It was found that the TiO2 -opacifier for improving mechanical strength and suppressing high temperature conduction of pure silica aerogels was more effective than the Fe2O3 -opacifier

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Effect of Vanadium Oxide Loading on SCR Activity and $SO_2$ Resistance over $TiO_2$-Supported $V_2O_5/TiO_2$ Commercial De-NOx Catalysts (상용 $V_2O_5/TiO_2$ 촉매의 바나듐 함량이 SCR 반응성과 $SO_2$ 내구성에 미치는 영향)

  • Park, Kwang Hee;Cha, Wang Seog
    • Applied Chemistry for Engineering
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    • v.23 no.5
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    • pp.485-489
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    • 2012
  • We investigated vanadium (V) loading effects on selective catalytic reduction (SCR) activity and $SO_2$ resistance using commercial SCR catalysts applied on a power plant and incinerator with different amounts of V loading. These catalysts were characterized using XRD, Raman, ICP, BET analysis and found to contain $TiO_2$ (anatase) supported $V_2O_5$ added $WO_3$ and $SiO_2$. The SCR activity of the catalysts increased by increasing either the $V_2O_5$ or the $WO_3$ loading amounts; the SCR activity of the catalysts added $WO_3$ is higher than that of $WO_3$-free catalysts. As the V loading amount in the catalyst increased, the $SO_2$ durability decreased. The $V_2O_5$ supported $TiO_2$ catalyst added $WO_3$ and $SiO_2$ inhibits the deactivation process by $SO_2$. The $SO_2$ resistance of catalysts added $SiO_2$ is higher than that of catalysts added $WO_3$.