• The Korean Journal of Ceramics
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• 제7권1호
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• pp.36-40
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• 2001

In order to fabricate uncooled IR sensors for pyroelectric applications, multilayered thin films of Pt/PbTiO$_3$/Pt/Ti/Si$_3$N$_4$/SiO$_2$/Si and thermally isolating membrane structures of square-shaped/cantilevers-shaped microstructures were prepared. Cavity was also fabricated via direct silicon wafer bonding and etching technique. Metallic Pt layer was deposited by ion beam sputtering while PbTiO$_3$ thin films were prepared by sol-gel technique. Micromachining technology was used to fabricate microstructured-membrane detectors. In order to avoid a difficulty of etching active layers, silicon-nitride membrane structure was fabricated through the direct bonding and etching of the silicon wafer. Although multilayered thin film deposition and device fabrications were processed independently, these could b integrated to make IR micro-sensor devices.

• 한국전기전자재료학회논문지
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• 제37권2호
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• pp.164-168
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• 2024

(La_0.7Sr_0.3)(Mn_1-xFe_x)O₃ (LSMFO) (x = 0.03, 0.06, 0.09, 0.12) precursor solution are prepared by sol-gel method. LSMFO thin films are fabricated by the spin-coating method on Pt/Ti/SiO₂/Si substrate, and the sintering temperature and time are 800℃ and 1 hr, respectively. The average thickness of the 6-times coated LSMFO films is about 181 to 190 nm and average grain size is about 18 to 20 nm. As the amount of Fe added in the LSMFO thin film increased, the resistivity decreased, and the TCR and B_25/65-value increased. Electrical resistivity, TCR and B_25/65-value of the (La_0.7Sr_0.3)(Mn_0.88Fe_0.12)O₃ thin film are 0.0136 mΩ-cm, 0.358%/℃, and 328 K at room temperature, respectively. The resistivity properties of LSMFO thin films matched well with Mott's VRH model.

• Tribology and Lubricants
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• 제19권4호
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• pp.203-210
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• 2003

In order to enhance the thermal stability of binder materials of bonded type solid lubricants, several metal-alkoxide based sol-gel materials such as methyltrimethoxysilane(MTMOS), titaniumisopropoxide (Ti(Opr$\^$i/)$_4$), zirconiumisopropoxide (Zr(Opr$\^$i/)$_4$) and aluminumbutoxide (Al(Obu$\^$t/)$_4$) were modified chemically by both epoxy and acrylic silane compounds. Friction and wear characteristics of the bonded solid lubricants, whose binders were of several hybrid ceramic materials, were tested with a reciprocating tribo-tester. Wear life was evaluated with respect to the heat-curing temperature, friction temperature, type of supplement lubricants, and ratio of binder materials. Test results showed that the Si-Zr hybrid ceramic materials modified by epoxy-silane compounds had a higher wear life compared to others. Sb$_2$O$_3$ was the most effective supplement lubricants in the high temperature, and BUS analyses revealed that it was caused mainly by a strong anti-oxidation effect to MoS$_2$ particles. The higher heat-curing temperature resulted in the higher wear life, and the higher friction temperature resulted in the lower wear life.

• Membrane and Water Treatment
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• 제6권3호
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• pp.251-262
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• 2015

In this work the preparation and characterization of a membrane containing a uniform mesoporous Titanium oxide top layer on a porous stainless steel substrate has been studied. The 316 L stainless steel substrate was prepared by powder metallurgy technique and modified by soaking-rolling and fast drying method. The mesoporous titania membrane was fabricated via the sol-gel method. Morphological studies were performed on both supported and unsupported membranes using scanning electron microscope (SEM) and field emission scanning microscope (FESEM). The membranes were also characterized using X-ray diffraction (XRD) and $N_2$-adsorption / desorption measurement (BET analyses). It was revealed that a defect-free anatase membrane with a thickness of $1.6{\mu}m$ and 4.3 nm average pore size can be produced. In order to evaluate the performance of the supported membrane, single-gas permeation experiments were carried out at room temperature with nitrogen gas. The permeability coefficient of the fabricated membrane was $4{\times}10^{-8}\;lit\;s^{-1}\;Pa^{-1}\;cm^{-1}$.

• 한국결정성장학회지
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• 제29권4호
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• pp.179-186
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• 2019

본 연구에서는 $Ga_2O_3$ 박막의 구조적 특성과 Ti/Au 전극을 증착하여 제작된 metal-semiconductor-metal (MSM) photodetector 소자의 광학적, 전기적 특성에 대해 연구하였다. 유기 금속 화학 증착법(metal organic chemical vapor deposition, MOCVD)을 이용해 서로 다른 온도에서 $Ga_2O_3$ 박막을 성장하였다. 성장온도에 따라 $Ga_2O_3$의 결정상이 ${\varepsilon}$-상에서 ${\beta}$-상으로 변화하는 것을 확인할 수 있었다. X-선 회절 분석(X-ray diffraction, XRD) 결과로 ${\varepsilon}-Ga_2O_3$의 결정구조를 확인하였고, 주사 전자 현미경(scanning electron microscopy, SEM) 이미지로 결정구조의 형성 메커니즘에 대해 논의하였다. 음극선 발광(Cathode luminescence, CL) 측정으로 $Ga_2O_3$의 발광성 천이에 관여하는 에너지 준위의 형성 원인에 대해 논의하였다. 제작된 MSM photodetector 소자의 외부 광에 대한 전류-전압 특성과 시간 의존성 on/off 광 응답 특성을 통해 ${\varepsilon}-Ga_2O_3$로 제작한 photodetector는 가시광보다 266 nm UV 파장 영역에서 훨씬 뛰어난 광전류 특성을 보이는 것을 확인하였다.

• 한국전기전자재료학회논문지
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• 제31권6호
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• pp.403-407
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• 2018

In this study, double layer KTN/STO thin films were fabricated on $Pt/Ti/SiO_2/Si$ substrate, their structural and electrical properties were measured according with the number of STO coatings, and their applicability to microwave materials was investigated. The average grain size was about 80~90 nm, the average thickness of the 6-coated KTN thin film was about 320 nm, and the average thickness of the STO thin film coated once was about 45~50 nm. The dielectric constant decreased with increasing frequency, and as the number of STO coatings increased, the rate of change of the dielectric constant with the applied electric field decreased. The tunability of the KTN thin film showed a maximum value of 19.8% at 3 V. The figure of merit of the KTN/1STO thin film was 9.8 at 3 V.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.305-309
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• 2002

We have successfully fabricated a Metal-Ferroelectric-Insulator-Semiconductor (MFIS) structure using Bi$\sub$4-x/La$\sub$x/Ti$_3$O$\sub$12/ (BLT) ferroelectric thin film and SiO$_2$/Nitride/SiO$_2$ (ONO) stacked buffer layers for single transistor type ferroelectric nonvolatile memory applications. BLT films were deposited on 15 nm-thick ONO buffer layer by sol-gel spin-coating. The dielectric constant and the leakage current density of prepared ONO film were measured to be 5.6 and 1.0 x 10$\^$-8/ A/$\textrm{cm}^2$ at 2MV/cm, respectively, It was interesting to note that the crystallographic orientations of BLT thin films were strongly effected by pre-bake temperatures. X-ray diffraction patterns showed that (117) crystallites were mainly detected in the BLT film if pre-baked below 400$^{\circ}C$. Whereas, for the films pre-baked above 500$^{\circ}C$, the crystallites with preferred c-axis orientation were mainly detected. From the C-V measurement of the MFIS capacitor with c-axis oriented BLT films, the memory window of 0.6 V was obtained at a voltage sweep of ${\pm}$8 V, which evidently reflects the ferroelectric memory effect of a BLT/ONO/Si structure.

• Transactions on Electrical and Electronic Materials
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• 제7권2호
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• pp.72-75
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• 2006

Ferroelectric PZT heterolayered thick films were fabricated by the alkoxide-based sol-gel method. PZT(Zr/Ti=60/40) paste was made and alternately screen-printed on the $Al_2O_3$ substrates. We have introduced a press-treatment to obtain a good densification of screen printed films. The porosity of the thick films was decreased with increasing the applied pressure and the thick films pressed at $0.6ton/cm^2$ showed the dense microstructure and thickness of about $76{\mu}m$. The relative dielectric constant increased with increasing the applied pressure. The remanent polarization and coercive field increased with increasing applied pressure and the values for the PZT thick films pressed at $0.6ton/cm^2$ were $16.6{\mu}C/cm^2$, 76.9 kV/cm, respectively.

• 대한환경공학회지
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• 제28권3호
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• pp.316-322
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• 2006

본 연구의 목적은 환경담배연기를 대표하는 주요 오염물질 중에 하나인 니코틴의 분해를 위해서 산화티타늄 광촉매를 적용할 수 있는지 여부에 대하여 기술적 평가하는 것이다. 광촉매로 코팅된 건축자재를 이용하여 니코틴을 분해하는 정도를 평가하기 위하여 네 개의 기초 실험을 수행하였다. 니코틴의 광촉매 분해와 관련된 다음의 다섯 변수를 조사하였다: 코팅 타일의 건조조건, 코팅 졸의 종류, 코팅횟수, 상대습도, 그리고 초기농도. 변수 시험에 앞서, 실험장치에 대한 니코틴의 흡착 여부를 평가하였다. 본 연구에서 조사된 변수 모두가 니코틴의 광산화분해능에 영향을 미치는 것으로 나타났다. 낮은 온도와 긴 건조시간 조건과 비교할 때 높은 온도와 짧은 건조시간 조건에서 건조된 타일에서 보다 높은 니코틴 분해효율을 나타내었다. ST-KO3 졸로 코팅된 타일이 E-T 졸로 코팅된 타일 보다 높은 분해효율을 나타내었다. 코팅횟수가 증가할수록 광산화분해가 잘 일어났다. 높은 상대습도와 낮은 유입농도 조건에서 광산화분해가 잘 일어났다. 결과적으로, 환경담배연기에 포함된 니코틴을 광촉매로 코팅된 건축자재를 적용할 때에는 본 연구에서 평가된 다섯 가지 변수가 모두 고려되어야함이 제안되었다.

• Korean Chemical Engineering Research
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• 제43권4호
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• pp.503-510
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• 2005

본 연구는 졸-겔법을 이용하여 복합 알루미나를 제조하였고, 다양한 첨가제의 첨가에 의한 복합 알루미나의 열적 안정성을 고찰하였다. $1,200^{\circ}C$에서 소성시킨 복합 알루미나의 열적 안정성은 사용된 첨가제에 따라서 $Si{\fallingdotseq}La$ > Ti > $Ba{\fallingdotseq}Ce$ > Y > $Zr{\fallingdotseq}Mg$ 순으로 나타났다. 특히 실리카 첨가시 ${\alpha}$-알루미나로의 상전이 온도를 $150^{\circ}C$이상 높여 $1,200^{\circ}C$에서 소성 후에도 ${\gamma}$-형에서 ${\delta}$-형의 알루미나 상을 유지함을 알 수 있었고, 비표면적이 $3m^2/g$인 ${\alpha}$-알루미나에 비해 $71m^2/g$(비표면적) 범위까지 증가됨을 보였다. 이러한 알루미나 입자의 특성변화는 실리카 첨가 알루미나의 경우 고온으로 소성시 Si-O-Al의 결합의 증가로 인하여 알루미나의 상전이를 지연시키는 결과로 나타나고, 란타늄 첨가 알루미나의 경우 $LaAlO_3$ 구조의 존재로 인해 알루미나의 입자간 소결을 지연시킴을 알 수 있었다. 또한 란타늄 첨가시 $1,000^{\circ}C$ 이하에서 소성시킨 경우 란타늄이 알루미나 표면에 $La_2O_3$ 구조로 존재하나 $1,000^{\circ}C$ 이상에서는 $LaAlO_3$의 perovskite 구조로 존재하고, $1,300^{\circ}C$ 이상에서는 $LaAl_{11}O_{18}$의 magneto-plumbite 구조로 존재함을 XRD와 XPS 분석 결과에 의해 확인할 수 있었다.