• 대한전기학회:학술대회논문집
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• 대한전기학회 1992년도 하계학술대회 논문집 B
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• pp.835-838
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• 1992

The $TiN/TiSi_2$ bilayer has been studied for contact barrier layer at ULSI recently. The $TiN/TiSi_2$ bilayer was formed by RTA in $NH_3$ ambient simultaneously after the Ti film was deposited on silicon substrate. In this paper, properties of $TiN/TiSi_2$ bilayer was evaluated according to $BF_2$ dopant concentration and dopant redistribution in $TiN/TiSi_2$ bilayer was also analyzed. In this experiment, the composition and structure of $TiN/TiSi_2$ bilayer were constant even though dopant concentration increased but silicide growth rate decreased. Boron atoms were redistributed within TiN film and at $TiSi_2Si$ interface during the bilayer formation.

• 청정기술
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• 제26권4호
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• pp.304-310
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• 2020

다양한 건축재료에 광촉매(TiO2)를 적용하기 위하여 TiO2-mayenite를 제조하였다. TiO2는 졸-겔법을 사용하여 titanium isopropoxide (TTIP)와 urea를 1:1의 비율로 고정하여 합성하였다. 그 후 온도범위 400 - 700 ℃로 소성하여 온도에 따른 특성을 분석하였다. TiO2의 물리 및 화학적 특성은 BET, TGA 그리고 XRD를 통해 분석되었다. 질소산화물 제거 실험은 KS L ISO 22197-1에 의거하여 1 시간 동안의 NO의 농도변화를 측정하여 확인하였다. 제조된 입자들은 600 ℃ 이하에서 아나타제 결정구조를 나타내었고, TiO2 (urea)-400에서 2.35 µmol h-1의 가장 높은 질소산화물 제거율을 나타내었다. TiO2-mayenite는 TiO2 분산 용액을 스프레이하는 방법(s/s)과 졸-겔 상태의 용액을 스프레이 하는 방법(g/s)으로 제조하였다. BET와 XRD 분석을 통하여, 제조된 TiO2-mayenite는 졸-겔 상태의 용액을 스프레이 하여 제조한 5-TiO2 (g/s) 입자가 열처리에도 결정구조를 유지하는 것을 확인하였다. 또한 질소산화물 제거 실험에서도 5-TiO2 (g/s)-500 입자에서 0.55 µmol h-1의 가장 높은 제거율을 나타내었다. 결론적으로 TiO2-mayenite를 제조하기 위하여 TiO2는 졸-겔 상태에서 mayenite에 결합시켜야 결정구조를 유지하며, 높은 질소산화물 제거 능력을 나타내는 것을 확인하였다.

• 한국세라믹학회지
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• 제44권1호
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• pp.37-42
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• 2007

The preparation of $TiC_{0.7}N_{0.3}$ powder by SHS in the system of $Ti-TiH_2-C$ ($N_2$ atmosphere) was investigated in this study. In the preparation of $TiC_{0.7}N_{0.3}$ powder, the effect of gas pressure, compositions such as Ti, $TiH_2$, C, and additive in mixture on the reactivity were investigated. At 50 atm of the initial inert gas pressure in reactor, the optimum composition for the preparation of pure $TiC_{0.7}N_{0.3}$ was $0.75Ti+0.25TiH_2+0.7C+0.5NaCl$. The $TiC_{0.7}N_{0.3}$ powder synthesized in this condition was a single phase with irregular shape.

• 한국재료학회지
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• 제8권12호
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• pp.1182-1189
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• 1998

Si 기판을 실온과 $600^{\circ}C$로 유지하면서 동시 증착 방법으로 (Ti+2Si)를 증착한 후 $N_2$ 분위기에서 Ti를 증발시켜 TiN($300\AA$)/(Ti+2Si, $300\AA$)/Si(100) 구조의 시료를 제작한 다음 초고진공에서 in-situ로 열처리하여 양질의 $TiN/TiSi_2$-bilayer를 형성하였다 열처리 온도가 $700^{\circ}C$ 이상에서 (111) texture 구조를 가지면서 화학 양론적으로 $Ti_{0.5}N_{0.5}$인 박막과 C54-$TiSi_2$박막이 형성되었다. $TiN/C54-TiSi_2/Si$ (100)구조의 계면은 응집 현상이 없이 평활하였으며, $C54-TiSi_2$상은 에피택셜 성장되었다. $TiN/TiSi_2$-이중구조막의 면저항은 열처리 온도에 따라 감소하였으며, $700^{\circ}C$ 이상의 열처리 온도에서는 면저항 값이 $2.5\omega/\textrm{cm}^2$ 였다.

• 공업화학
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• 제23권3호
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• pp.293-296
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• 2012

항균 활성도를 조사하기 위해 이산화티탄미립자 표면에 나노메탈(Au, Ag)을 균일하게 도핑한 나노복합체($Ag-TiO_2,\;Au-TiO_2,\;Ag-TiO_2$@$TiO_x$)를 초음파환원법과 졸-겔 법으로 제조하였다. 이렇게 제조된 나노메탈-이산화티탄 복합체의 항균 활성도는 고체배지 표면에 나노복합체와 함께 E. coli를 도말하여 $37^{\circ}C$에서 배양한 후 생존된 콜로니 개수의 측정을 통해서 이루어졌다. 나노복합체의 초기 항균 효율은 나노메탈이 도핑된 이산화티탄미립자($Ag-TiO_2,\;Au-TiO_2,\;Ag-TiO_2$@$TiO_x$)) 복합체가 도핑하지 않은 이산화티탄미립자($TiO_2$)에 비해 높은 항균 효율을 나타내주었다. 이후, 나노복합체를 $4^{\circ}C$에서 보관 후 장기보관에 따른 항균특성을 비교해본 결과, 나노메탈만 도핑된 복합체($Ag-TiO_2,\;Au-TiO_2$)보다는 $Ag-TiO_2,$의 표면을 다시 산화티탄막으로 코팅한 복합체($Ag-TiO_2$@$TiO_x$)의 항균특성이 오랫동안 유지되는 것을 알수 있었다. 이는 산화티탄막으로 다시 코팅한 $Ag-TiO_2$@$TiO_x$의 경우에 Ag 나노메탈의 산화방지 및 나노복합체의 콜로이드 안정성 향상이 이루어졌기 때문으로 사료된다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1223-1225
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• 1994

The properties of $TiN/TiSi_2$ bilayer formed by a rapid thermal anneal ing is investigated when thin $SiO_2$ film exists at the Ti-Si interface. The competitive reaction for the $TiN/TiSi_2$ bilayer occurs above $600^{\circ}C$. The thickness of the $TiSi_2$ layer decreases with increasing $SiO_2$ film thickness while the TiN layer increases at the competitive reaction. The composition of TiN layer is changed to the $TiN_xO_y$ film due to the thin $SiO_2$ layer at the Ti-Si interface while the structure of the TiN and $TiSi_2$ layers was not changed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.66-66
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• 2011

Anodic titanium dioxide (TiO2) nanotubes are very attractive materials for gas sensors due to its large surface to volume ratios. The most widely known method for fabrication of TiO2 nanotubes is anodic oxidation of metallic Ti foil. Since the remaining Ti substrate is a metallic conductor, TiO2 nanotube arrays on Ti are not appropriate for gas sensor applications. Detachment of the TiO2 nanotube arrays from the Ti Substrate or the formation of electrodes onto the TiO2 nanotube arrays have been used to demonstrate gas sensors based on TiO2 nanotubes. But the sensitivity was much lower than those of TiO2 gas sensors based on conventional TiO2 nanoparticle films. In this study, Ti thin films were deposited onto a SiO2/Si substrate by electron beam evaporation. Samples were anodized in ethylene glycol solution and ammonium fluoride (NH4F) with 0.1wt%, 0.2wt%, 0.3wt% and potentials ranging from 30 to 60V respectively. After anodization, the samples were annealed at $600^{\circ}C$ in air for 1 hours, leading to porous TiO2 films with TiO2 nanotubes. With changing temperature and CO concentration, gas sensor performance of the TiO2 nanotube gas sensors were measured, demonstrating the potential advantages of the porous TiO2 films for gas sensor applications. The details on the fabrication and gas sensing performance of TiO2 nanotube sensors will be presented.

• 한국세라믹학회지
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• 제36권12호
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• pp.1327-1334
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• 1999

Behaviors of abnormal expansion during calcination process of Ba2Ti9O20 ceramics and its related effects on the sintering characteristics were investigated as a function of precursors. When BaCO3 and TiO2 powders were used as starting materials. BaTi4O9 phase which has relatively large molar volume was formed drastically with abnormal ex-pansion during the calcination at 95$0^{\circ}C$ to 115$0^{\circ}C$ ON the contrary using BaTiO3 and TiO2 powders as starting materials led to retardation of the formation of BaTi4O9 phase and concurrently suppressed the abnormal expansion during cal-cination process. Especially the calcined powder of BaTiO3 and TiO2 had advantages in the densification and formation of Ba2Ti9O20 single phase in the sintering process.

• 열처리공학회지
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• 제18권5호
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• pp.281-287
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• 2005

Titanium aluminium nitride((TiAl)N) film is anticipated as an advanced coating film with wear resistance used for drills, bites etc. and with corrosion resistance at a high temperature. In this study, (TiAl)N thin films were deposited both at room temperature and at elevated substrate temperatures of 573 to 773 K by using a two-facing-targets type DC sputtering system in a mixture Ar and $N_2$ gases. Atomic compositions of the binary Ti-Al alloy target is Al-rich (25Ti-75Al (atm%)). Process parameters such as precursor volume %, substrate temperature and Ar/$N_2$ gas ratio were optimized. The crystallization processes and phase transformations of (TiAl)N thin films were investigated by X-ray diffraction, field-emission scanning electron microscopy. The microhardness of (TiAl)N thin films were measured by a dynamic hardness tester. The films obtained with Ar/$N_2$ gas ratio of 1:3 and at 673 K substrate temperature showed the highest microhardness of $H_v$ 810. The crystallized and phase transformations of (TiAl)N thin films were $Ti_2AlN+AlN{\rightarrow}TiN+AlN$ for Ar/$N_2$ gas ratio of 1:3, $Ti_2AlN+AlN{\rightarrow}TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 1:1 and $TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN{\rightarrow}Ti_2AlN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 3:1. The above results are discussed in terms of crystallized phases and microhardness.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.130.1-130.1
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• 2013

We made attempts to improve photocatalytic activity of $TiO_2$ nanoparticles under visible light exposure by combining two additional treatments. N-doping of $TiO_2$ by ammonia gas treatment at $600^{\circ}C$ increased absorbance of visible light. By coating thin film of polydimethylsiloxane (PDMS), and subsequent vacuum-annealing at $800^{\circ}C$, $TiO_2$, became more hydrophilic, thereby enhancing photocatalytic activity of $TiO_2$. Four types of $TiO_2$ samples were prepared, bare-$TiO_2$, hydrophilic-modified $TiO_2$ ($h-PDMS/TiO_2$), N-doped $TiO_2$ ($N/TiO_2$) and hydrophilic-modified and N-doped $TiO_2$ ($h-PDMS/N/TiO_2$). Adsorption capability was evaluated under dark condition and photocatalytic activity of $TiO_2$ was evaluated by photodegradation of MB under blue LED (400 nm< ${\lambda}$) irradiation. N-doping on $TiO_2$ was characterized using XPS and hydrophilic modification of $TiO_2$ surface was analyzed by FT-IR spectrometer. It was found that N-doping and hydrophilic modification both had positive effect on enhancing adsorption capability and photocatalytic activity of $TiO_2$ at the same time. Particularly, N-doping enhanced visible light absorption of $TiO_2$, whereas hydrophilic surface modification increased MB adsorption capacity. By combining these two strategies, photocatalytic acitivity under visible light irradiation became the sum of individual effects of N-doping and hydrophilic modification.