• Journal of the Korean Ceramic Society
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• v.37 no.10
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• pp.938-943
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• 2000

TiCl$_4$, 물 및 1-propanol의 혼합용액으로부터 미립 TiO$_2$분말 제조시, 1-propanol과 물의 부피비, 반응온도, 반응유지시간 및 TiCl$_4$mole 농도에 따른 분말 특성 및 결정상 생성에 대해 조사하였다. 반응온도가 3$0^{\circ}C$ 이상일 때 Ti 수화물의 초기 침전이 생성되었고 반응온도가 TiCl$_4$mole 농도가 증가함에 따라 입자크기는 증가하였고 $600^{\circ}C$ 하소시 1-propanol과 물의 부피비가 2보다 크고 반응온도가 7$0^{\circ}C$보다 낮을 때 주결정상은 anatase였다. 입자크기가 미세하고 입자크기 분포가 좁은 범위를 갖는 조건은 1-propanol과 물의 부피비가 2, 반응온도가 7$0^{\circ}C$, TiCl$_4$mole 농도가 0.2 mole/ι일 때였으며, 결정상의 생성은 1-propanol과 물의 부피비가 2, 반응온도가 3$0^{\circ}C$ 이상일 때 anatase에서 rutile로 전이하는 온도가 높아졌다. 이와 같은 반응인자에 따른 효과는 용매의 유전상수, 티타니아의 용해도, 입자의 표면전위 등의 효과와 관계가 있었다.

• Applied Chemistry for Engineering
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• v.4 no.1
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• pp.64-74
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• 1993

The chlorination of the titanium slag from titaniferrous magnetite by the arc-smelting in a fluidized bed reactor was investigated to produce $TiCl_4$ from domestic titaniferrous magnetite. The optimum conditions are as follows : reaction temperature; $950^{\circ}C$, reaction time; 90min, $Cl_2$ gas velocity; 3cm/sec, and petroleum coke-to-titanium slag weight ratio; 0.18. Also the mean diameter of titanium slag and petroleum coke was $44.6{\mu}m$ and $67.9{\mu}m$ respectively. Under these conditions 97.07% of Ti component in the titanium slag was chlorinated and the purity of $TiCl_4$ from this chlorination was 96.2%.

• Journal of Powder Materials
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• v.11 no.4
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• pp.322-327
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• 2004

Ultrafine titanium carbide particles were synthesized by the reaction of liquid-magnesium and vaporized TiCl$_{4}$+C$_{x}$Cl$_{4}$(x = 1 and 2) solution. Fine titanium carbide particles with about 50 nm were successfully produced by combining Ti and C atoms released by chloride reduction of magnesium, and vacuum was then used to remove the residual phases of MgCl$_{2}$ and excess Mg. Small amounts of impurities such as O, Fe, Mg and Cl were detected in the product, but such problem can be solved by more precise process control. The lattice parameter of the product was 0.43267 nm, near the standard value. With respect to the reaction kinetics, the activation energy for the reactions of TiCl$_{4}$+C$_{2}$Cl$_{4}$and Mg was found to 69 kJ/mole, which was about half value against the use of TiCl$_{4}$+CCl$_{4}$, and such higher reactivity of the former contributed to increase the stoichiometry until the level of TiC$_{0.96}$ and decrease the free carbon content below 0.3 wt.%.

• Bulletin of the Korean Chemical Society
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• v.20 no.8
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• pp.893-896
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• 1999

Novel citric acid based Ti, Nb and Ta precursors that are highly stable in the presence of water were developed. No alkoxides of Ti, Nb and Ta were utilized in the preparation, instead much less moisture-sensitive metallic Ti, NbCl5 and TaCl5 were chosen as starting chemicals for Ti, Nb and Ta, respectively. The feasibility of these chemicals as precursors is demonstrated in the powder synthesis of BaTi4O9, Y3NbO7 and LiTaO3. The water-resistant Ti precursor was employed as a new source of water-soluble Ti in the amorphous citrate method, and phase pure BaTi4O9 in powdered form was successfully synthesized at 800 ？. The Pechini-type polymerizable complex method using the water-resistant Nb and Ta precursors was applied to the synthesis of Y3NbO7 and LiTaO3, and both the powder materials in their pure form were successfully synthesized at reduced tempera-tures, viz. 500-700 ？. The remarkable retardation of hydrolysis of these water-resistant precursors is explained in terms of the partial charge model theory.

• Korean Journal of Optics and Photonics
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• v.5 no.4
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• pp.499-504
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• 1994

Ti-doped BSG (borosilicate glass) soot films on the silicone substrate have been deposited in the mixture of $SiCl_{4}$, TMB, $TiCL_{4}$ by flame hydrolysis deposition technique. The soot films are melted to form integrated fine glass films. We can fabricate thick films of serveral $10{\mu}m$ with deposition rate,more than $0.5{\mu}m$/min. Refractive index difference of BSG films are increased to more than 0.3% as function of the amount of Ti dopant. As a result of the process an optical waveguide which is simmilar with dimmension and refractive difference of optical fiber is produced. $BCl_{3}$ is widely used for B dopant, but we abtained the good results by the use of TMB in place of $BCl_{3}$. The melting point of silica soot glass is reduced to $1200^{\circ}C$ increasing B dopant. From FTIR analysis $B_2O_3$ content up to about lOmol% in BSG films. films.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.10
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• pp.785-791
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• 2001

High dielectric (Ba, Sr) TiO$_3$ thin films were etched in an inductively coupled plasma (ICP) as a function of Cl$_2$/Ar mixing ration. Under Cl$_2$(20)/Ar(80), the maximum etch rate of the BST films was 400 $\AA$/mim and selectivities of BST to Pt and PR were obtained 0.4 and 0.2, respectively. Etching products were redeposited on the surface of BST and resulted in varying the nature of crystallinity. Therefore, we investigated the etched surface of BST by x-ray photoelectron spectroscopy (XPS) atomic force microscopy (AFM) and x-ray diffraction (XRD). From the result of XPS analysis, we found that residues of Ba-Cl and Ti-Cl bonds remained on the surface of the etched BST for high boiling point. The morphology of the etched surfact was analyzed by AFM. A smoothsurface(roughness ~2.8nm) ws observed under Cl$_2$(20)/Ar(80), rf power of 600 W, dc bias voltage of -250 V and pressure of 10 mTorr. This changed the nature of the crystallinity of BST. From the result of XRD analysis, the crystallinities of the etched BST film under Ar only and Cl$_2$(20)/Ar(80) were maintained as similar to as-deposited BST. However, intensity of BST(100) orientation under Cl$_2$ only plasma was abruptly decreased. This indicated that CI compounds were redeposited on the etched BST surface and resulted in changed of the crystallinity of BST during the etch process.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.9
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• pp.681-685
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• 2012

We investigated the dry etching characteristics of TiN in $TiN/Al_2O_3$ gate stack using a inductively coupled plasma system. TiN thin film is etched by BCl3/He plasma. The etching parameters are the gas mixing ratio, the RF power, the DC-bias voltages and process pressures. The highest etch rate is in $BCl_3/He$ (25%:75%) plasma. The selectivity of TiN thin film to $Al_2O_3$ is pretty similar with $BCl_3/He$ plasma. The chemical reactions of the etched TiN thin films are investigated by X-ray photoelectron spectroscopy. The intensities of the Ti 2p and the N 1s peaks are modified by $BCl_3$ plasma. Intensity and binding energy of Ti and N could be changed due to a chemical reaction on the surface of TiN thin films. Also we investigated that the non-volatile byproducts such as $TiCl_x$ formed by chemical reaction with Cl radicals on the surface of TiN thin films.

• Journal of Advanced Marine Engineering and Technology
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• v.19 no.3
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• pp.62-69
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• 1995

In order to investigate the effect of TiN coating on corrosion fatigue behavior of metal, the rotary bending corrosion fatigue tests were carried out in 3% NaCl solution by using the round bar specimens of high-speed steel, SKH-9, coated with TiN by PVD method. From the experimental results, fatigue strength of TiN coating steel in air was obvious improvement as compared with that of the substrate because of the restriction of dislocation movement in near surface of the substrate by hard thin film. In 3% NaCl solution, corrosion fatigue life of TiN coating specimen in high stress level was improvement same as in air. But in low stress level, corrosion fatigue life of TiN coating one was equivalent to that without coating, due to much crack initiated from corrosion pits formed at the substrate by failure of coating layer.

• Korean Chemical Engineering Research
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• v.45 no.4
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• pp.410-413
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• 2007

The effect of internal donor(ID) in the heterogeneous Ziegler-Natta catalyst on the ethylene-1-butene copolymerization and the molecular structure of the resulting copolymer was investigated. $SiO_2$-supported $TiCl_4$ catalysts having ID/Ti molar ratio of 0.5 were prepared with ethyaluminium dichloride, magnesium alkyl, 2-ethyl-1-hexanol and $TiCl_4$. Three different IDs were employed such as ethylbenzoate(EB), diisobuylphthalate(DIBP) and dioctylphthalate(DOP). ID-added catalyst showed a larger fraction of Ti(+3) compared to that of no ID-added catalyst. The EB-added catalyst showed the highest activity in copolymerization. Xylene soluble value decreased by more than 50 % with ID-added catalysts compared to that of no ID-added catalyst. Crystaf analysis showed the chemical compositional distribution of PE copolymer was improved in the case of DIBP-added catalyst significantly. It could be explained that the presence of ID could make more even active sites and block the non-stereospecific active sites.

• Journal of the Korean Ceramic Society
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• v.21 no.2
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• pp.165-173
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• 1984

It is desirable to establish reliable synthetic methods for electro-ceramic materials. To synthesize $SrTiO_3$ in this study direct solid state reactions and wet chemical processes were used. Previous study of $SrTiO_3$ synthesis included oxalated-method($SrTiO(C_2O_4)_2$.$4H_2O$) co-precipitation$(SrCO_3+TiO(OH)_2)$ and direct solid state reaction$(SrCO_3+TiO(OH)_2)$ The methods in question lead to intermediate inclusion during the reactions and less controllable in particle sizes of $SrTiO_3$. To obtain highly pure $SrTiO_3$ so-called "direct wet process method" was added in this investigation. In the study the "direct wet process" was for the first time applied to synthesize chemically pure and fine particle $SrTiO_3$. $SrCl_2$ and $TiCl_4$<\ulcornerTEX> at KOH solution at room temperature to 10$0^{\circ}C$ precipitated $SrTiO_3$ The particle size increased as temperature increased.mperature increased.