• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.71-72
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• 2007

In this study, we investigated the fabrication of MLR (multi-layer resist) with a very thin diamond-like carbon (DLC) layer. ArF PR/$SiO_2$/DLC MLR structure was investigated and etching characteristics of the DLC layer was patterned using $SiO_2$ hard-mask by varying the process parameters such as different high-frequency/low-frequency combination ($f_{LF}/f_{HF}$), HF/LF power ratio ($P_{HF}/P_{LF}$), $O_2$ flow and $N_2$ flow rate in $O_2/N_2$/Ar plasmas. The results indicated an increased etch rate of DLC for the higher $f_{LF}/f_{HF}$ combination and for the increased low-frequency power ($P_{LF}$). And the etch rate of DLC was decreased with increasing the $N_2$ flow rate in $O_2/N_2$/Ar plasmas. In order to confirm the application of DLC MLR for the etching process of silicon oxide, the stack of ArF PR/BARC/$SiO_2$/DLC/TEOS/Si was investigated.

• 한국재료학회지
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• 제26권3호
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• pp.149-153
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• 2016

Nanosized zeolites were prepared in an autoclave using tetraethoxysilane (TEOS), tetrapropylammonium hydroxide (TPAOH), and $H_2O$, at various hydrothermal synthesis temperatures. Using transmission electron microscopy and particle size analysis, the nanopowder particulate sizes were revealed to be 10-300 nm. X-ray diffraction analysis confirmed that the synthesized nanopowder was silicalite-1 zeolite. Using atomic layer deposition, the fabricated zeolite nanopowder particles were coated with nanoscale $TiO_2$ films. The $TiO_2$ films were prepared at $300^{\circ}C$ by using $Ti[N(CH_3)_2]_4$ and $H_2O$ as precursor and reactant gas, respectively. In the TEM analysis, the growth rate was ${\sim}0.7{\AA}/cycle$. Zeta potential and sedimentation test results indicated that, owing to the electrostatic repulsion between $TiO_2$-coated layers on the surface of the zeolite nanoparticles, the dispersibility of the coated nanoparticles was higher than that of the uncoated nanoparticles. In addition, the effect of the coated nanoparticles on the photodecomposition was studied for the irradiation time of 240 min; the concentration of methylene blue was found to decrease to 48%.

• 대한화학회지
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• 제61권4호
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• pp.179-184
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• 2017

본 논문은 $ZnO/SiO_2$를 나노 복합체(nano-compositions : NCs) 크기로 상온에서 화학적 방법으로 합성하였다. ZnO는 초음파 합성법으로 제조를 하였으며, $SiO_2$는 침전 방법을 이용하여 제조 하였다. $ZnO/SiO_2$의 구조적인 특성을 파악하기 위해 X-선회절 분석기(XRD), 주사전자현미경(FE-SEM), 푸리에 변환 적외선 스펙트럼(FT-IR)를 이용하여 $ZnO/SiO_2$가 형성되는 것을 확인 할 수 있었다. 광촉매적 특성을 판단하기 위해 $SiO_2$의 농도별로 제조된 $ZnO/SiO_2$를 Rhodamine-B 시약을 이용하여 광촉매 특성을 평가하였다. 그 결과 $SiO_2$의 농도가 증가할수록 광촉매 특성이 증가하는 것을 확인하였다. 그리고 $ZnO/SiO_2$를 가지고 항균성 실험을 진행하였다. 실험에 사용된 균(cell)은 대장균(E. coli)과 황색포도상구균(S. aureus)이다. 표면의 $SiO_2$층에 따른 항균 성실험을 진행한 결과 $SiO_2$ 층이 증가 할수록 항균 효과가 증가하는 것을 확인 할 수 있다.

• 한국재료학회지
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• 제9권8호
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• pp.804-809
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• 1999

테오스(TEOS)를 출발물질로 사용하여 건조조절제(DCCA;Dying Control Chemical Additives)를 첨가하지 않고, 솔-젤 법을 이용하여 Si(001) 단결정 기판 위에 실리카 박막을 제조하였다. 박막은 스핀 코팅 방법으로 테오스 =1 몰, 염산=0.05몰의 조건하에 메탄올, 증류수의 첨가량을 변화시키면서 젤화 완료시간, 박막의 두께, 균열 발생 여부, 박막의 결정성 등을 조사하였다. 그 결과 솔의 제화 완료시간은 메탄올 첨가량이 8몰일 때 가장 긴 640시간이었다. 코팅된 박막의 두께는 메탄올 첨가량이 많아질수록 감소하였다. 소결은 승온 속도$0.6^{\circ}C$/min으로 $500^{\circ}C$에서 1시간 행하였으며, 메탄올 첨가량이 0.8몰, 2몰일 때는 표면에서 균열이 발생하여 worm-like grain 구조를 가졌고, 메탄올 4몰인 경우에는 국부적으로 균열이 발생하였으나, 메탄올 양이 8몰 이상에서는 균열이 발생하지 않았다. 즉, 솔-젤 공정에서 균열 방지를 위해 첨가되는 건조조절제(DMF)를 첨가하지 않고도 용매인 메탄올과 증류수 혼합비를 조절, 표면장력을 제어함으로써 균열없는 박막을 제조하였다.

• 한국염색가공학회:학술대회논문집
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• 한국염색가공학회 2012년도 제46차 학술발표회
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• pp.109-109
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• 2012

아라미드 섬유는 태양광의 직사광선에 계속 노출될 경우 120주 경과 후에는 강도가 3분의 1로 떨어지는 단점이 있다. 이와 같은 단점을 보완하기 위해 나노 크기의 금속산화물인 $TiO_2$ 졸-겔 나노합성법을 이용하여 나노졸을 제조하고 이를 직물에 함침하는 공정을 통하여 아라미드 섬유의 내광성 증진에 대해 연구하였다. TTIP, TEOS 등의 금속전구체를 이용하여 구형의 나노졸 합성에 의한 $TiO_2$ 나노졸을 수분산형태의 졸로서 섬유가공 공정상에 접목하였다. 제조된 나노크기의 $TiO_2$ 입자분포와 크기, 미세구조 및 결정상을 알아보기 위해 입도분포분석기, TEM, XRD를 이용하였다. $TiO_2$ 나노졸을 함침한 아라미드 직물은 내광성은 24, 48, 96시간 동안 Xenon-arc 광조사한 후, 물성변화를 분석하였다. 나노졸 합성시 반응물의 농도 및 용액의 pH 조건에 따른 나노졸의 미세구조를 TEM을 이용하여 관찰한 결과, 반응물의 농도에 따라 평균입도는 313.7nm, 500.5nm, 840.3nm, 1002nm로 커졌다. 하지만, 반응물의 농도가 증가할수록 시간이 지남에 따라 입자들이 층 분리 현상이 관찰되었으며, 단분산된 나노졸 입자를 제조하기 위해서는 TTIP의 투입량을 0.67mole(200ml)로 유지하였다. 또한 이를 아라미드 직물에 함침하여 광조사 시간에 따른 아라미드 섬유의 물리적 특성의 변화를 분석하였다.

• 분석과학
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• 제26권3호
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• pp.205-210
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• 2013

졸-겔법에 의한 LAS계 결정화 유리합성공정에서 출발물질로 사용된 금속 알콕사이드의 조성비, 조핵제의 첨가량 및 열처리조건이 생성된 유리의 결정화 특성에 미치는 영향을 조사하였다. LAS 유리전구체의 겔화시간은 $TiO_2$의 첨가량이 늘어남에 비례하였고, 금속 알콕사이드 중의 TEOS의 몰비가 증가함에 따라서 폭발적으로 증가하였다. 또한 TEOS의 조성비가 커지면 LAS계 유리의 결정화 온도는 증가 하였지만, $TiO_2$ 첨가량의 영향은 미미하였다. 그리고 $TiO_2$의 첨가량이 늘어나면 낮은 온도에서도 결정성이 증가하는 것으로 나타나 이는 조핵제가 LAS계 결정화 유리의 결정성을 향상시키는 것으로 판단되었다.

• Journal of Microbiology and Biotechnology
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• 제31권3호
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• pp.419-428
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• 2021

To efficiently recycle GH78 thermostable rhamnosidase (TpeRha) and easily separate it from the reaction mixture and furtherly improve the enzyme properties, the magnetic particle Fe3O4-SiO2-NH2-Cellu-ZIF8 (FSNcZ8) was prepared by modifying Fe3O4-NH2 with tetraethyl silicate (TEOS), microcrystalline cellulose and zinc nitrate hexahydrate. FSNcZ8 displayed better magnetic stability and higher-temperature stability than unmodified Fe3O4-NH2 (FN), and it was used to adsorb and immobilize TpeRha from Thermotoga petrophilea 13995. As for properties, FSNcZ8-TpeRha showed optimal reaction temperature and pH of 90℃ and 5.0, while its highest activity approached 714 U/g. In addition, FSNcZ8-TpeRha had better higher-temperature stability than FN. After incubation at 80℃ for 3 h, the residual enzyme activities of FSNcZ8-TpeRha, FN-TpeRha and free enzyme were 93.5%, 63.32%, and 62.77%, respectively. The organic solvent tolerance and the monosaccharides tolerance of FSNcZ8-TpeRha, compared with free TpeRha, were greatly improved. Using naringin (1 mmol/l) as the substrate, the optimal conversion conditions were as follows: FSNcZ8-TpeRha concentration was 6 U/ml; induction temperature was 80℃; the pH was 5.5; induction time was 30 min, and the yield of products was the same as free enzyme. After repeating the reaction 10 times, the conversion of naringin remained above 80%, showing great improvement of the catalytic efficiency and repeated utilization of the immobilized α-L-rhamnosidase.

• 한국재료학회지
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• 제33권7호
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• pp.265-272
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• 2023

In this study, the synthesis of nitrobenzene was carried out using sulfated silica catalyst. The study delved into H₂SO₄/SiO₂ as a solid acid catalyst and the effect of its weight variation, as well as the use of a microwave batch reactor in the synthesis of nitrobenzene. SiO₂ was prepared using the sol-gel method from TEOS precursor. The formed gel was then refluxed with methanol and calcined at a temperature of 600 ℃. SiO₂ with a 200-mesh size was impregnated with 98 % H₂SO₄ by mixing for 1 h. The resulting 33 % (w/w) H₂SO₄/SiO₂ catalyst was separated by centrifugation, dried, and calcined at 600 ℃. The catalyst was then used as a solid acid catalyst in the synthesis of nitrobenzene. The weights of catalyst used were 0.5; 1; and 1.5 grams. The synthesis of nitrobenzene was carried out with a 1:3 ratio of benzene to nitric acid in a microwave batch reactor at 60 ℃ for 5 h. The resulting nitrobenzene liquid was analyzed using GC-MS to determine the selectivity of the catalyst. Likewise, the use of a microwave batch reactor was found to be appropriate and successful for the synthesis of nitrobenzene. The thermal energy produced by the microwave batch reactor was efficient enough to be used for the nitration reaction. Reactivity and selectivity tests demonstrated that 1 g of H₂SO₄/SiO₂ could generate an average benzene conversion of 40.33 %.

• 한국세라믹학회지
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• 제34권9호
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• pp.941-948
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• 1997

CuCl nanocrystallites dispersed nonlinear optical silica and borosilicate glasses were fabricated by sol-gel process. CuCl powder was dissolved in TEOS(Si(OC2H5)4) and TMB((CH3O)3B), precursors of silica and borosilicate glasses, with ethanol, water and HCl, and precipitated through the heat treatment in the matrix glass. The optical properties of CuCl doped glasses were measured using the spectrophotometer at room temperature and low temperature(77K); Z1, 2 and Z3 exciton peaks from the absorption spectra, were observed at about 370 nm and 380 nm, respectively. The average radius of nanocrystallites, calculated from the blue shift of Z3 excitons, was measured according to annealing temperature and time. The precipitation temperature of CuCl nanocrystallites was decreased when boron was added to silica glass. Increase of annealing temperature and time made average radius of nanocrystallites saturated about 2 nm.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1997년도 Proceedings of the 13th KACG Technical Meeting `97 Industrial Crystallization Symposium(ICS)-Doosan Resort, Chunchon, October 30-31, 1997
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• pp.13-19
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• 1997

From the formation of the monodispersed silica particle which is a valuable for the industry by Sol-Gel process, the effects of the parameters participated in the process, the growth mechanism and the characteristics of silica particles for each rection conditions are investigated. To investigate about the formation of final silica particles, the suspension which performs the polymerization is reacted with molybdic acid, and the evolutions of TEOS and silica particle size are investigated in the reaction time ？ 새 the characteristics of molybdic acid with the suspension. From the results, a constant number of silica particle is formed at early reaction stage. Silica particles grow through the aggregation of smaller particles and nucleation is rate-limiting step for the growth of particles. In the conditions of this study, spherical silica particles are formed, [NH$_3$] and [$H_2O$] concentration increase the particle size but particle size decrease with [$H_2O$] concentration which is a certain above region. Average particle sizes are 187.4~483.3 nm and standard deviations in the average particle size are 1.7~2.9% with each experimental condition. From the BET results, specific surface area is 5.5~23.4 $m^2$/g and these values decrease with increase size. The average pore size is 50~70$\AA$.