• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
• /
• pp.918-920
• /
• 1999

Recently, the ceramics of high permittivity are applied to DRAM and FRAM. In this study, (Ba, Sr)$TiO_3$ (BST) ceramics thin films were prepared by Sol-Gel method. BST solution was made and spin-coated on Pt/$SiO_2$/Si substrate at 4000[rpm] for 10 seconds. Coating process was repeated 3 times and then sintered at $750[^{\circ}C]$ for 30 minutes. Each specimen was analyzed structure and electrical characteristics. Thickness of BST ceramics thin films are about $2000[\AA]$. Dielectric constant and loss of thin films was little decreased at $1[kHz]{\sim}1[MHz]$. Dielectric constant and loss to frequency were 250 and 0.02 in BST3. In accordance with applied voltage, property of leakage current was stability when the was $0{\sim}3$[V]. According to voltage, leakage current was increased exponentially at $4{\sim}7$[V].

• 암석학회지
• /
• 제7권2호
• /
• pp.77-97
• /
• 1998

경상분지 북부에 위치한 온정리 화강암의 암석화학적, 동위원소 지구화학적 특징으로부터 암체의 성인과 기원물질의 특징 등을 고찰하였다. 온정리 화강암의 연대에 대해 선백악기, 또는 백악기라는 상반된 견해가 있었으나 야외지질학적인 특징과 K-Ar 자료로 볼 때 백악기 말(87 Ma 내외)로 판단된다. 각섬석 지압계를 적용시켜 보았을 때 온정리 화강암의 정치 압력은 2 kbar 이하로 계산된다. 온정리 화강암의 암석화학적, 동위원소적 특징은 비교적 미 성숙된 호 환경에서 생성되었음을 지시한다. 온정리 화강암의 $SiO_2$ 함량과 $^{87}Sr/^{86}Sr$ 초기치는 부(-)의 직선관계를 잘 보이며 $^{207}Pb/^{204}Pb$ 초기치는 정(+)의 상관관계를 보여 두 단성분 사이의 불완전한 혼합, 또는 동화작용의 가능성을 지시한다. 그러나 현재 노출되어 있는 암체 중 오염체로 고려할 만한 단성분을 찾기는 어려우며 따라서 혼합이나 동화 작용을 일으킨 오염체가 하부지각에 위치할 가능성이 높다. 경상분지 내에 분포하는 백악기-제 3기 화강암의 연대와 지화학적, 동위원소적 특징을 정리하고 온정리 화강암의 특징과 비교해 보면 다음과 같은 결론이 얻어진다. 1) 화강암류의 연대는 특정 시기에 집중되는 경향성을 보여 경상 분지에서의 백악기 이후 화성 활동이 불연속적인 사건에 의해 일어났을 가능성이 높다. 2) 화강암류는 젊은(9억년 이내) 하부지각에서 유래되었으며 그 동위원소적 특징은 기원물질의 불균질성을 반영한다고 보아진다. 전반적으로 경상분지 화강암류의 동위원소적 특징과 화학조성은 상부지각 혼염에 의해 조화적으로 설명되지 않는다. 3) 경상분지 화강암류의 암상과 연대, 그리고 동위원소적 특징은 서남 일본 산인 벨트에 분포하는 화강암의 특징과 잘 일치한다. 4) 온정리 화강암의 Sr-Nd 동위원소비는 경상분지와 서남일본 내대에 분포하는 백악기 이후 암체 중 비교적 초생적인 영역에 해당된다.

• 자원환경지질
• /
• 제30권6호
• /
• pp.603-612
• /
• 1997

경상누층군이라 불리는 백악기 육성퇴적암-화산쇄설물들은 백악기 말-제3기초의 화강암류에 의해 관입 되어 있다. 의성-신령지역의 화강암류는 다양한 암상과 화학조성을 갖는다 : 반려암; 46.9, 섬록암; 58.3, 흑운모 화강암; 66.3~69.3, 장석 반암; 71.0 wt.% $SiO_2$. 화산암류는 화학적으로 금성산 칼데라에서는 안산암질 성분이 결여 된 현무암-유문암의 bimodal 유형과 선암산-화산 칼데라에서는 안산암-유문암의 felsic 유형으로 나뉜다. 대부분의 화성암류는 비알칼리 계열에 속하고, 칼크-알칼리 마그마의 분화 경로를 따른다. 화강암류는 높은 Zr/Y비에 의해 화산암류와 잘 구별된다. 화산암류에서 Zr/Y와 K/Y비의 차이는 맨틀기원 및 분별작용에서 불균질로 설명될 수 있다. 콘드라이트로 균질화된 희토류 원소량은 화강암류에서 Th와 K이 결핍되어 있고, 금성산 칼데라의 유문암에서 Sr와 Ti의 결핍되어 있다. 선암산-화산 칼데라의 유문암은 Rb, La 및 Ce이 부화되어 있다. $Rb-SiO_2$와 Rb-Y+Nb의 관계도는 화강암류와 화산암류가 화산호 환경이었음을 암시한다. K-Ar 연대는 4회의 심성활동 (섬록암; 89 Ma, 화강암; 64~62 Ma, 화강암/반암류; 55~52 Ma, 반려암; 52~45 Ma)으로 나뉘고, 금성산 칼데라의 bimodal 유형 (71~66 Ma)과 선암산-화산 칼데라의 felsic 유형 (61~54 Ma)으로 특징지워지는 화산활동이 수반되었다. 지화학 및 연대측정 자료들은 화성암류가 백악기말-제3기초 동안 다양한 지질학적 에피소드의 결과로 형성되었슴을 암시한다.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2009년도 제38회 동계학술대회 초록집
• /
• pp.169-169
• /
• 2010

박막형 CIGS 태양전지의 배면전극으로 사용되는 Mo 박막은 낮은 저항으로 인한 전기전도성과 열적 안전성이 아주 우수하다. 연구에서는 연성 CIGS 태양전지의 제조를 위한 Mo 배면전극의 대면적 증착기술에 관한 것으로 DC Magnetron Sputtering 공정을 이용하여 전주기술을 통한 Ni-Fe계 연성기판재 위에 졸걸법으로 합성된 $SiO_2$ 절연박막에 Mo 박막을 증착하는 것을 목적으로 하고 있다. 실험에서는 연성기판재 대신 시편을 Sodalime glass, Si wafer, SUS계 소재를 사용하여 스퍼터링 공정에 의한 Mo 박막을 증착하였다. 실험에서 타겟에 인가되는 전력과 공정압력을 변수로 하여 Mo 박막의 증착율, 전기저항성을 측정하였다. 타겟의 크기는 $80mm{\times}350mm$, 타겟과 기판간 거리 20cm 이었으며, 공정 압력은 2~50 mtorr 영역에서 인가전력을 0.5-1.5kW로 하였다. Mo 박막의 증착율과 전기적 특성을 측정하기 위하여 $\alpha$-step과 4-point probe(CMT-SR 1000N)를 이용하였다. 그리고 Mo 박막의 잔류응력을 측정하기 위하여 잔류응력측정기를 이용하였다. Mo 박막의 미세구조분석을 위하여 SEM 및 XRD를 분석을 실시하였다. 배면전극으로서 전기저항성은 공정압력에 따라 좌우 되었으며, 2 mTorr 공정압력과 1.5kW의 전력에서 최소값인 $8.2\;{\mu}{\Omega}-cm$의 저항값과 증착율 약 $6\;{\mu}/h$를 보였다. 기판재와의 밀착성과 관련한 잔류응력 측정과 XRD분석을 통한 결정립 크기를 분석하여 공정압력에 따른 Mo 박막의 잔류응력과 전기 저항 및 결정립 크기의 상관관계를 조사하였다. 그리고 대면적 CIGS 증착공정을 위해 직각형 타겟을 통해 증착된 Mo 박막의 증착분포를 20cm 이내 조사하였다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
• /
• pp.697-700
• /
• 2004

The SBT$(Sr_{0.8}Bi_{2.4}Ta_2O_9)$ thin films for semiconductor device were deposited on Pt-coated $Pt/TiO_2/SiO_2Si$ wafer by RF magnetron sputtering method at $400[^{\circ}C]$ and annealed at the temperature range from $600[^{\circ}C]$ to $850[^{\circ}C]$. The top electrodes(Pt) were deposited on SBT thin film by DC sputtering method. The crystallinity of SBT thin films were increased with increase of annealing temperature in the temperature range of $600[{\circ}C]\sim850[^{\circ}C]$. The annealing temperature properties were to be most excellent in the case of annealed SBT thin film at $750^{\circ}C]$. And, the maximum remanent polarization$(2P_r)$ and the coercive electric field$(E_c)$ at annealing temperature of $750[^{\circ}C]$ obtained about $11.60[{\mu}C/cm^2]$ and 48[kV/cm], respectively. Specially, it was seen that fatigue properties does not change in $10^{10}$ switching cycle.

• 자원환경지질
• /
• 제26권3호
• /
• pp.337-347
• /
• 1993

Mineralogical and geochemical studies on some pyrophyllite deposits in Milyang area, Kyeongnam Province (Milyang and Sungjin mine) were carried out in order to investigate dispersion patterns of chemical elements in altered volcanic wallrocks, and to interpret genetic environments of the pyrophyllite deposits. Cretaceous andesitic and tuffaceous rocks, and pyrophyllite ore specimens were collected from the dumps and drilling cores. Andesitic wallrocks were grouped as unaltered and altered rocks in the order of pyrophyllitization. Vertical dispersion patterns and relative mobilities of chemical elements in volcanic wallrocks were discussed. Geochemical environment in the Milyang area is characterized by the occurrence of boron minerals such as dumortierite coexisting with pyrophyllite ores, and tourmaline in granitic rocks. Unaltered andesitic rocks are mainly composed of plagioclase, pyroxene and hornblende, and were propylitized and saussuritized. Altered andesitic rocks are bleached and consist of quartz, sericite, pyrophyllite, kaolinite, chlorite and disseminated pyrite. Pyrophyllite ores are mainly composed of quartz, pyrophyllite, dumortierite, dissemianted pyrite and some diaspore. Enrichment of $SiO_2$, $Al_2O_3$, LOI (loss on ignition), As and Cr, and depletion of $K_2O$, $Na_2O$, CaO, MgO and total Fe are characteristic during alteration process. The REE patterns show that the pyrophyllite deposits could be originated from the continental margin volcanics. The $(La/Lu)_{cn}$ ratios of the pyrophyllite ores increase from 4.2~23.2 to 2.67~128.8 owing to strong acidic hydrothermal alteration. Vertical dispersion patterns of $Al_2O_3$, $K_2O$, $Na_2O$, CaO, MgO, $Fe_2O_3$ (total Fe), As, Au, Sb, Cr and Sr in the wallrocks show the location of orebodies. Particularly dispersion patterns of $Al_2O_3$ and Cr indicate the extension of orebodies. Anomalous distribution of Au, As and Sb in wallrocks shows potential for gold occurrence below the pyrophyllite deposits. Judging from the relative mobilities of elements in wallrocks, $Al_2O_3$ could be added from hydrothermal solution, and the silicified rone be formed from the excess of $SiO_2$.

• KIEE International Transactions on Electrophysics and Applications
• /
• 제11C권2호
• /
• pp.18-22
• /
• 2001

The thin films of high permitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)TiO$_3$ thin as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Sio$_2$/Si substrate at 4,000 [rpm] for 10 seconds. The structural characteristics of the surface were analyzed by fractal dimension. The thickness of BST ceramics thin films was about 260∼280 [nm]. The property of the leakage current was stable with 10-9∼10-11[A] when the applied voltage was 0∼3[V]. BST thin films ha low leakage current properties when fractal dimension was low and a coating area was high.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
• /
• pp.49-49
• /
• 2009

Phosphors with oxide host material, YAG:$Ce^{3+}$ and $(Ca,Sr,Ba)_2SiO_4:Eu^{2+}$ yellow phosphor, has been used for LED applications. The WLEDs using these phosphors are widely used for LCD backlighting, automobile, and general lighting applications since they have high conversion efficiency and good thermal and chemical stability which can meet necessary life time of LED products up to now. With advances of LED chip technology, the external quantum efficiency and driving current in chip get higher so that the phosphors for high power chip are required to maintain high conversion efficiency and stability at high temperature due to the heat dissipated from LED chips. In addition, higher color rendering index of LED lighting and color reproducibility of LCD than those of LEDs with single yellow phosphors are required. In order to overcome these technical issues rising from evolution of LED technology, new phosphors are in demand and nitride phosphors, one of the promising new candidate materials, will be discussed here.

• 한국세라믹학회지
• /
• 제48권3호
• /
• pp.222-227
• /
• 2011

The hexavalent chromium ions in wastewater are highly toxic chemicals even at low concentrations. It causes serious diseases, such as cancer, skin disease, digestive trouble et. al. In this study, $Cr^{6+}$ ions were removed by using borosilicate glasses. Various glasses system with different compositions were prepared and then reacted in a solution contaning $Cr^{6+}$ ions. After the reaction, the concentration of the $Cr^{6+}$ ions remained in the solution was measured by ICP-OES. The reacted surface of the glasses was also analyzed by using a XRD, SEM, and EDS. When $Na_2O-RO-SiO_2-B_2O_3$ (RO=MgO, CaO, SrO, BaO) glasses were reacted with a solution containing $Cr^{6+}$ ions, the optimum removal efficiency of $Cr^{6+}$ ions was observed in the BaO glass. $Ba^{2+}$ ions leached out of these glasses combine with $Cr^{6+}$ ions in a solution to form $BaCrO_4$ crystals on the glass surface. In this manner, the $Cr^{6+}$ ions can be removed from the solution. It is conceivable that $Ba^{2+}$ ions are reacted with $Cr^{6+}$ ions in a solution immedeately after leaching out of the glasses. The pH of the solution for optimum removal of $Cr^{6+}$ ions were 3.0~5.0.

• 한국광물학회:학술대회논문집
• /
• 한국광물학회.한국암석학회 2001년도 공동학술발표회 논문집
• /
• pp.95-95
• /
• 2001

The Yeongdong basin is one of the pull-apart basins in the southwestern part of the Korean Peninsula that has developed during Cretaceous sinistal fault movement. The bimodal igneous activities (basalts and rhyolites) in the basin appear to be closely associated with the basin development. Here, we discuss the origin of the igneous rocks using chemical and radiogenic isotope data. Basaltic (48.4-52.7 wt% SiO$_2$) and rhyolitic (70.3-70.8 wt% SiO$_2$) rocks are slightly alkalic in a total alkali-silica diagram. The rhyolitic rocks with have unusually high K$_2$O contents (5.2-6.0 wt%). The basaltic rocks show an overall pattern of within-plate basalt in a MORB-normalized spider diagram, but have distinct negative anomaly of Nb, which indicates a significant amount of crustal component in the magma. The basaltic rocks plot within the calc-alkaline basalt field in the Hf/3-Th-Ta and Y/l5-La/10-Nb/8 discrimination diagrams. The eNd(T) values of the basaltic rocks (-13.6 to 14.3) are slightly higher than those of the rhyolitic rocks (-14.1 to 15.2), and the initial Sr isotopic ratios of the former (0.7085-0.7093) are much lower than those of the latter (0.7140-0.7149). However, the initial Nd and Sr isotope ratios of the igneous rocks in the Yeongdong basin are similar to those of the nearby Cretaceous igneous rocks in the Okcheon belt. The Pb isotope ratios plot within the field of Mesozoic granitoids outside of the Gyeongsang basin in Pb-Pb correlation diagrams. Since a basaltic magma requires the mantle source, the enriched isotopic signatures and negative Nb anomaly of the basaltic rocks suggest two possibilities for their origin: enriched mantle lithospheric source, or depleted mantle source with significant amount of crustal contamination. However, we prefer the first possibility since it would be difficult for a basaltic magma to maintain its bulk composition when it is significantly contaminated with granitic crustal material. The slightly more enriched isotopic signatures of rhyolitic rocks also suggest two possibilities: differentiate of the basaltlc magma with some crustal contamination, or direct partial melting of the lower crust. Much larger exposed volume of the rhyolitic rocks, compared with the basaltic rocks, indicates the latter possibility more favorable.