• 제목/요약/키워드: $SrTiO_3$$BaTiO_3$

검색결과 494건 처리시간 0.026초

BST 박막 표면의 프랙탈 분석 및 3D 이미지 특성 (A Study on Fractal Analysis and 3D Images of Surface on BST Thin Films.)

  • 홍경진;민용기;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 센서 박막재료 반도체재료 기술교육
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    • pp.103-106
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    • 2002
  • The applicability of models based on fractal morphology to characterize $(Ba\;Sr)TiO_{3}$ thin film surfaces was investigated. The fractal morphology of coated barium strontium titan oxide thin film surfaces was described using fractal dimension from scanning electro microscopy image. The $(Ba\;Sr)TiO_{3}$ coating were deposited on silicon wafers using $(Ba\;Sr)TiO_{3}$ solution and spin coater. BST solution was composited by mol ratio, and then spin-coated from 3 times to 5 times coating on $Pt/SiO_{2}/Si$ substrate. Qualitative thin film analysis was performed with scanning electro microscopy (SEM), and surfaces parameters such as average grain diameter, roughness exponent and fractal dimension were determined.

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Orientation Control and Dielectric Properties of Sol-gel Deposited (Ba,Sr)TiO3 Thin Films for Room-temperature Tunable Element Applications

  • Zhai, Jiwei;Chen, Haydn
    • 한국세라믹학회지
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    • 제40권4호
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    • pp.380-384
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    • 2003
  • The effects of the mole concentrations of precursor solution on the microstructure and dielectric properties of sol-gel deposited $Ba_{0.85}$S $r_{0.15}$Ti $O_3$(BST) thin films have been investigated. The films were of single perovskite phase with strong (100) preferred orientation when grown on LaNi0$_3$ buffered Pt/Ti/ $SiO_2$Si substrates using a diluted precursor solution. Variation of the precursor solution concentration resulted in a different microstructure and, in turn, affected the tunability of the sol-gel deposited films. It was observed that leakage currents increased asymmetrically for the negative and positive bias voltage with decreasing thickness. Overall results suggest that those BST films have acceptable properties f3r applications as room-temperature tunable elements.

Electrical Properties of (Ba, Sr)TiO$_3$ Thin Film Deposited on RuO$_2$Electrode

  • Park, Chi-Sun;Kim, In-Ki
    • Transactions on Electrical and Electronic Materials
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    • 제1권4호
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    • pp.30-39
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    • 2000
  • The variation of electrical properties of (Ba, Sr)TiO$_3$[BST] thin films deposited of RuO$_2$electrode with (Ba+Sr)/Tr ration was investigated. BST thin films with various (Ba+Sr)/Tr ration were deposited on RuO$_2$/Si substrates using in-situ RF magnetron sputtering. It was found that the electrical properties of BST films depends on the composition in the film. The dielectric constant of the BST films is about 190 at the (Ba+Sr)/Tr ration of 1.0, 1,025 and does not change markedly. But , the dielectric constant degraded to 145 as the (Ba+Sr)/Tr ratio increase to 1.0. In particular, the leakage current mechanism of the films shows the strong dependence on the (Ba+Sr)/Tr ration in the films. At the ration (Ba+Sr)/Tr=1,025, the Al/BST/RuO$_2$ capacitor show the most asymmetric behavior in the leakage current density, vs, electric field plot. It is considered that the leakage current of the (Ba+Sr)/Tr=1,025 thin films is controlled by the battier-Iimited process, i,e, Schottky emission.

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위상배열 안테나용 $Al_2O_3가\; 첨가된\; (Ba, Sr, Ca)TiO_3$ 세라믹의 유전적 특성 (Dielectric Properties of $Al_2O_3-Doped\; (Ba, Sr, Ca)TiO_3$ Ceramics for Phased Array Antenna)

  • 이성갑;이영희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권11호
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    • pp.550-554
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    • 2001
  • $(Ba_{0.6}Sr_{0.4}Ca_x)TiO_3 + yAl_2O_3$ wt% (x=0.10, 0.15, 0.20, y=0~3.0) ceramics were fabricated by the mixed-oxide method, and their structural and dielectric properties were investigated with variation of composition ratio and $Al_2O_3$ doping content. As results of the X-ray diffraction and microstructure analysis, all BSCT specimens showed dense and homogeneous structure without presence of the second phase. The sintered density was decreased with an increase of $Al_2O_3$ doping content. The Curie temperature and relative dielectric constant at room temperature were decreased with increasing $Al_2O_3$doping content. The dielectric loss is minimum at BSCT doped with 1.5wt% $Al_2O_3$content. The tunability was decreased with increasing an Ca content and the BSCT(50/40/10) specimen doped with 2.0wt% $Al_2O_3$content showed the maximum value of 4.2%.

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하소공정과 $ZrO_2$ 첨가량이 $BaTiO_3$의 전기적 특성에 미치는 영향 (Effects of Calcination Process and $ZrO_2$ Addition on the Electrical Properties of $BaTiO_3$ Ceramics)

  • 차진이;박재관;오태성;김윤호
    • 한국세라믹학회지
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    • 제28권11호
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    • pp.935-941
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    • 1991
  • Effects of calcination process and ZrO2 addition on the electrical properties of [(Ba0.82Sr0.08Ca0.1)O]m(Ti1-$\chi$Zr$\chi$)O2 ceramics have been investigated. With the variation of A/B-site ratio m of the dielectric formulations, sintering behavior and the resistivity after sintering in a reducing atmosphere have been affected by the calcination process. When the dielectric formulations of m=1.01 were sintered in a reducing atmosphere, the room-temperature resitivity of 109 {{{{ OMEGA }}.cm was obtained for samples processed with two-step calcination, which was much lower than 1012 {{{{ OMEGA }}.cm of samples calcined once. It was confirmed that high resistivity of Ca-doped BaTiO3 ceramics, after sintering in a reducing atmosphere, is maintained by acceptor-like behavior of CaTi" which is formed by Ca substitution to Ti-site. It was also found out that the critical amount of B-site Ca substitution for reduction inhibition of BaTiO3 is around 0.005 mol. With the increasing amount of ZrO2 addition to dielectric formulations, Curie peak was depressed and Curie temperature was lowered due to the enhanced diffuse phase transition.tion.

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Luminescence Enhancement by Ba in SrTiO3:Pr, Al Red Phosphor for Field Emission Displays

  • Won, Chang-Whan;Lee, Jong-Eun;Won, Hyung-Il;Kim, Kwang-Bok;Song, Yoon-Ho;Kang, Seung-Youl;Koo, Kyoung-Wan
    • 한국세라믹학회지
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    • 제43권11호
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    • pp.743-745
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    • 2006
  • The luminescence properties of $Sr_{1-x}Ba_xTiO_3:Pr$, Al red phosphor for Field Emission Displays (FEDs) have been investigated in powders prepared though solid-state reactions. $Sr_{1-x}Ba_xTiO_3:Pr$, Al red phosphors indicate a higher luminescent intensity, and have been found to have potential for field emission displays. The addition of Ba increased the luminescence intensity at 617 nm by up to 30%. Ba ions are effective in producing the energy transfers from host-to-activator in 4f-5d transitions.

$BaTiO_3$계 세라믹스의 전기적 성질과 미세조직에 미치는 부분산화 Ti 분말 첨가의 영향 (Effect of Partially Oxidized Ti Powder on Electrical Properties and Microstructures of $BaTiO_3$-based Ceramics)

  • 김준규;조원승;박경순
    • 한국재료학회지
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    • 제10권10호
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    • pp.671-676
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    • 2000
  • 본 연구에서는 부분산화한 Ti 분말을 첨가한 $BaTiO_3$계 세라믹스를 진공중 $1350^{\circ}C$에서 1 h 소결하여 제조하였다. 공기중 가열후 전기적 성질과 미세조직에 미치는 부분산화한 Ti분말 첨가량의 효과를 조사하였다. 그 결과, 5~7vol%의 부분산화한 Ti분말을 첨가한 반도성 $BaTiO_3$계 세라믹스는 비정항의 변화크기가 $10^5$이상인 우수한 PTCR 특성을 나타내었고 또한, 고다공질과 미립화된 조직을 얻을 수 있었다. 5 vol%의 부분산화한 Ti 분말을 첨가한 $BaTiO_3$계 세라믹스의 상대밀도와 입도는 각각 54%, $1.3\;{\mu\textrm{m}}$였다. 부분산화한 Ti 분말의 첨가에 의한 $BaTiO_3$계 세라믹스의 PTCR 특성 발현은 입계에서의 산소 흡착에 기인하였는데, 이는 Heywang모델로써 설명할 수 있었다.

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Sol-gel 법으로 제작된 BST 박막의 Bi 첨가에 따른 구조적, 유전적 특성 (Fabrication of BST Thin films with Bi Addition by Sol-gel Method and their Structural and Dielectric Properties)

  • 김경태;김창일
    • 한국전기전자재료학회논문지
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    • 제17권8호
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    • pp.852-858
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    • 2004
  • An alkoxide-based sol-gel method was used to fabricate $Ba_{0.6}Sr_{0.4}TiO_{3}$thin films doped by Bi from 5 to 20 mol% on a Pt/Ti/$SiO_2$/Sisubstrate. The structural and dielectric properties of BST thin films were investigated as a function of Bi dopant concentration. The dielectric properties of the Bi doped BST films were strongly dependent on the Bi contents. The dielectric constant and dielectric loss of the films decreased with increasing Bi content. However, the leakage current density of the 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_{3}$ thin film showed the lowest value of 5.13$\times 10^{-7} A/{cm}^2$ at 5 V. The figure of merit (FOM) reached a maximum value of 32.42 at a 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_{3}$thin films. The dielectric constant, loss factor, and tunability of the 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}Tio_{3}$ thin films were 333, 0.0095, and 31.1%, respectively.

Densification and Dielectric Properties of Ba0.5Sr0.5TiO3-Glass Composites for LTCC Applications

  • Shin, Hyun-Ho;Byun, Tae-Hun;Yoon, Sang-Ok
    • 한국세라믹학회지
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    • 제49권1호
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    • pp.100-104
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    • 2012
  • Barium zincoborate (BZB) glass was added to $Ba_{0.5}Sr_{0.5}TiO_3$, and sintered at $875^{\circ}C$ for 2 h in air. When the BZB glass was added in quantities ranging from 15 to 20 wt%, the relative bulk density ranged from 93.1% to 94.2%, while the density decreased to roughly 81% thereafter up to 30 wt% glass addition. Quantitative XRD analysis showed that the $Ba_{0.5}Sr_{0.5}TiO_3$ filler was significantly dissolved into the BZB glass. However, no secondary phase was identified by XRD up to 30 wt% glass addition. The dielectric constant was about 130 to 140 at 1MHz up to 20 wt% BZB glass addition, while it decreased to about 60 thereafter, which may be ascribed to decreased density, partial dissolution of the $Ba_{0.5}Sr_{0.5}TiO_3$, and associated changes in the glass composition. The dielectric loss of the 20 wt% glass added specimen was 0.008.