• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2009년 추계학술발표대회
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• pp.42-42
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• 2009

마찰교반접합 (Friction Stir Welding)은 1991년 영국 TWI에서 개발된 접합 법으로서 회전하는 툴이 재료내부에 삽입되면 툴과 재료사이에서 발생하는 마찰열에 의하여 온도가 상승하게 되어 재료는 연화되고, 이러한 재료 내부에서 회전하는 툴이 이동하게 되면 재료 내부는 기계적 교반에 의해 소성변형이 일어남과 동시에 접합이 이루어진다. 마찰교반접합은 동적 재결정에 의한 접합부의 미세한 결정립 형성으로 인하여 기계적 특성이 향상되며 보호 가스가 필요 없어 친환경적임과 동시에 용융 용접 법에 비해 접합 시 에너지 소모가 적으며 또한 접합 후 접합부에서의 변형이 상대적으로 적다는 장점이 있다. 이러한 장점을 가진 마찰교반접합은 알루미늄 합금, 마그네슘 합금 그리고 동 합금과 같은 저 융점 비철재료에 많은 연구와 적용 사례들이 있어왔다. 하지만 최근에는 일반 탄소강, 연강, 오스테나이트계 스테인리스강, 니켈 합금, 티타늄 합금과 같은 고융점 재료에도 연구 및 적용이 진행되고 있는 추세이다. 페라이트계 스테인리스강은 가격이 비싼 Ni을 함유하지 않아 오스테나이트계 스테인리스강에 비하여 강재의 가격은 낮으면서도 고온특성 및 내식성이 우수하여 건축용, 자동차 배기계용으로 널리 사용되고 있다. 하지만 이런 장점을 가진 페라이트계 스테인리스강을 기존의 용융 용접 법으로 접합 시 용접부 및 열영향부에서의 결정립의 조대화로 인한 인성 및 연성이 저하되며, 특히 예민화된 열영향부 입계 내에 Cr 탄화물이 석출되어 입계주변에 Cr 결핍 층을 형성되어 입계부식이 발생되는 문제점이 발생된다. 본 연구에서는 마찰교반접합을 이용하여 두께 3mm의 409 스테인리스강에 대해 맞대기 접합을 실시하였다. 접합 변수를 툴의 재료 (WC-12wt%Co, $Si_3N_4$)로 하여 접합을 실시하였고 접합 후 외관상태 점검, 광학 현미경과 주사 전자 현미경을 통하여 미세조직을 관찰하였으며 황산-황산동 부식 시험을 실시하여 접합부의 부식 특성을 평가하였다.

• 반도체디스플레이기술학회지
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• 제5권2호
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• pp.47-49
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• 2006

Various methods of making thin film is being used in semiconductor manufacturing process. The most common method in this field includes CVD(Chemical Vapor Deposition) and PVD(Physical Vapor Deposition). Thin film is deposited on both the backside and the frontside of wafers. The thin film deposited on the backside has poor thickness profile, and can contaminate wafers in the following processes. If wafers with the thin film remaining on the backside are immersed in batch type process tank, the thin film fall apart from the backside and contaminate the nearest wafer. Thus, it is necessary to etch the backside of the wafer selectively without etching the frontside, and chemical injection nozzle positioned under the wafer can perform the backside etching. In this study, the backside chemical injection nozzle with optimized chemical injection profile is built for single wafer tool. The evaluation of this nozzle, performed on $Si_3N_4$ layer deposited on the backside of the wafer, shows the etching rate uniformity of less than 5% at the etching rate of more than $1000{\AA}$.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.597-602
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• 2002

Ceramics are very difficult-to-cut materials because of its high strength and hardness. Their machining mechanism is characterized by cracking and brittle fracture. In this paper, to give good machinability to the ceramics, BN powders are added to Si$_3$N$_4$ by volume of 20, 25 and 30%. And the machiniability of the produced ceramics are tested using micro drilling system. Through required experimental works, it is shown that the micro drilling machinability is varied along with the volumetric percentage of BN powders. Also, it is verified that the obtained results can be used to develop new machinable ceramics of good material properties and machinability.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2002년도 제3회 최신 분말제품 응용기술 Workshop
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• pp.25-37
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• 2002

The most important industrial application of gamma radiation in characterizing green compacts is the determination of the density. Examples are given where this method is applied in manufacturing technical components in powder metallurgy. The requirements imposed by modern quality management systems and operation by the workforce in industrial production are described. The accuracy of measurement achieved with this method is demonstrated and a comparison is given with other test methods to measure the density. The advantages and limitations of gamma ray densitometry are outlined. The gamma ray densitometer measures the attenuation of gamma radiation penetrating the test parts (Fig. 1). As the capability of compacts to absorb this type of radiation depends on their density, the attenuation of gamma radiation can serve as a measure of the density. The volume of the part being tested is defined by the size of the aperture screeniing out the radiation. It is a channel with the cross section of the aperture whose length is the height of the test part. The intensity of the radiation identified by the detector is the quantity used to determine the material density. Gamma ray densitometry can equally be performed on green compacts as well as on sintered components. Neither special preparation of test parts nor skilled personnel is required to perform the measurement; neither liquids nor other harmful substances are involved. When parts are exhibiting local density variations, which is normally the case in powder compaction, sectional densities can be determined in different parts of the sample without cutting it into pieces. The test is non-destructive, i.e. the parts can still be used after the measurement and do not have to be scrapped. The measurement is controlled by a special PC based software. All results are available for further processing by in-house quality documentation and supervision of measurements. Tool setting for multi-level components can be much improved by using this test method. When a densitometer is installed on the press shop floor, it can be operated by the tool setter himself. Then he can return to the press and immediately implement the corrections. Transfer of sample parts to the lab for density testing can be eliminated and results for the correction of tool settings are more readily available. This helps to reduce the time required for tool setting and clearly improves the productivity of powder presses. The range of materials where this method can be successfully applied covers almost the entire periodic system of the elements. It reaches from the light elements such as graphite via light metals (AI, Mg, Li, Ti) and their alloys, ceramics ($AI_20_3$, SiC, Si_3N_4, $Zr0_2$, ...), magnetic materials (hard and soft ferrites, AlNiCo, Nd-Fe-B, ...), metals including iron and alloy steels, Cu, Ni and Co based alloys to refractory and heavy metals (W, Mo, ...) as well as hardmetals. The gamma radiation required for the measurement is generated by radioactive sources which are produced by nuclear technology. These nuclear materials are safely encapsulated in stainless steel capsules so that no radioactive material can escape from the protective shielding container. The gamma ray densitometer is subject to the strict regulations for the use of radioactive materials. The radiation shield is so effective that there is no elevation of the natural radiation level outside the instrument. Personal dosimetry by the operating personnel is not required. Even in case of malfunction, loss of power and incorrect operation, the escape of gamma radiation from the instrument is positively prevented.

• 한국레이저가공학회지
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• 제12권4호
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• pp.12-16
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• 2009

The engineering ceramic is one of the materials advantageous in various conditions with high strength, endurance at high temperature, abrasion resistance and corrosion resistance, etc. However, due to high strength and high brittleness, ceramic incurs high costs and long time on finishing process required after sintering. So a process for obtaining wanted measurements of them has been studied using the high temperature which makes ceramics softened and heat affected recently. This study makes an estimate of laser-assisted machining (LAM) if an economically practical process for manufacturing precision silicon nitride ceramic parts using laser beam. In this study, mechanical properties of silicon nitride at high temperature were observed. And during the LAM, it was observed that cutting force and tool wear were reduced and oxidation of machined surface was increased according to a increase of laser power.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• Journal of Welding and Joining
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• 제28권6호
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• pp.40-44
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• 2010

Laser assisted machining (LAM) has been researched in order to machine the silicon nitride ceramics economically and effectively. LAM is an effective machining method by local heating of the cutting part to the softening temperature of the silicon nitride using laser beam. When silicon nitride ceramics is heated using a laser beam, the surface of silicon nitride ceramic is softened, oxidized and decomposed. And then surface hardness is decreased. Through machining in low viscosity and hardness conditions, silicon nitride was machined effectively and the life span of tool was increased. The plastic deformation was occurred due to softening of amorphous YSiAlON above $ 1,000^{\circ}C$. Transgranular fracture of ${\beta}-Si_3N_4$ was occurred when YSiAlON was not softened, but mostly intergranular fracture was occurred by the plastic deformation of softened YSiAlON.

• 생태와환경
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• 제39권2호통권116호
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• pp.198-208
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• 2006

본 연구는 어류를 이용한 생물학적 수환경 평가기법 즉, '생물통합지수'라 불리는 다변수 모델기법을 적용하는 것이다. 본 연구를 위하여 2004년 8월 ${\sim}$ 2005년 9월까지 갑천에서 5개 지점을 선정하여 조사하였다. 또한 생물학적 자료와 함께 환경부에서 제공되는 장기간의 수진자료와 물리적 서식지 평가 결과를 비교하였다. 어류 군집에 기반으로 한 하천의 생몰학적 건강도 평가를 위하여 Karr(1981)가 제시한 12메트릭 모델을 국내 실정에 맞게 10메트릭 모델로 변형하여 적용하였다. US EPA(1993)와 Karr(1981)의 기준에 따르면 갑천의 평균 생물학적 건강도 지수는 24.0 (범위: 20 ${\sim}$ 30, n=5)으로 보동${\sim}$악화 상태를 나타내었다. 장마기간에 조사된 4차 조사를 제외한 나머지 조사 중 상류부(SI~S3)와 하류부(S4, S5)의 평균 생물학적 건강도 지수는 26.0${\sim}$24.0으로 나타난 반면 4차 조사는 상류부와 하류부가 각각 21.0과 20.0을 기록하였다. 이는 장마로 인한 교란현상을 시사하며 또한 하류부보다는 상류부가 장마의 영향을 심하게 받는 것을 알 수 있다. 물리적 서식지 평가 지수는 75(보통)${\sim}$148(양호)상태를 보였다. 53은 75점을 기록하여 다른 지점에 비하여 상당히 낮은 수치(P=0.001, n=5)를 보였으며 생물학적 건강도 평가 지수 역시 24를 기록하여 상당히 낮은 수치를 보였다. 생물학적 산소요구량, 화학적 산소요구량, 총인, 총질소의 네 항목은 상류에 비하여 하류에서 3${\sim}$8배 가랑 상승하였으며, 이는 생물학적건강도 지수가 이 ${\cdot}$ 화학적 수질과 물리적 서식지를 모두 반영하는 결과라 사료되었다. 이와 같은 이유로 생물학적건강도 평가기법은 하천생태계를 현재를 진단하는 것뿐만이 아니라 나아가서 하천생태계와 수질을 회복하는데 핵심도구로 여겨진다.

• International Journal of Concrete Structures and Materials
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• 제7권3호
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• pp.225-238
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• 2013

In this study, a two-layer feed-forward neural network was constructed and applied to determine a mapping associating mix design and testing factors of cement-nano silica (NS)-rice husk ash ternary blended concrete samples with their performance in conductance to the water absorption properties. To generate data for the neural network model (NNM), a total of 174 field cores from 58 different mixes at three ages were tested in the laboratory for each of percentage, velocity and coefficient of water absorption and mix volumetric properties. The significant factors (six items) that affect the permeability properties of ternary blended concrete were identified by experimental studies which were: (1) percentage of cement; (2) content of rice husk ash; (3) percentage of 15 nm of $SiO_2$ particles; (4) content of NS particles with average size of 80 nm; (5) effect of curing medium and (6) curing time. The mentioned significant factors were then used to define the domain of a neural network which was trained based on the Levenberg-Marquardt back propagation algorithm using Matlab software. Excellent agreement was observed between simulation and laboratory data. It is believed that the novel developed NNM with three outputs will be a useful tool in the study of the permeability properties of ternary blended concrete and its maintenance.

• 한국의학물리학회지:의학물리
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• 제25권3호
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• pp.151-156
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• 2014

본 연구의 목적은 붕소 중성자 포획 치료 시 집적된 붕소 영역에서 중성자 선속의 변화와 그에 따른 방출된 즉발 감마선의 검출 시뮬레이션을 통하여 치료 영역에 대한 영상화의 가능성을 확인하고자 함이다. 전산 모사를 통하여 (1) 붕소 유무에 따른 중성자의 영향, (2) 내부와 외부에서의 즉발 감마선량 검출, (3) 즉발 감마선에 대한 에너지 스펙트럼 검출을 수행하였다. 모든 전산 모사는 Monte Carlo n-particle extended (MCNPX, Ver.2.6.0, Los Alamos National Laboratory, Los Alamos, NM, USA)를 이용하여 가상의 물 팬텀과 열중성자(thermal neutron) 소스, 붕소 영역을 지정하였다. 열중성자의 에너지는 1 eV 이하의 에너지였으며 선속은 2,000,000 n/sec.로 설정하였다. 이 때, 발생된 즉발 감마선의 검출은 물 팬텀과 수직 방향으로 위치시키고 납으로 둘러싸인 lutetium-yttrium oxyorthosilicate (Lu0,6Y1,4Si0,5:Ce; LYSO) 섬광체 검출기를 이용하였다. 붕소가 존재하는 영역인 5 cm 깊이에서의 28 분할로서 대략 0.18 cm의 bin을 도출하여 붕소 영역의 얕은 깊이에서부터 급격하게 저하되는 것을 확인하였다. 또한 붕소 영역이 시작되는 지점인 9 cm 깊이에서 감마선의 피크 레벨을 확인하였다. 그리고 478 keV 지점에서 정확한 즉발 감마선 피크가 관찰되는 것을 확인하였다. 478 keV의 즉발 감마선 피크는 41 keV의 반치폭으로 에너지 분해능 값은 8.5%로 측정되었다. 결론적으로 붕소 중성자 포획 치료 시 발생되는 즉발 감마선의 계측으로 치료가 행해지는 부위를 감마 카메라 또는 단일 광자 방출 단층 촬영 기기에서 영상화할 수 있는 가능성을 확인하였다.