• Journal of the Korean Crystal Growth and Crystal Technology
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• v.15 no.3
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• pp.104-107
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• 2005

[ $TiN_x$ ] powder have been fabrication by making of reaction between titanium powder and $Si_3N_4$ bowl during a planetary milling. Milling times were maintained for 1 hour, 5 hours, and 10 hours, respectively. The XRD result showed existence of non-stoichiometric compound of $TiN_{0.26}$ after 5 hours milling and coexistence of TiN with $TiN_{0.26}$ after 10 hours milling. Particle size distribution was investigated by particle size analyzer and microstructure was analyzed by FE-SEM. The size of titanium was decreased with increasing the milling time and the mean size of $TiN_x$ after 10 hours milling was increased by 200 nm.