• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.260-260
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• 2012

최근 IT산업의 급속한 발달로 모바일 제품과 반도체 및 IC 패키지 등의 전자제품의 소형화, 경량화 및 고성능화되어 가고 있다. 따라서 반도체 공정에서 단위소자의 고속화를 구현하기 위한 금속배선공정에 사용되는 금속재료가 최근에 최소 선폭을 갖는 디바이스에서는 구리를 배선 재료로 전환하고, 향후에는 모든 디바이스가 구리를 주요 배선재료로 사용할 것으로 예측되고 있다. 반도체 소자 공정 중 시료 표면 위에 형성되는 오염물은 파티클, 유기오염물, 금속 불순물 그리고 자연 산화막으로 나눌 수 있다. 구리 표면에 생성되는 부식생성물의 종류에는 CuO, $Cu_2O$, $Cu(OH)_2$, $CuCO_3{\cdot}Cu(OH)_2$와 같은 생성물들이 있다. 이러한 부식생성물이 구리박막 표면에 형성이 되면 성장된 구리박막의 특성을 저하시키게 된다. 이러한 다양한 오염물들을 제거하기 위해서 여러 가지 전처리 공정에 대한 연구가 보고되고 있다. 본 연구에서, 스퍼터 방식으로 구리를 증착한 웨이퍼 (Cu/Ti/Si) 를 대기 중에 노출시켜 자연 산화막을 성장시키고, 이 산화막과 대기로부터 흡착된 불순물을 제거하기 위해 계면 활성제인 TS-40A와 $NH_4OH$ 수용액을 사용하여 이들 수용액이 구리 표면층에 미치는 영향에 대해 조사 분석하였다. 사용된 TS-40A는 알칼리 탈지제로서 웨이퍼 표면의 유기물을 제거하는 역할을 하며, $NH_4OH$는 구리를 제거하는 부식액으로 산업현장에서 널리 사용되고 있다. 다양한 표면 전처리 조건에 따른 구리박막 표면의 형상 및 미시적 특성변화를 SEM과 AFM을 이용하여 관찰하였고, 표면의 화학구조 및 성분 변화를 관찰하기 위해 XPS를 측정하였으며, 전기적 특성변화를 관찰하기 위해 4-point prove를 사용하여 박막의 면저항을 측정하였다.

• Economic and Environmental Geology
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• v.28 no.3
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• pp.185-197
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• 1995

Tungsten skarns in the Chungju mine which consists mainly of strata-bound type iron ore deposits are found in the vicinity of the contact between the age-unknown Kyemeongsan Formation and granitic rock intrusions of Mesozoic age($134{\pm}2Ma$). Tungsten skarns were formed extensively from alumina and silica-rich schistose rocks by the introduction of calcium and iron from hydrothermal solution. The skarns comprise a metasomatic column and are subdivided into four facies; garnet facies, wollastonite facies, epidote facies and chlorite facies. The skarn process in time-evolutional trend can be divided broadly into the four facies in terms of the paragenetic sequence of calc-silicates and their chemical composition. Skarn and ore minerals were formed in the following sequence; (1) garnet facies, adjacent to biotite granite, containing mainly garnet(>Ad96) and magnetite, (2) wollastonite facies containing mainly wollastonite and garnet(Ad95~60), (3) epidote facies, containing mainly epidote(Ps35~31), quartz, andradite-grossular(Ad63~50), and scheelite, (4) chlorite facies, adjacent to and replacing schist, containing mainly chrolite, muscovite, quartz, calcite, epidote(Ps31~25), hematite and sulfides. The mineral assemblage and mineral compositions. suggest that the chemical potentials of Ca and Fe increased toward the granitic rock, and the component Al, Mg, K, and Si decreased from the host rock to granitic rock. The homogenization temperature and salinity of fluid inclusion in scheelite, quartz and epidote of epidote facies skarn is $300-400^{\circ}C$ and 3-8wt.% eqiv. NaCl, respectively. ${\delta}^{34}S$ values of pyrite and galena associated with chlorite facies skarn is $9.13{\sim}9.51%_{\circ}$ and $5.85{\sim}5.96%_{\circ}$, respectively. The temperature obtained from isotopic com· position of coexisting pyrite-galena is $283{\pm}20^{\circ}C$. Mineral assemblages and fluid inclusion data indicate that skarn formed at low $X_{CO_2}$, approximately 0.01. Temperature of the skarn mineralization are estimated to be in the range of $400^{\circ}C$ to $260^{\circ}C$ and pressure to be 0.5 kbar. The oxygen fugacity($fo_2$) of the skarn mineralization decreased with time. The early skarn facies would have formed at log $fo_2$ values of about -25 to -27, and late skarn facies would have formed at log $fo_2$ values of -28 to -30. The estimated physicochemical condition during skarn formation suggests that the principal causes of scheelite mineralization are reduction of the ore·forming fluid and a decrease in temperature.

• Journal of dental hygiene science
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• v.14 no.3
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• pp.319-324
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• 2014

The aim of this study was to evaluate influences of titanium dioxide ($TiO_2$) concentrations and irradiation times on growth of Streptococcus mutans when irradiated by visible light (405 nm wavelength) and by ultraviolet light (254 nm wavelength). To find the optimal antibacterial concentration of $TiO_2$, 0.01, 0.1, 1.0, and 10.0 mg/ml $TiO_2$ suspension was prepared with sterilized distilled water. S. mutans cultured media was added to $TiO_2$ solution to set the final cell count to $10^4CFU/ml$. The photocatalytic reaction was induced by irradiating 254 nm and 405 nm lights for 10 minutes. To compare the bactericidal activities according to irradiation times, all photocatalytic reaction was carried out with 0.1 mg/ml $TiO_2$ for 0, 10, 20, 30, and 40 minutes with both lights. After the photocatalytic reaction, $100{\mu}m$ of the reaction mixture was immediately plated on brain heart infusion agar. These plates were placed at 5% $CO_2$, $37^{\circ}C$, for 24 hours and the bacterial colonies were counted. All experiments were performed in quintuplicate. One-way ANOVA was used to determine whether there were any significant differences between the $TiO_2$ concentrations or the irradiation times. The most effective concentration of $TiO_2$ for its photocatalytic bactericidal effect on S. mutans was 0.1 mg/ml when irradiated with 254 nm and 405 nm lights. The longer the irradiation time, the bigger the bactericidal effect for both wavelengths. Over 99% of bacteria in the inoculum were killed after irradiation with 254 nm for 20 minutes and with 405 nm for 40 minutes. In conclusion, a photocatalytic reaction of $TiO_2$ induced by visible light of 405 nm constitutes the bactericidal effect on S. mutans.

• Korean Journal of Environmental Agriculture
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• v.32 no.3
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• pp.179-184
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• 2013

BACKGROUND: Accurate estimates of total direct $CH_4$ emissions from croplands on a country scale are important for global budgets of anthropogenic sources of $CH_4$ emissions and for the development of effective mitigation strategies. Methane production resulted by the anaerobic decomposition of organic compounds where $CO_2$ acts as inorganic electron acceptor. This process could be affected by the addition of rice straw, water management and rice variety itself. METHODS AND RESULTS: Rice (Oryza sativa L. Japonica type, var Samkwangbyeo) was cultivated in four plots: (1) Nitrogen-Phosphorus-Potassium (NPK) ($N-P_2O_5-K_2O$:90-45-57 kg/ha); (2) NPK plus 3 Mg/ha rice straw (RS3); (3) NPK plus 5 Mg/ha rice straw (RS5); (4) NPK plus 7 Mg/ha rice straw (RS7) for 3 years (2010-2012) and the rice straw incorporated in fall (Nov.) in Gyeonggi-do Hwaseong-si. Gas samples were collected using the closed static chamber which were installed in each treated plot of $152.9m^2$. According to application of 3, 5, 7 Mg/ha of rice straw, methane emission increased by 46, 101, 190%, respectively, compared to that of the NPK plot. CONCLUSION(S): We obtained a quantitative relationship between $CH_4$ emission and the amount of rice straw applied from rice fields which could be described by polynomial regression of order 2. The emission scaling factor estimated by the relationship were in the range of IPCC GPG (2000).

• Analytical Science and Technology
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• v.28 no.2
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• pp.79-85
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• 2015

A preliminary experiment was performed to develop a fast, convenient, and economical semi-quantitative method of analyzing amphetamine-like amines from images of derivatives. These were generated from the reaction (in situ, co-spot) of three amphetamine-like compounds with three derivatization reagents on a TLC plate. The attempt was made to optimize the reaction conditions for an efficient derivatization reaction, and TLC images taken by a digital camera were analyzed using two types of image analysis program (CP Atlas 2.0 and ImageJ) for repeatability (RSD, %) and linearity (R²). Then, their results were compared. For efficient derivatization, the reaction conditions needed to be modified. The results of image analysis of each of the samples at two different concentrations (0.5 mg/mL and 0.01 mg/mL) showed that the RSD values for reaction repeatability were in the range of 0.69-5.50%. From the calibration curves between the area of the derivative and the concentration of amines, the R² values (R² > 0.9906) for good linear correlation were found to be high, in a concentration range of 0.1-0.005 mg/mL of amines. In addition, the two programs demonstrated little difference in the analysis of repeatability and linearity of the derivatization, so that the current method has the potential to be used for the semi-quantitative analysis of amines.

• Korean Journal of Soil Science and Fertilizer
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• v.40 no.5
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• pp.418-428
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• 2007

Physical and chemical properties of the aggregate by-products including sludge and crushed dust samples collected from the 21 private companies throughout the country were analyzed to evaluate possible usage of the by-products as artificial soil materials for plantation. The pH of the materials ranged from 8.0 to 11.0. The organic matter content was $2.85g\;kg^{-1}$, and the total nitrogen content and available phosphate content were low as 0.7 percents and $12.98mg\;kg^{-1}$, respectively. Exchangeable $Ca^{2+}$, $Mg^{2+}$, $K^+$, and $Na^+$ were 2.29, 0.47, 0.02 and $0.05cmol\;kg^{-1}$, respectively. Heavy metal contents were lower than the limits regulated by environmental law of Korea. Textural analysis showed that most of the materials were silt loam with low water holding capacity ranged from 0.67 to 7.41 percents, and with low hydraulic conductivity ranged from 0.4 to $2.8m\;s^{-1}$. Mineralogical analysis showed that the aggregate by product materials were mostly composed of silicate, alumina and ferric oxides except calcium oxide dominant materials derived from limestones. The primary minerals were quartz, feldspars and dolomites derived from granite and granitic gneiss materials. Some samples derived from limestone material showed calcite and graphite together with the above minerals. According to the result, it can be concluded that the materials could be used as the artificial soil material for plantation after proper improvement of the physico-chemical properties and fertility.

• Journal of the Korean institute of surface engineering
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• v.50 no.5
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• pp.308-314
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• 2017

Anodic film formation behavior of AZ31 Mg alloy was studied as a function of NaOH concentration in 1 M $Na_2CO_3$ + 0.5 M $Na_2SiO_3$ solution under the application of a constant anodic current density, based on the analyses of voltage-time curves, surface appearances and morphologies of the anodically formed PEO (plasma electrolytic oxidation) films. The anodic film formation voltage and its fluctuations became largely lowered with increasing added NaOH concentration in the solution. Two different types of film defects, large size dark spots indented from the original surface and locally extruded white spots, were observed on the PEO-treated surface, depending on the concentration of added NaOH. The large size dark spots appeared only when added NaOH concentration is less than 0.2 M and they seem to result from the local detachments of porous PEO films. The white spots were observed to be very porous and locally extruded and their size became smaller with increasing added NaOH concentration. The white spot defects disappeared completely when more than 0.8 M NaOH is added in the solution. Concludingly it is suggested that the presence of enough concentration of $OH^-$ ions in the carbonate and silicate ion-containing electrolyte can prevent local thickening and/or detachment of the PEO films on the AZ31 Mg alloy surface and lower the PEO film formation voltage less than 70 V.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.04a
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• pp.181-184
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• 2003

GaN계 청색 여기용 광원으로 최적인 $Y_{3}AI_{5}O_{12}:Ce$계 phosphor를 고상반응으로 제조하여 white LED용 yellow 형광체로 신뢰성을 검토하였다. 출발시료는 metal hydrous oxide로 합성한 분말에 활성제로서 $Ce^{3+}$ 이온의 농도를 변화시키면서 로내의 온도와 시간을 변수로 하여 형광체를 제조하였다. 그 결과 $1650^{\circ}C$에서 2시간 소성시킨 분말의 경우, 입자 크기가 $3{\mu}m$이하인 순수 YAG 형광체를 얻을 수 있었으며 $Ce^{3+}$이온농도를 변화시킨 결과 0.03~0.05mol% 일 때가 가장 우수하여 해외제품수준을 능가하는 우수한 발광특성을 나타내었다. 이때 CIE1931 색좌표 값은 x=0.385, y=0.433으로서 green yellow 색을 나타내었다.

• Transactions of the Korean Society of Automotive Engineers
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• v.22 no.4
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• pp.111-120
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• 2014

The aim of this study is to develop an integrated urea-SCR catalytic filter system for reducing soot and $NO_X$ emissions simultaneously in diesel engines. In this study, the characteristics of exhaust emissions relative to reactive activation temperature under four kinds of engine loads are experimentally investigated by using a four-cycle, four-cylinder, direct injection type, water-cooled turbo intercooler ECU common-rail diesel engine with the integrated urea-SCR $MnO_2-V_2O_5-WO_3/TiO_2/SiC$ catalytic filter system operating at three kinds of engine speeds. The urea-SCR reactor is used to reduce $NO_X$ emissions, and the catalytic filter system is used to reduce soot emissions. The reactive activation temperature is very important for reacting a reducing agent with exhaust emissions. The reactive activation temperatures in this experiment is applied to 523, 573 and 623 K. The fuel is sprayed by the pilot and main injections at the variable injection timing between BTDC $15^{\circ}$ and ATDC $1^{\circ}$ according to experimental conditions. It is found that the $NO_X$ conversion rate is the highest as 83.9% at the reactive activation temperature of 523 K in all experimental conditions of engine speed and load, and the soot emissions shown by the average reduction rate of approximately 93.3% are almost decreased below 0.6% in all experimental conditions regardless of reactive activation temperatures. Also, the THC and CO emissions by oxidation reaction of Mn, V and Ti are shown in the average reduction rates of 70.3% and 38% regardless of all experimental conditions.

• 제어로봇시스템학회:학술대회논문집
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• 1991.10b
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• pp.1639-1645
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• 1991

Because of the important role LD converters play in the production of high quality steel, various dynamic models have been attempted in the past by many researchers not only to understand the complex chemical reactions that take place in the converter process but also to assist the converter operation itself using computers. And yet no single dynamic model was found to be completely satisfactory because of the complexity involved with the process. The process indeed involves dynamic energy and mass balances at high temperatures accompanied by complex chemical reactions and transport phenomena in the molten state. In the present study, a mathematical model describing the dynamic behavior of LD converter process has been developed. The dynamic model describes the time behavior of the temperature and the concentrations of chemical species in the hot metal bath and slag. The analysis was greatly facilitated by dividing the entire process into three zones according to the physical boundaries and reaction mechanisms. These three zones were hot metal (zone 1), slag (zone 2) and emulsion (zone 3) zones. The removal rate of Si, C, Mn and P and the rate of Fe oxidation in the hot metal bath, and the change of composition in the slag were obtained as functions of time, operating conditions and kinetic parameters. The temperature behavior in the metal bath and the slag was also obtained by considering the heat transfer between the mixing and the slag zones and the heat generated from chemical reactions involving oxygen blowing. To identify the unknown parameters in the equations and simulate the dynamic model, Hooke and Jeeves parttern search and Runge-Kutta integration algorithm were used. By testing and fitting the model with the data obtained from the operation of POSCO #2 steelmaking plant, the dynamic model was able to predict the characteristics of the main components in the LD converter. It was possible to predict the optimum CO gas recovery by computer simulation