• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.507-508
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• 2006

$SF_6$ gas is widely used in industrial of insulation field. In this paper, $N_2$ is mixed to improve pure $SF_6$ gas characteristics. Electron transport coefficients in $SF_6-N_2$ mixture gases are simulated in range of E/N values from 70 to 400 [Td] at 300K and 1 Torr by using Boltzmann equation method. The results have been obtained by using the electron collision cross sections by TOF, PT, SST sampling, compared with the experimental data determined by the other author. It also proved the reliability of the electron collision cross sections and shows the practical values of computer simulation. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2001.11a
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• pp.145-149
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• 2001

The most of faults in gas insulation of power facilities are caused by partial discharge. Therefore we simulated partial discharge and measured the radiated electromagnetic wave emitted from partial discharge in SF$_{6}$ gas by biconical antenna. This paper describes time delay and electric fields pulse characteristics of radiated electromagnetic waves with distance(1[m], 3[m], 5[m]) between antenna and discharge source.e.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1901-1903
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• 1996

In This paper, to understand statistical properties of breakdown voltage, the experiment is performed on four gaps of different electrode area, ranging from $17.44[cm^2]$ to $1809.5[cm^2]$, in $SF_6$ gas. Statictcial property of breakdown is confirmed Weibull distribution and as area of electrode is increased, breakdown voltage is decreased and converged constant value $E_0$.

• Proceedings of the KIEE Conference
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• 1990.07a
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• pp.293-296
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• 1990

In this work, we reviewed AC break-down voltage characteristics in $SF_6$ Gas with spacer under nonuniform field, using the electrode construction of model spacer and simple protrusion. We cleared that breakdown voltage and surface flashover strongly depend on the position of spacer's insert.

• ETRI Journal
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• v.21 no.3
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• pp.16-21
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• 1999

After etching Al-Cu alloy films using SiCl4/Cl_2/He/CHF3 mixed gas plasma, the corrosion phenomenon at the grain boundary of the etched surface and a passivation layer on the etched surface with an SF6 plasma treatment subsequent to the etching were studied. In Al-Cu alloy system, corrosion occurs rapidly on the etched surface by residual chlorine atoms, and it occurs dominantly at the grain boundaries rather than the crystalline surfaces. To prevent corrosion, the SF6 gas plasma treatment subsequent to etching was carried out. The passivation layer is composed of fluorine-related compounds on the etched Al-Cu surface after the SF6 treatment, and it suppresses effectively corrosion on the surface as the SF6 treatment pressure increases. Corrosion could be suppressed successfully with the SF6 treatment at a total pressure of 300 mTorr. To investigate the reason why corrosion could be suppressed with the SF6 treatment, behaviors of chlorine and fluorine were studied by various analysis techniques. It was also found that the residual chlorine incorporated at the grain boundary of the etched surface accelerated corrosion and could not be removed after the SF6 plasma treatment.

• Proceedings of the KIEE Conference
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• 1991.07a
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• pp.300-303
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• 1991

Sulphur-hexafluoride has extensively been used as an insulating gas of electric power equipment in substation for its high dielectric strength, non-toixity and non-flammable properties. But it is very expensive and is liquidizable under the condition of low temperature and high pressure. And it is very sensible to the locally high electric field strength. To resolve these problems, we studied 50% FOV and V-t characteristics of $SF_6-N_2$ mixtures under positive and negative lightning impulses using a 25mm rod-plane gap. 50% FOV of $SF_6-N_2$ 50% mixture was about 85% of pure $SF_6$ and it was known that $SF_6-N_2$ mixtures can be used as an economic substitution insulating gas for $SF_6$.

• Journal of the Microelectronics and Packaging Society
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• v.8 no.3
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• pp.63-67
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• 2001

Up to now, most studies about Pt-etching have been focused on physical sputtering mechanism with Cl-based plasma, while only a limited results are available for etching characteristics with fluorine-based plasma. In this study, etch characteristics of Pt thin film with $Cl_2$/Ar and $SF_{6}$/Ar Ar gas chemistries have been studied with ECR plasma etching system. It is confirmed that $SF_{6}$/Ar Ar plasma chemistry could make volatile etch-products through the reaction with Pt thin film. Also the improvement in etch rate, etch profile and surface roughness is obtained due to the formation of volatile platinum fluoride compounds.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2009.05a
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• pp.267-269
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• 2009

In this paper, insulations characteristics by temperature changes($+10{\sim}-60[^{\circ}C]$) of $SF_6$ 9as in the experimental chamber were studied. From this result, The breakdown characteristics classify the gas & liquid coexisted stage of voltage value increases & much deviation and the $V_B$ low stage as the interior of chamber gets filled with mixture of $SF_6$ that are not liquefacted and remaining air which couldn't be ventilated. In addition the ability of insulation of liquid $SF_6$ was higher than that of the highly pressurized $SF_6$ gas. In this research, we want to provide the base data on designing insulation of high-temperature superconductor and the cryogenic equipments by investigating the insulation characteristics of $SF_6$.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.774-778
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• 2004

The atomization process of a circular $SF_{6}$ liquid jet issued into an otherwise quiescent, high-pressure $N_2$ gas was observed to explore the breakup mechanism of liquid ligaments involved in turbulent atomization. Both liquid and gas temperatures were fixed at a room temperature but the gas pressure was elevated to more than twice the critical pressure of $SF_{6}$. Therefore, the liquid surface was in a thermodynamic state close to a critical mixing condition with suppressed vaporization. Since the surface tension and the surface gas density approach zero and the surface liquid density, respectively, phenomena equivalent to those which would appear when a very high speed laminar flow of water were injected into the atmospheric-pressure air can be observed by issuing $SF_{6}$ liquid at low speeds in micro-gravity environment which avoid disturbances due to gravity forces. The instability ob near-critical mixing surface jet was quantitatively characterized using a newly developed device, which could issue a very small amount of $SF_{6}$ liquid at small constant velocity into a very high-pressure $N_2$ gas.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.04a
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• pp.334-337
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• 1997

This paper describes dielectric characteristics of SF$_{6}$ gas stressed by the non-oscillating and oscillating impulse voltages in inhomogeneous fields disturbed by metallic protrusion. The breakdown voltage-time (V-t) characteristics and breakdown voltage-gas pressure (V-p) characteristics and their characteristics are statistically investigated with positive and negative very fast transient overvoltages. The experiments were carried out using a needle-to-plane gap geometry in the gas pressure ranges from 0.1 to 0.5 MPa. The gap separation gas 22 mm, and the needle-shaped protrusions were made of stainless steel 10 mm in length and 1.0 mm in diameter.r.