• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.260-261
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• 2005

The heterolayered thick/thin structure consisting of $Pb(Zr_{0.52}Ti_{0.48})O_3$ and $BaTiO_3(BT)$ were fabricated by a sol-gel process. PZT powders, prepared by the sol-gel method, were mixed with an organic vehicle and the PZT thick films were fabricated by the screen printing techniques on alumina substrate with Pt electrodes. The microstructural and dielectric characteristics of the stacked heterolayered PZT/BT/PZT films were investigated by varying the number of coating $BaTiO_3$ layers. The existence of a $BaTiO_3$ layer between the PZT thick films of the tri-layer $Pb(Zr_xTi_{1-x})O_3/BaTiO_3/Pb(Zr_xTi_{1-x})O_3$thick/thin/thick film can greatly improve the leakage current properties of the PZT thick films. The average thickness of a PZT(5248)/$BaTiO_3$ heterolayered thick/thin film was 25$\mu$m. The relative dielectric constant and dielectric loss of the PZT(5248)/$BaTiO_3$-3 heterolayered thin film coated three times were 1087 and 1.00% at 1[MHz].

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1621-1623
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• 2004

The $Pb(Zr_{0.52}Ti_{0.48})O_3/(Ba_{0.6}Sr_{0.4})TiO_3$ [PZT(52/48)/BST(60/40)] heterolayered thin films were deposited on Pt/Ti/$SiO_2$/Si substrates by using the RF sputtering method with RF powers of 60,70,80,90[W]. All thin films showed the peaks of the tetragonal phase. Increasing the RF power, dielectric constant and loss of the PZT(52/48)/BST(60/40)] heterolayered thin films were decreased. The thickness ratio of PZT and BST thin films was 1/1. The relative dielectric constant and the dielectric loss of the PZT(52/48)/ BST(60/40) heterolayered thin films were 562 and 13%, respectively.

• 한국결정성장학회지
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• 제6권2호
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• pp.254-262
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• 1996

수열합성법을 이용하여 $1~3\;\mu\textrm{m}$의 입자 크기를 갖는 균일한 $Pb(Zr_{0.52}Ti_{0.48})O_{3}$ (PZT)분말을 제조하였다. 출발물질의 종류에 따라 반응조건이 다소 차이를 보였지만, 일반적으로 10 M의 KOH를 광화제로 사용하여, $180^{\circ}C$ 이상에서 2시간 동안 반응시켜 PZT 분말을 합성 할 수 있었다. 또한, 광화제의 농도, 수열반응 온도, 그리고 반응시간이 증가할수록 균일상의 분말이 형성됨을 보였다.

• 한국전기전자재료학회논문지
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• 제29권10호
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• pp.620-624
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• 2016

Ferroelectric $Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT) films were deposited on SrTiO3(100) substrate by using conductive $SrRuO_3$ films as underlayer and their structural and ferroelectric properties were investigated. PZT films were grown in (00l) orientation on well lattice-matched pseudo-cubic $SrRuO_3$ films. Thickness dependence of ferroelectric and electrical properties of PZT films was investigated. PZT film with 400 nm thickness showed a remanent polarization ($P_r$) of $29.0{\mu}C/cm^2$ and coercive field ($E_c$) of 83 kV/cm, and $P_r$ decreased and $E_c$ increased with thickness reduction. The dielectric constant for PZT films showed gradual decrease with thickness reduction. Breakdown field of PZT films did not show the thickness dependence and displayed as high value as 1 MV/cm.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권12호
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• pp.549-554
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• 2006

In this paper we first applied the chemical mechanical polishing (CMP) process to the planarization of ferroelectric film in order to obtain a good planarity between electrode and ferroelectric film. $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ (shortly PZT) ferroelectric film was fabricated by the sol-gel method. And then, we compared the structural characteristics before and after CMP process of PZT films. Removal rate, WIWNU% and surface roughness have been found to depend on slurry abrasive types and their hardness, especially, surface roughness and planarity were strongly depends on its pH value. A maximum in the removal rate is observed in the silica slurry, in contrast with the minimum removal rate occurs at ceria slurry. We found that the surface roughness of PZT films can be significantly reduced using the CMP technique.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.689-692
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• 2001

In this paper, the pizoelectric and dielectric properties of 0.95Pb(ZrxTil-x)O$_3$- 0.05Pb(Mn$\_$0.2/Fe$\_$0.4/W$\_$0.4/)O$_3$piezoelectric ceramics is investigated as a function of Zr/Ti mole ratio. Also, MPB(Morphotropic Phase Boundary) and optimal sintering temperature is studied using XRD and SEM. As a results, when Zr/Ti mole ratio is 52/48, electromechanical coupling factor, k$\_$p/, is 58[%], permittivity, $\varepsilon$$\^$T/$\_$33//$\varepsilon$0, is 1360 and piezoelectric strain constant, d$\_$33/ is 265[pC/N] and the piezoelectric and dielectric properties become maximum. Phase transition temperature of its ternary piezoelectric system is about 350[$^{\circ}C$]. From the XRD analysis, when Zr/Ti mole ratio is 52/48, tetragonal phase transits to rhombohedral phase. Also, From measuring results of the sintering density, when sintering temperature is 1050[$^{\circ}C$], sintering density become maximum and is about 7930[kg/㎥], and average grain size is about 2-3[$\mu\textrm{m}$].

• 한국결정학회지
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• 제7권2호
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• pp.165-174
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• 1996

본 연구는 Pb(Zr0.52Ti0.48)O3을 기본 조성으로하여 Pb-site에 Pb2+보다 이온 반경이 큰 Ba2+, 비슷한 크기의 Sr2+ 그리고 이온 반경이 작은 Ca2+를 치환하여 유전 및 압전 특성을 조사하고, 압전 열화에 대한 영향을 고찰하고자 하였다. 치환하지 않은 기본 조성에 비해 치환된 조성의 비유전율과 전기기계결합게수는 Ba2+ 치환시 가장 높았고, Sr2+ 치환시 기본조성과 비슷하였으며 Ca2+ 치환시 감소하였다. 기계적 품질계수는 지본 조성에 비해 Ba2+ 치환시에는 감소하였으며, Sr2+, Ca2+ 치환으로 갈수록 증가하는 경향을 나타내었다. 그리고 압전 열화시 주파수 변화 특성에서는 각 이온 치환에 따른 변화는 보이지 않았으나 상온 방치시와 고온 방치(100℃)후의 열화속도가 상온방치후보다 빨랐다.

• 한국전기전자재료학회논문지
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• 제21권2호
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• pp.126-130
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• 2008

In this study, in order to develop low loss multilayer piezoelectric actuator, PZN-PZT ceramics were fabricated using $Li_2CO_3,\;Bi_2O_3$, CuO and ZnO as sintering aids, their structural, piezoelectric and dielectric characteristics were investigated according to the amount of ZnO addition, At the sintering temperature of $870^{\circ}C$, the density, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant(${\epsilon}_r$) and piezoelectric constant($d_{33}$) of 0.4 wt% ZnO added specimen (sintered at $870^{\circ}C$) showed the optimum value of $7.812g/cm^3$, 0.535, 916, 1399, 335 pC/N respectively. Taking into consideration above piezoelectric properties of the specimen sintered at low temperature, it was concluded that PZN-PZT ceramics using 0.4 wt% ZnO as additive showed the optimum characteristics as the composition ceramics for low loss multilayer piezoelectric actuator application.

• 한국세라믹학회지
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• 제38권9호
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• pp.860-865
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• 2001

본 논문은 출발물로서 2mol% CdO가 치환된 $0.05Pb(Mn_{1/3}Sb_{2/3})O_3-0.95Pb(Zr_{0.52}Ti_{0.48})O_3$ 분말을 제조 후, 닥터 블레이드 방법으로 green sheet를 제조하기 위한 slurry의 최적 공정첨가제 조성에 관한 연구를 수행하였다. 또한, 제조된 green sheet에 대하여 소결 특성과 두께 변환에 따른 유전 및 압전 특성을 관찰하였다. 공정첨가제의 첨가에 따른 점도거동을 통하여 slurry를 최적화하였고, TGA 분석으로 소결조건을 정하였으며, sheet의 특성에 미세구조와 XRD 등으로 측정하였다. 최적의 slurry는 고형분량 30vol%에 대해 분산제 3.0wt%에서 가장 안정화되었고, 이후 바인더/가소제(0.75/0.25) 3.0wt% 첨가시 점도는 7.55Pa${\cdot}$s이었다. Green sheet의 유전 및 압전 특성들은 각각 900$^{\circ}$C, 950$^{\circ}$C, 1000$^{\circ}$C로 소결온도를 증가함에 따라 다소 증가하였지만, 두께에 따른 특성들은 큰 변화가 관찰되지 않음을 확인하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권9호
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• pp.611-615
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• 1999

Piezoelectric properties of PMN-PZT ceramics with $CeO_2$ impurity were investigated. Mechanical quality factor, $Q_m$ of 1792, 1285 and the electromechanical coupling coefficient, $k_p$ of 0.52, 0.54 were obtained from the specimen with 0.25 and 0.5 mole % $CeO_2$ respectively. Curie temperature was decreased with the addition of $CeO_2$ while the electric coercive field was proportional to the amount of impurity. Based on the system ceramics with 0.5 mole % cerium oxide, a Rosen type piezoelectric transformer was fabricated and tested. Voltage step-up ratios of 230 and 13 were obtained from the transformer at no load and $100 k\Omega$ resistance, respectively. Experimental results showed a potential of the transformer for the practical use coupled with the expected strength increase by the grain size refinement.