• 수산해양기술연구
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• 제29권4호
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• pp.272-278
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• 1993

The trimethylamine-sensing characteristics of ZnO based thin film semiconductors and the sensitivity enhancement by squttering conditions have been investigated to develop a new type sensor for detecting fish freshness. The sensor fabricated with a 300nm of ZnO thin film with 4 wt% Al sub(2) O sub(3) and 1 wt% TiO sub(2) exhibited the highest sensitivity of 155 at 30$0^{\circ}C$ of working temperature and to the 240 ppm TMA gas. Deposition of ZnO thin film using a RF magnetron sputter was carried out at a pressure of 10 super(-2) Torr in pure oxygen gas with an RF power of 100W. The sensor exhibited a large response to the actual gases produced by a mackerel at an early stage of decomposition.

• E2M - 전기 전자와 첨단 소재
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• 제10권10호
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• pp.1016-1021
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• 1997

Magneto resistance properties in spin-valve sandwiches with various thickness of nanmagnetic layer in contact with the ferromagnetic NiFe film were investigated. The NiFe layer in contact with the NiO film was pinned by strongly exchange-biased coupling and the free NiFe layer at the film surface induced a sharp change in the magnetoresistance at -5~15Oe due to small coercivity. The NiO/NiFe/Cu/NiFe film showed a magnetoresistance ratio in the range of 2.3~2.9% and a field sensitivity above 2.2%/Oe with various of nonmagnetic layer. The NiO/NiFe/Cu/NiFe film of the field sensitivity above 2.2%/Oe suggests stang possibility of magnetic sensor matter.

• 센서학회지
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• 제22권6호
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• pp.444-449
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• 2013

ZnO-based ethanol gas sensors were fabricated by the painting method and their electrical and ethanol gas sensing characteristics were investigated. The ZnO-Pt (1 wt.%) film heat treated at $400^{\circ}C$, for 2 hrs. in air showed the highest sensitivity to ethanol gas in air at an operating temperature of $250^{\circ}C$ The sensitivity of the gas sensors to 1000 ppm ethanol in air at $250^{\circ}C$ was 8.7 and rising time and falling time of the gas sensors were 3.12 minutes and 25 minutes, respectively.

• 전자공학회논문지D
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• 제34D권12호
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• pp.46-53
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• 1997

The TMA gas sensors are fabricated with the ZnO-based thin films grown by a RF magnetron sputtering method. The hall effect measurement and AES analysis are carried out to investigate the effects of the sputtering gases and dopants which effect on the electrical resistivity and sensitivity to TMA gas. We measure the cfhanges of the surface carrier concentration, haall electron mobility, electrical resistivity, surface condition, and depth profile of the films. The ZnO-based thin film sensors sputtered in oxygen, or added with dopants showed a high sruface carrier concentration, film sensors sputtered in oxygen and doped with 4.0 wt.% $Al_{2}$O$_{3}$, 1.0 wt.% TiO$_{2}$, and 0.2 wt% v$_{2}$O$_{5}$ showed the highest surface carrier concentration of 5.952 * 10$^{20}$ cm$^{-3}$ , hall electron mobility of 176.7 cm$^{2}$/V.s, lowest electrical resistivity of 6*10$^{-5}$ .ohm.cm and highest sensitivity of 12. These results were measured at a working temperature of 300.deg. C to 8 ppm TMA gas.

• 한국재료학회지
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• 제3권4호
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• pp.319-326
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• 1993

Hydroxide법으로 ${\alpha}$-주산산(stannic acid)을 만든후, 하고온도를 $500^{\circ}C$~$1100^{\circ}C$로 조정하여 일차입자(Crystallite)크기가 8-54nm인 $SnO_2$ 분말을 제작하였다. 분말의 입자(drystalite)클기에 따른 분말특성와 $H_2$, CO가스(0.5v/o)에 대한 감응성 미치공기중에서의 저상변화특성에 미치는 영향을 조사하였다. 입자크기가 감소함에 따라, 분말의 FTIR 흡습특성은 증가하였으나, 격자상수는 일정하였다. 후막소자에서, $H_2$가스에 대해 최대감도를 나타내는 온도와 공기중에서 최소저항을 나타내는 온도는 입자크기가 미세해짐에 따라 점차 낮아졌다. 최소저항점과 최대감도점의 온도저하를 산소흡착종의 활성화에너지의 감소라고 유추하였고, 이러한 에너지의 감소가 미세입자에 의한 감도향상요인 중의 한가지라고 제의하였다.

• 센서학회지
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• 제5권5호
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• pp.47-54
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• 1996

$WO_{3}$모물질에 Pt와 $SnO_{2}$ 활성촉매를 첨가하여 수 ppm정도의 NOx를 감지할 수 있는 후막형 NOx센서를 제조하였다. 센서의 최대 감도는 $250^{\circ}C$정도에서 얻을 수 있었으나, 회복속도를 고려하여 $330^{\circ}C$에서 특성실험을 실시하였다. 기존의 $WO_{3}$를 사용한 것보다 감도, 반응 및 회복 속도가 개선되었고 또한 뛰어난 선택성과 기체흐름에 대한 안정성을 보여주었다. 농도변화에 대한 선형성이 우수하게 나타남으로 계측기에 응용가능성을 보여주었다.

• 제어로봇시스템학회논문지
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• 제10권3호
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• pp.205-215
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• 2004

The characteristic ratio assignment (CRA) method〔1〕 is new polynomial approach which allows to directly address the transient responses such as overshoot and speed of response time in time domain specifications. The method is based on the relationships between time response and characteristic ratios($\alpha_i$ ) and generalized time constant (T), which are defined in terms of coefficients of characteristic polynomial. However, even though the CRA can apply to developing a linear controller that meets good transient responses, there are still some fundamental questions to be explored. For the purpose of this, we have analyzed several sensitivities of a linear system with respect to the changes of coefficients itself and $\alpha_i$ of denominator polynomial. They are (i) the unnormalized root sensitivity : to determine how the poles change as $\alpha_i$ changes, and (ii) the function sensitivity to determine the sensitivity of step response to the change of o, and to analyze the sensitivity of frequency response as o, changes. As an other important result, it is shown that, under any fixed T and coefficient of the lowest order of s in denominator, the step response is dominantly affected merely by $\alpha_1, alpha_2 and alpha_3$ regardless of the order of denominator higher than 4. This means that the rest of the$\alpha_i$ s have little effect on the step response. These results provide some useful insight and background theory when we select $\alpha_i$ and T to compose a reference model, and in particular when we design a low order controllers such as PID controller.

• 대한전자공학회논문지
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• 제26권11호
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• pp.1691-1698
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• 1989

Gas sensing effects produced by adsorptive reaction between specimen surface and gases are expected to be influenced greatly by the state of the speimen surface. In this study, Co1-xMgxO ceramics oxygen sensors were prepared by pressing at 0.3-1.5ton/cm\ulcornerwith or without binder, intending to change porosity and average grain size on the surface purposely. The composition ratio of CoO to MgO was fixed at 1:1(mol.%). Microstructure of prepared Co0.5Mg0.5O ceramics were observed, the electrical properties and the sensitivity characteristics for oxygen gas were investigated in the device temperature range of 700-1000\ulcorner and for oxygen partical pressure range of 1-10**-4 atm. Temperature dependence of the resistivity of the specimen showed NTC behavior, average grain size increased and porosity decreased with increasing compaction pressure. The slope of the resistivity of the specimen on the oxygen partial pressure decreased with increasing average grain size and with decreasing porosity. Particularly, specimen pressed by 0.3 and 0.5 ton/cm\ulcornershowed the highest sensitivity to oxygen gas.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권7호
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• pp.293-297
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• 2003

Silicon dioxide (SiO$_2$) layers were fabricated on Si$_3$N$_4$/SiO$_2$/Si layer structures by low pressure chemical vapor deposition (LPCVD). Potassium and aluminum were then coimplanted by implanting potassium ions with the energy of 100 ［keY］ and dose of 5x10$^{16}$ [cm￣$^2$］ and 1x10$^{17}$ [cm￣$^2$］ into an aluminum buffer layer on the SiO$_2$Si$_3$N4/SiO$_2$/Si structure. The pH, pNa, and pK ion sensitivities of the resulting layers were investigated and compared to those of as-deposited silicon dioxide layer. The pK-sensitivity of the silicon dioxide was enhanced by the K and Al coimplantation. On the contrary, the pH and pNa-sensitivities of the coimplanted silicon dioxides were quite lower than that of the as-deposited silicon dioxide.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.464-467
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• 2002

$TiO_{2}-Co_{3}O_{4}$ humidity sensors were fabricated by conventional ceramic process and their humid sensing characteristics were investigated. The sample which was added 10wt% $Co_{3}O_{4}$ and heat-treated $1200^{\circ}C$ showed the highest sensitivity to humidity changes and improved a linearity. As $Co_{3}O_{4}$ content was increasing, the sensor consists a uniform pore distribution and grain in the surface. This was analyzed by SEM photographs.