• 대한기계학회논문집A
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• 제24권9호
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• pp.2167-2173
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• 2000

The HANARO (High-flux Advanced Neutron Application Reactor) has operated since 1995. The Cold Neutron(CN) hole was implanted in the reflector tank from the design stage. Before a vacuum chamber and a moderator cell for the cold neutron source are installed into the CN hole, it is necessary to measure the exact size of the inside diameter and thickness of the CN hole to prevent the interference problem. Due to inaccessibility and high radiation field in the CN hole, a mechanical measurement method is not permitted. The immersion ultrasonic technique is considered as the best method to measure the thickness and the diameter. The 4 axis manipulator of the 2 channel of a sensor module was fabricated. The transducer of 10 MHz results in 0.03 nun of resolution. The inside diameter and thickness for 550 points of the CN hole were measured using 2 channel ultrasonic sensors. The results showed that the thickness is in the range of 13-6.7 mm and inside diameter is in the range of o 156-165. These data will be a good reference in the design of a cold neutron source facility.

• 반도체디스플레이기술학회지
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• 제11권1호
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• pp.55-59
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• 2012

NOx is one of the toxin gases, which is mainly causing the optic-chemical smog phenomena, and decreasing in the function of nose and taste. Especially, NO is easily reacting with $O_3$, and then becoming the $NO_2$. $NO_2$ is mainly causing the acidulation rain. So, we should develop the NOx gas sensing system to detect NOx gas. In this paper, we present the microstructure and the NOx gas detecting properties of the nitrocellulose/MWCNT thin film coated by the air-spray on the glass substrate. The nitrocellulose/MWCNT-based gas sensors have been studied detecting NOx molecules of a ppm-level at the temperature range of $30{\sim}120^{\circ}C$. The resistance of the sensors decreases when the sensors are exposed to NOx gas. As a results, we obtained the nitrocellulose/MWCNT sensors with the sensitivity of 0.6%/sec under the 0.8 ppm of NOx gas concetration. Also, we get the activation energy of 0.202eV from the sensor for the 0.3 ppm of NOx gas concentration.

• 한국CDE학회논문집
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• 제21권1호
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• pp.20-30
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• 2016

Recently immersive virtual reality (VR) becomes popular due to the advanced development of I/O interfaces and related SWs for effectively constructing VR environments. In particular, natural and intuitive manipulation of 3D virtual objects is still considered as one of the most important user interaction issues. This paper presents a comparative study on the manipulation and interaction of 3D virtual objects using different interfaces and interactions in three VR environments. The comparative study includes both quantitative and qualitative aspects. Three different experimental setups are 1) typical desktop-based VR using mouse and keyboard, 2) hand gesture-supported desktop VR using a Leap Motion sensor, and 3) immersive VR by wearing an HMD with hand gesture interaction using a Leap Motion sensor. In the desktop VR with hand gestures, the Leap Motion sensor is put on the desk. On the other hand, in the immersive VR, the sensor is mounted on the HMD so that the user can manipulate virtual objects in the front of the HMD. For the quantitative analysis, a task completion time and success rate were measured. Experimental tasks require complex 3D transformation such as simultaneous 3D translation and 3D rotation. For the qualitative analysis, various factors relating to user experience such as ease of use, natural interaction, and stressfulness were evaluated. The qualitative and quantitative analyses show that the immersive VR with the natural hand gesture provides more intuitive and natural interactions, supports fast and effective performance on task completion, but causes stressful condition.

• 한국광학회지
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• 제17권1호
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• pp.54-59
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• 2006

본 논문에서는 집적 광학 광도파로 소자 기술을 적용하여 생화학 물질의 성분을 정밀하게 측정 가능한 광소자로서 폴리머 광도파로와 브래그 격자를 이용하는 구조를 최초로 제안하였다. 유효굴절률법과 전송행렬법을 이용하여 최적의 감도를 가지는 브래그 격자 광도파로를 설계하였으며 코아와 하부 클래딩의 굴절률이 각각 1.540, 1.430인 폴리머를 이용하여 코아 두께가 $3{\mu}m$ 인 구조의 반전립 광도파로를 제작하였다. 코아 층까지 완성된 도파로 위에 레이저 빔 간섭계와 플라즈마 에칭을 이용하여 격자를 형성한 뒤 격자표면에 20 nm 두께의 Au층을 증착하고 칼릭사린(calixarene) 단분자층을 만들어 바이오센서를 제작하였다. 제작된 광센서를 이용하여 PBS(phosphate bufferedsaline) 용액에 함유된 $K^+$의 농도에 따라 브래그 반사픽이 단파장으로 이동하는 것을 관찰할 수 있었다.

• 한국재료학회지
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• 제9권11호
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• pp.1083-1087
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• 1999

마그네트론 스퍼터로 알루미나 기판위에 $\textrm{SnO}_2$박막을 증착하여 증착온도, rf 전력, 공정기체 중 산소분율(O$_2$/Ar)등 공정변수에 따른 박막의 미세구조와 가스검지 특성을 조사하였다. 증착된 박막의 미세구조는 결정성이 없는 비정질 구조(A), 비정질 기지 중에 결정이 분산된 구조(A=P), 방향성이 거의 없는 다결정 구조(P), 미세 기둥구조(FC), 조대한 기둥구조(CC), 고밀도 특성을 보이는 섬유상 구조(Zone T)의 6가지로 분류되었다. 공정 중 산소를 첨가하지 않았을 때, 저온, 낮은 rf 전력에서 A 구조가, 저온, 높은 rf 전력에서 A+P 구조가, 고온, 높은 rf 전력에서 P 구조가 형성되었고, 산소 첨가 시는 낮은 rf 전력, 저온에서 FC 구조가, 낮은 rf 전력, 고온에서 CC 구조, 높은 rf 전력, 저온에서 Zone T 구조가 형성되었다. 위의 미세구조를 가진 박막들을 센서로 제작하여 $200^{\circ}C$, $300^{\circ}C$, $400^{\circ}C$에서 CO 가스에 대한 민감도를 측정한 결과$200^{\circ}C$에서는 감도가 나타나지 않으며, $300^{\circ}C$, $400^{\circ}C$에서는 FC 구조를 가진 센서가 다른 미세구조를 가진 센서에 비해 우수한 감도를 나타냈다. 이는 미세한 column 들로 이루어진 FC 구조의 높은 비표면적으로 인해 산소와 피검가스의 흡착이 많아지게 되고, 가스흡착에 의한 저항변화, 즉 감도가 높게 나타나는 것으로 판단된다.

• 분석과학
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• 제19권6호
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• pp.482-489
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• 2006

Pediococcus에서 추출된 lactate oxidase(LOD)를 poly(vinyl alcohol)(PVA)에 고정화하여 2전극계로 구성된 lactate 바이오센서를 제조하였다. Lactate는 LOD 효소와의 반응에서 생성되는 $H_2O_2$를 전기화학적으로 금(Au)위에 형성시킨 Pt-black 층에서 산화시켜 정량 할 수 있었다. Pt-black으로 만들어진 센서는 과산화수소에 대해서 낮은 전위(+300 mV vs. Ag/AgCl)에서 큰 산화전류를 보여주었으며, ascorbic acid, acetaminophen, uric acid 등과 같이 산화되기 쉬운 산화 종들의 영향을 감소시켜주었다. 외부보호막으로는 다양한 종류의 친수성 폴리우레탄을 사용하였다. 센서는 in vitro 방식으로 흐름계와 비흐름계 모두에서 성능을 평가하였다. 제작된 센서는 0.05 M NaCl을 포함하는 0.05 M 인산염 완충용액(pH 7.6)에서 성능을 시험하였으며, 0.1 mM에서 9.0 mM의 lactate 농도구간에서 직선적 감응성을 나타내었다. 최적화된 센서는 $4^{\circ}C$ 완충용액에 보관하였으며, 25일 이상 감응도(sensitivity)가 거의 변화하지 않았다.

• 센서학회지
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• 제6권1호
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• pp.63-71
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• 1997

ZnS:Mn/$ZnS:TbF_{3}$적층구조의 TFEL(thin-film eletroluminescent)소자를 제작하였으며, 이때 절연층으로 (Pb,La)$TiO_{3}$(이하PLT)와 $SiO_{2}$박막을 이용하였다. TFEL소자는 $78V_{rms}$의 문턱전압과 $100V_{rms}$의 인가전압에서 $400{\mu}W/cm^{2}$의 휘도를 나타내었다. TFEL소자의 발광스펙트럼은 450nm에서 630nm사이의 파장대를 보이고 있다. 제작된 TFEL소자는 컬러필터를 병용함으로서, 적 녹 청의 색상을 구현하는 TFEL소자로 활용할 수 있다.

• 센서학회지
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• 제5권5호
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• pp.47-54
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• 1996

$WO_{3}$모물질에 Pt와 $SnO_{2}$ 활성촉매를 첨가하여 수 ppm정도의 NOx를 감지할 수 있는 후막형 NOx센서를 제조하였다. 센서의 최대 감도는 $250^{\circ}C$정도에서 얻을 수 있었으나, 회복속도를 고려하여 $330^{\circ}C$에서 특성실험을 실시하였다. 기존의 $WO_{3}$를 사용한 것보다 감도, 반응 및 회복 속도가 개선되었고 또한 뛰어난 선택성과 기체흐름에 대한 안정성을 보여주었다. 농도변화에 대한 선형성이 우수하게 나타남으로 계측기에 응용가능성을 보여주었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.464-464
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• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• 센서학회지
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• 제32권3호
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• pp.140-146
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• 2023

Water quality is crucial for human health and the environment. Accurate measurement of the quantity of organic carbon in water is essential for water quality evaluation, identification of water pollution sources, and appropriate implementation of water treatment measures. Total organic carbon (TOC) analysis is an important tool for this purpose. Although other methods, such as chemical oxygen demand (COD) and biochemical oxygen demand (BOD) are also used to measure organic carbon in water, they have limitations that make TOC analysis a more favorable option in certain situations. For example, COD requires the use of toxic chemicals, and BOD is time-consuming and can produce inconsistent and unreliable results. In contrast, TOC analysis is rapid and reliable, providing accurate measurements of organic carbon content in water. However, common methods for TOC analysis can be complex and energy-intensive because of the use of high-temperature heaters for liquid-to-gas phase transitions and the use of acid, which present safety risks. This study focuses on a TOC analysis method using TiO₂ photocatalysis, which has several advantages over conventional TOC analysis methods, including its low cost and easy maintenance. For TiO₂, rutile and anatase powders are mixed with an inorganic binder and spray-coated onto a glass fiber substrate. The TiO₂ powder and inorganic binder solutions are adjusted to optimize the photocatalytic reaction performance. The TiO₂ photocatalysis method is a simple and low-power approach to TOC analysis, making it a promising alternative to commonly used TOC analysis methods. This study aims to contribute to the development of more efficient and cost-effective approaches for water quality analysis and management by exploring the effectiveness and reliability of the developed equipment.