• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.246-246
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• 1999

TFT-LCD 제조공정의 발전에 따라, 박막층(a-Si, SiNx, gate 전극, ITO 등)에 대한 습식공정을 대치하는 건식식각이 선호되고 있다. scan signal의 전파지연시간을 단축시키는 장점을 갖는 Al gate 전극의 건식식각의 경우, 높은 식각속도와 slope angle의 조절, 그리고 식각균일도가 요구된다. 이러한 Al gate 전극물질로는 Al에 Ti이나 Nd와 같은 금속을 첨가하여 post annealing 동안에 발생하는 hillock을 방지하고 더불어 낮은 resistivity(<10$\mu$$\Omega$cm)와 열과 부식에 대한 높은 저항성을 얻을 수 있다. 그러나 Al-Nd alloy 박막은 식각속도와 photoresist에 대한 식각선택도가 낮아 문제로 지적되고 있다. 본 실험에서는 고밀도 플라즈마원의 일종인 자화된 고밀도 유도결합형 플라즈마를 이용하여 식각가스 조합, inductive power, bias voltage 그리고 공정압력 등의 다양한 공정변수에 따른 Al-Nd film의 기본적인 식각특성 변화를 관찰하였다. 식각시 chloring gas를 주요 식각가스로 사용하고 BCl, HBr 등을 10mTorr의 일정한 압력을 유지하는 조건하에서 첨가하였으며 inductive power는 5100W~800W, bias voltage는 -50V~-200V까지 변화를 주었다. 식각공정의 전후를 통하여 Al-Nd 박막표면의 조성변화를 관찰하기 위하여 X-ray photoelectron spectroscopy(XPS)를 이용하였으며 공정변수에 따른 식각후 profile 관찰은 scanning electron microscopy(SEM)을 통하여 관찰하였다. Al-Nd 식각속도는 100% Cl2 플라즈마에 비해 BCl3의 양이 증가할수록 증가하였으며 75%의 BCl3 gas를 첨가하였을 때 가장 높은 식각속도를 얻을 수 있었다. 또한 SEM을 이용한 표면분석으로 roughness가 감소된 공정조건을 찾을 수 있었다.

• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2017년도 춘계학술논문요약집
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• pp.71-72
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• 2017

• 한국환경과학회지
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• 제29권11호
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• pp.1025-1032
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• 2020

This work was performed to develop a dip injection wet scrubber (DIWS) system with chlorine dioxide as the oxidant. The exhaust pollutants from a lime kiln of paper-mill were introduced to the system. When NaClO₃ was used to oxidize NO into NO₂, the oxidation was unsatisfactory and the combination of HNO₃ or H₂SO₄ was required for 100% oxidation. ClO₂ is recommended to oxidize NO and SO₂ effectively. With the combination of 1^st stage of DIWS and ClO₂, 57.1% of NOx and 98% of SO₂ were effectively removed. In the case of 2^nd stage of DIWS and ClO₂, 93.5% of NOx and 99% of SO₂ were removed. The ClO₂+DIWS process was superior to the ClO₂+Scrubber process in terms of investment, running cost and NOx removal efficiency.

• Bulletin of the Korean Chemical Society
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• 제28권11호
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• pp.2009-2014
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• 2007

The aminolysis of diphenyl thiophosphinic chloride (2) with substituted anilines in acetonitrile at 55.0 oC is investigated kinetically. Kinetic results yield large Hammett ρX (ρnuc = ?3.97) and Bronsted βX (βnuc = 1.40) values. A concerted mechanism involving a partial frontside nucleophilic attack through a hydrogen-bonded, four-center type transition state is proposed on the basis of the primary normal kinetic isotope effects (kH/kD = 1.0-1.1) with deuterated aniline (XC6H4ND2) nucleophiles. The natural bond order charges on P and the degrees of distortion of 42 compounds: chlorophosphates [(R1O)(R2O)P(=O)Cl], chlorothiophosphates [(R1O)(R2O)P(=S)Cl], phosphonochloridates [(R1O)R2P(=O)Cl], phosphonochlorothioates [(R1O)R2P(=S)Cl], chlorophosphinates [R1R2P(=O)Cl], and chlorothiophosphinates [R1R2P(=S)Cl] are calculated at the B3LYP/ 6-311+G(d,p) level in the gas phase.

• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2017년도 추계학술논문요약집
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• pp.73-73
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• 2017

Pyroprocessing at KAERI (Korea Atomic Energy Research Institute) consists of pretreatment, electroreduction, electrorefining and electrowinning. SFR (Sodium Fast Reactor) fuel is prepared from the electrowinning process which is composed of LCC (Liquid Cadmium Process) and Cd distillation et al. LCC is an electrochemical process to obtain actinides from spent fuel. In order to recover actinides inert anodes such as carbon material are used, where chlorine gas ($Cl_2$) evolves on the surface of the carbon material. And, stainless steel (SUS) crucible should be installed in large-scale electrowinning system. Therefore, the effect of chlorine on the SUS material needs to be studied. LiCl-KCl-$UCl_3$-$NdCl_3$-$CeCl_3$-$LaCl_3$-$YCl_3$ salt was contained in 2 kinds of electrolytic crucible having an inner diameter of 5cm, made of an insulated alumina and an SUS, respectively. And, three kinds of electrodes such as cathode, anode, reference were used for the electrochemical experiments. Both solid tungsten (W) and LCC were used as cathodes. Cd of 45 g as the cathode material was contained in alumina crucibles for the deposition experiments, where the crucible has an inner diameter of 3 cm. Glassy carbon rod with the diameter of 0.3 cm was employed as an anode, where shroud was not used for the anode. A pyrex tube containing LiCl-KCl-1mol% AgCl and silver (Ag) wire having a diameter of 0.1cm was used as a reference electrode. Electrodeposition experiments were conducted at $500^{\circ}C$ at the current densities of $50{\sim}100mA/cm^2$. In conclusion, Fe ions were produced in the salt during the electrodeposition by the reaction of chlorine evolved from the anode and Fe of the SUS crucible and thereby LCC system using SUS crucible showed very low current efficiencies compared with the system using the insulated alumina crucible. Anode shroud needs to be installed around the glassy carbon not to influence surrounding SUS material.

• Nuclear Engineering and Technology
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• 제44권7호
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• pp.767-772
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• 2012

In support of optimizing electrorefining technology for treating spent nuclear fuel, lithium drawdown has been investigated for separating actinides from molten salt electrolyte. Drawdown reaction selectivity is a major issue that requires investigation, since the goal is to remove actinides while leaving the fission products and other components in the salt. A series of lithium drawdown tests with surrogate fission product chlorides was run to obtain selectivity data with non-radioactive salts, develop a predictive model, and draw conclusions about the viability of using this process with actinide-loaded salt. Results of tests with CsCl, $LaCl_3$, $CeCl_3$, and $NdCl_3$ are reported here. Equilibrium was typically achieved in less than 10 hours of contact between lithium metal and molten salt under well-stirred conditions. Maintaining low oxygen and water impurity concentrations (<10 ppm) in the atmosphere was observed to be critical to minimize side reactions and maintain stable salt compositions. An equilibrium model has been formulated and fit to the experimental data. Good fits to the data were achieved. Based on analysis and results obtained to date, it is concluded that clean separation between minor actinides and lanthanides will be difficult to achieve using lithium drawdown.

• 대한화학회지
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• 제34권6호
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• pp.561-568
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• 1990

수용액에서 가벼운 란탄족 금속이온의 전기화학적 거동을 직류 폴라로그래피, 펄스차이 폴라로그래피 및 순환 전압전류법으로 연구하였다. La$^{3+}$, Pr$^{3+}$ 및 Nd$^{3+}$의 환원은 0.1 M LiCl 지지전해질에서 3전자가 관여하는 비가역적인 반응이었다. Sm$^{3+}$의 환원은 0.1 M TMAI 지지전해질에서 1전자에 이어 2전자가 관여하는 비가역적인 반응이었으며, Eu$^{3+}$의 환원은 0.1 M LiCl 지지전해질에서 1전자에 이어 2전자가 관여하는 유사가역반응 및 비가역반응이었다. 펄스차이 폴라로그래피에 의하면 pH 4 이하에서는 수소이온의 촉매효과에 의하여 가수분해된 란탄족 금속이온 (Ln(OH)$^{2+}$)은 란탄족 금속이온(Ln$^{3+}$)보다 양전위에서 환원되었으며, 봉우리 전류의 크기는 Eu$^{3+}$ < Sm$^{3+}$ < Nd$^{3+}$ < Pr$^{3+}$ < La$^{3+}$ 순으로 증가하였다. 순환 전압전류법에서 주사속도 변화에 대한 전류함수의 크기는 [H$^{+}$]/[Ln$^{3+}$]의 비에 의존하였으며, pH 및 란탄족 금속이온의 농도가 낮을수록 수소이온에 의한 반응 또는 촉매전류가 증가하였다.

• 한국표면공학회지
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• 제41권2호
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• pp.57-62
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• 2008

Electrochemical properties of Ti-30Ta-$(3{\sim}15)$Nb alloys coated by HA/Ti compound layer have been studied by various electrochemical method. Ti-30Ta binary alloys contained 3, 7, 10, and 15 wt% Nb contents were manufactured by the vacuum furnace system. The specimens were homogenized for 24 hrs at $1000^{\circ}C$. The samples were cut and polished for corrosion test and coating. It was coated with HA/Ti compound layer by magnetron sputter. The HA/Ti non-coated and coated morphology of Ti alloy were analyzed by x-ray diffractometer(XRD) and filed emission scanning electron microscope(FE-SEM). The corrosion behaviors were investigated using potentiodynamic method in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. The homoginazed Ti-30Ta-$(3{\sim}15wt%$)Nb alloys showed the ${\alpha}+{\beta}$ phase, and ${\beta}$ phase peak was predominantly appeared with increasing Nb content. The microstructure of Ti alloy was transformed from needle-like structure to equiaxed structure as Nb content increased. HA/Ti composite surface showed uniform coating layer with 750 nm thickness. The corrosion resistance of HA/Ti composite coated Ti-alloys were higher than those of the non-coated samples in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. Especially, corrosion resistance of Ti-Ta-Nb system increased as Nb content increased.

• 한국표면공학회지
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• 제41권5호
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• pp.181-188
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• 2008

A.C. impedance properties of HA/Ti compound layer coated Ti-30Ta-($3{\sim}15$)Nb alloys have been studied by electrochemical method. Ti-30Ta binary alloys contained 3, 7, 10 and 15 wt% Nb were manufactured by the vacuum furnace system. And then specimen was homogenized at $1000^{\circ}C$ for 24 hrs. The sample was cut and polished for corrosion test and coating. It was coated with HA/Ti compound layer by magnetron sputter. The non-coated and coated morphology of Ti alloy were analyzed by X-ray diffractometer (XRD), energy X-ray dispersive spectroscopy (EDX) and filed emission scanning electron microscope (FE-SEM). The corrosion behaviors were investigated using A.C. impedance test (PARSTAT 2273, USA) in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. Ti-30Ta-($3{\sim}15\;wt%$)Nb alloys showed the ${\alpha}+{\beta}$ phase, and $\beta$ phase peak was predominantly appeared in the case of increasingly Nb contents. The microstructures of Ti alloy were transformed from needle-like structure to equiaxed structure as Nb content increased. From the analysis of coating surface, HA/Ti composite surface uniformed coating layer with 750 nm thickness. The growth directions of film were (211), (112), (300) and (202) for HA/Ti composite coating on the surface after heat treatment at $550^{\circ}C$, whereas, the growth direction of film was (110) for Ti coating. The polarization resistance ($R_p$) of HA/Ti composite coated Ti-alloys were higher than those of the Ti and HA coated samples in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. Especially, corrosion resistance of Ti-Ta-Nb system increased as Nb content increased.

• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2011년도 춘계학술논문요약집
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• pp.73-74
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• 2011