• 센서학회지
• /
• 제7권5호
• /
• pp.372-376
• /
• 1998

기능성 소자 응용을 위한 다양한 박막을 성장시키기 위하여 PLD(Pulsed Laser Deposition) 장치를 제작 개발하였다. 이 PLD 장치를 이용하여 $NbS_2$ 박막을 $Al_2O_3$(012) 기판과 Si(111) 기판 위에 성장시켰다. 결정성 박막의 성장조건을 조사하기 위하여 기판온도를 실온${\sim}600^{\circ}C$, 타겟의 성분비(S/Nb)를 $2.0{\sim}5.25$로 변화시켰다. XRD 패턴으로부터 기판온도가 $600^{\circ}C$이고 타겟의 성분비가 4.0일 때 c-축 배향을 나타내는 양호한 결정성의 $NbS_2$박막이 성장되었다. Si(111) 기판 위보다 $Al_2O_3$(012) 기판 위에서 보다 양질의 $NbS_2$ 박막이 성장되었음을 알 수 있었다.

• 한국재료학회지
• /
• 제22권12호
• /
• pp.696-700
• /
• 2012

(Na, K) $NbO_3$ thick film was successfully achieved using a sol-gel coating process with the addition of polyvinylpyrrolidone (PVP) to a metal alkoxide solution. The transparent coating solution, mixed with Nb:PVP = 1:1 in a molar ration, was synthesized by evaporating the solvent to over 62.5 wt%. Additive PVP increased the viscosity of the solution so that the coating thickness could be enhanced. The thickness of the (Na, K) $NbO_3$ film assisted by PVP was ca. 320 nm at the time of deposition; this value is four times thicker than that of the sample fabricated without PVP. Also, due to PVP binding with the OH groups of the metal alkoxide, the condensation reaction in the film was suppressed. The crystalline size of the (Na, K) $NbO_3$ films assisted by PVP was ca. 15 nm smaller than that of the film fabricated without PVP. After the sintering process at $700^{\circ}C$, the (Na, K) $NbO_3$ films were mainly composed of randomly oriented (Na, K) $NbO_3$ phase of perovskite crystal structure, including a somewhat secondary phase of $K_2Nb_4O_{11}$. However, by adding PVP, the content of the secondary phase became quite smaller than that of the sample without PVP. It was thought that the addition of PVP might have the effect of restraining the loss of potassium and that PVP could hold metalloxane by strong hydrogen bonding before complete decomposition. Therefore, the film thickness of the (Na, K) $NbO_3$ films could be considerably advanced and made more crack-free by the addition of PVP.

• 한국표면공학회지
• /
• 제54권2호
• /
• pp.96-101
• /
• 2021

NaNbO₃:Eu³⁺ phosphor thin films were grown on quartz substrates by radio-frequency magnetron sputtering at a growth temperature of 100 ℃, with subsequent annealing at temperatures of 800, 900, and 1000 ℃. The effects of annealing temperature on the structural, morphological, and optical properties of the thin films were investigated. The NaNbO₃:Eu³⁺ sputtering target was synthesized by a solid-state reaction of raw materials Na₂CO₃, Nb₂O₅, and Eu₂O₃. The X-ray diffraction patterns exhibited that the thin films had two mixed phases of NaNbO₃ and Eu₂O₃. Surface morphologies were investigated by using field emission-scanning electron microscopy and indicated that the grains of the thin film annealed at 1000 ℃ showed irregular shapes with an average size of approximately 300 nm. The excitation spectra of Eu³⁺-doped NaNbO₃ thin film consisted of a strong charge transfer band centered at 304 nm in the range of 240-350 nm and two weak peaks at 395 and 462 nm, respectively, resulting from the ⁷F₀→⁵L₆ and ⁷F₀→⁵H₂ transitions of Eu³⁺ ions. The emission spectra under excitation at 304 nm exhibited an intense red band centered at 614 nm and two weak bands at 592 and 681 nm. As the annealing temperature increased from 800 ℃ to 1000 ℃, the intensities of all the emission bands and the band gap energies gradually increased. These results indicate that the higher annealing temperature enhance the luminescent properties of NaNbO₃:Eu³⁺ thin films.

• JSTS:Journal of Semiconductor Technology and Science
• /
• 제17권2호
• /
• pp.245-251
• /
• 2017

Niobium doped zirconium oxide (Nb-Zr-O:NZO) thin films were fabricated on Si substrates by a sol-gel technique with an annealing temperatures of $500{\sim}1000^{\circ}C$ in air ($N_2:O_2=3:1$) for 20 minutes. It was found that the NZO film is based on tetragonal $ZrO_2$ polycrystalline structure with the Nb 5+ ion state and there is almost no diffusion of Nb or Zr to Si substrate. The relative dielectric constant for the NZO film with the Nb composition of 30 mol% and annealed at $800^{\circ}C$ was around 40. The root mean roughness was 1.02 nm. In addition, the leakage current of NZO films was as low as $10^{-6}A/cm^2$ at 4.4 V.

• 한국광학회지
• /
• 제13권2호
• /
• pp.105-112
• /
• 2002

전자총을 사용하여 증착한 보통(conventional) Nb$_2$O$_{5}$ 박막과 Ar 이온빔 보조 증착(ion beam assisted deposition, IBAD)한 Nb$_2$O$_{5}$ 박막의 광학적, 물리적 특성을 조사하여 IBAD의 효과에 대해 연구하였다. IBAD Nb$_2$O$_{5}$ 박막과 보통 Nb$_2$O$_{5}$ 박막의 진공-공기간 반사 스펙트럼과 박막 단면의 SEM 측정 결고, IBAD Nb$_2$O$_{5}$ 박막은 보통 박막에 비해 조밀한 박막으로 증착되었으며, 분광 광도계를 이용하여 포락선 방법으로 구한 IBAD Nb$_2$O$_{5}$ 박막의 평균 굴절률은 보통 Nb$_2$O$_{5}$ 박막 보다 증가하고, 소멸계수는 감소하였다. 이는 IBAD에 의한 이온빔 충격으로 Nb$_2$O$_{5}$ 박막의 미세구조가 변화하여 조밀도가 증가하였기 때문으로 판단된다. 주입 산소 양이 증가함에 따라 IBAD Nb$_2$O$_{5}$ 박막과 보통 Nb$_2$O$_{5}$ 박막의 평균 굴절률과 소멸계수는 모두 감소하는 경향을 보였으며, IBAD Nb$_2$O$_{5}$ 박막은 이온빔 전류 밀도가 증가함에 따라 평균 굴절률이 증가하였다. 보통 Nb$_2$O$_{5}$ 박막과 IBAD Nb$_2$O$_{5}$ 박막은 모두 불균일 굴절률을 나타냈으며, IBAD Nb$_2$O$_{5}$ 박막은 이온빔 전류 밀도가 증가할수록 굴절률의 불균일도는 증가하였다. 증착된 Nb$_2$O$_{5}$ 박막은 XRD 측정 결과 모두 비정질이었으며, IBAD에 의해 박막의 결정 구조는 변하지 않았다.

• 센서학회지
• /
• 제27권1호
• /
• pp.1-5
• /
• 2018

Two-dimensional (2D) niobate-based nanosheets have attracted attention as high-k dielectric materials. We synthesized strontiumsubstituted calcium niobate ($Ca_{0.8}Sr_{1.2}Nb_3O_{10}$) nanosheets by a two-step cation exchange process from $KCa_{0.8}Sr_{1.2}Nb_3O_{10}$ ceramic. The $K^+$ ions were exchanged with $H^+$ ions, and then H+ ions were exchanged with tetrabutylammonium ($TBA^+$) cations. The $Ca_{0.8}Sr_{1.2}Nb_3O_{10}$ nanosheets were then exfoliated, decreasing the electrostatic interaction between each niobate layer. Furthermore, $Ca_2Nb_3O_{10}$ nanosheets were synthesized in same process for comparison. Each exfoliated nanosheet shows a single-crystal phase and has a lateral size of over 100 nm. The nanosheets were deposited on a $Pt/Ti/SiO_2/Si$ substrate by the electrophoretic deposition (EPD) method at 40 V, followed by ultraviolet irradiation of the films in order to remove the remaining $TBA^+$ ions. The $Ca_{0.8}Sr_{1.2}Nb_3O_{10}$ thin film exhibited twice the dielectric permittivity (~60) and lower dielectric loss than $Ca_2Nb_3O_{10}$ thin films.

• 한국세라믹학회지
• /
• 제41권1호
• /
• pp.9-12
• /
• 2004

The effect of x wt% CuO-y wt% $V_2O_5$ content on the microwave properties of $(Pb_{0.45}Ca_{0.55})[(Fe_{0.5}Nb_{0.5})_{0.9}Sn_{0.1}]O_3$ (PCFNS) ceramics was investigated. In order to decrease the sintering temperature and use as a Low Temperature co-firing Ceramics (LTCC), CuO-$V_2O_5$ are added in the PCFNS. The bulk density, dielectric constant (${\varepsilon}_r$) and quality factor(Q${\cdot}f_0$) increased with increase in CuO content within a limited value. The microwave properties were degraded with increases in $V_2O_5$ content. The temperature coefficient of the resonant frequency (${\tau}_f$) of PCFNS was shifted to positive value abruptly with increasing the $V_2O_5$ content, while the ${\tau}_f$ was slightly shifted to positive value with increasing the CuO content. The optimized microwave properties, ${\varepsilon}_r$ = 88, Q${\cdot}f_0$ = 6100 (GHz), and ${\tau}_f$ = 18 ppm/$^{\circ}C$, were obtained in $(Pb_{0.45}Ca_{0.55})[(Fe_{0.5}Nb_{0.5})_{0.9}Sn_{0.1}]O_3$ with 0.2wt% CuO 0.05 wt% $V_2O_5$ and sintered at $1000^{\circ}C$ for 3 h. The relationship between the microstructure and microwave dielectric properties of ceramics was studied by X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM)

• 한국광학회지
• /
• 제14권6호
• /
• pp.657-662
• /
• 2003

SiO$_2$ 박막형 음향파 도파로와 Hamming 가중결합 구조를 이용하여 1550nm 파장대역에서 동작하는 음향광학형 2${\times}$2 Ti:LiNbO$_3$ 광 삽입/분기 멀티플렉서를 구현하였다 제안된 소자는 두 개의 입ㆍ출력 광도파로, 두 개의 편광모드분리기와 음향광학형 편광모드 변환기로 구성되었다. 제작된 소자의 삽입손실은 -7 ㏈로 측정되었으며, ∼32 ㎽ RF 구동 파워에서 -l9 ㏈ 의 부 모드 레벨이 측정되었다. 삽입/분기 동작 특성을 확인하였으며, 3 ㏈ 통과대역폭과 tuning rate는 ∼l.5 mm, 8.1 nm/MHz 로 각각 측정되었다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2000년도 하계학술대회 논문집
• /
• pp.743-746
• /
• 2000

Metal-ferroelectric-insulator-semiconductor(MFIS) devices using Pt/$LiNbO_3$/Si structure were successfully fabricated. The dielectric constant of the AIN film calculated from the capacitance in the accumulation region in the capacitance-voltage(C-V) curve was about 8.2. The gate leakage current density of MIS devices using a aluminum electrode showed the least value of 1$\times$$1O^{-8}$A/$cm^2$ order at the electric field of 500kV/cm. The dielectric constant of $LiNbO_3$film on AIN/Si structure was about 23 derived from 1MHz capacitance-voltage (C-V) measurement and the resistivity of the film at the field of 500kV/cm was about 5.6$\times$ $1O^{13}$ $\Omega$.cm.

• 한국재료학회지
• /
• 제13권5호
• /
• pp.317-322
• /
• 2003

Bismuth layered structure ferroelectric thin films, $Bi_4$$Ti_3$$O_{12}$ / (BTO) and Nb-doped BTO (BTN) were prepared on the Pt(111)/Ti/$SiO_2$/Si(100) substrates by a sol-gel route. We investigated the Nb-doping effect on the grain orientation and ferroelectric properties. $Nb^{5＋}$ ion substitution for $Ti^{4＋}$ ion in perovskite layers of BTO decreased the degree of c-axis orientation and increased the remanent polarization (2Pr). The fatigue resistance of Nb-doped BTO thin film was shown to be superior to that of BTO, and the leakage current of Nb-doped BTO thin film was decreased about 1 order of magnitude compared with BTO. The improvement of ferroelectric properties with $Nb^{5＋}$ doping in BTO could be attributed to the changes in space charge densities and grain orientation in the thin film.