• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.253.1-253.1
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• 2014

Plasma technology has been widely used for decontamination, differentiation, and disease treatment. Recently, studies show that plasma has effects on increasing seed germination and plant growth. In spite of increasing number of studies about plasma effects, the interaction between plasma and plants has been rarely informed. In this study, we have analyzed the effects of nonthermal atmospheric pressure plasma on seed germination and growth of coriander (Coriandum sativum), a medicinal plant. We used to Ar, air, and N2 plasma on seed as feeding gases. Plasma was discharged at 0.62 kV, 200 mA, 9.2 W. Seed germination was increased over time when treated with N2 based DBD plasma for exposure times of 30 seconds and 1 minute, everyday. After 7 days, about 80~100% of seeds were germinated in the treatment with N2 based DBD plasma, compared to control (about 40%, only gas treated seeds). In order to elucidate the mechanism of increased germination, we have analyzed characteristics of changes in plant hormones and seed surface structure by SEM.

• 한국표면공학회지
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• 제55권2호
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• pp.77-83
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• 2022

Nanocrystalline MoN coatings were prepared by inductively coupled plasma magnetron sputtering (ICPMS) changing the plasma power from 0 W to 200 W. The properties of the coatings were analyzed by x-ray diffraction, field emission scanning electron microscopy, atomic force microscopy, nanoindentation tester and semiconductor characterization system. As the ICP power increases, the crystal structure of the MoN coatings changed from a mixed phase of γ-Mo₂N and α-Mo to a single phase γ-Mo₂N. MoN coatings deposited by ICPMS at 200 W showed the most compact microstructure with the highest nanoindentation hardness of 27.1 GPa. The electrical resistivity of the coatings decreased from 691.6 μΩ cm to 325.9 μΩ cm as the ICP power increased.

• 한국세라믹학회지
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• 제41권6호
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• pp.435-438
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• 2004

MOCVD is one of the major deposition techniques for Cu thin films and Ta-Si-N is one of promising barrier metal candidates for Cu with high thermal stability. Effects of hydrogen plasma pretreatment of the underlying Ta-Si-N film surface on the Cu nucleation in Cu MOCVD were investigated using scanning electron microscopy, X-ray photoelectron spectroscopy and Auger electron emission spectrometry analyses. Cu nucleation in MOCVD is enhanced as the rf-power and the plasma exposure time are increased in the hydrogen plasma pretreatment. The optimal plasma treatment process condition is the rf-power of 40 Wand the plasma exposure time of 2 min. The hydrogen gas flow rate in the hydrogen plasma pretreatment process does not affect Cu nucleation much. The mechanism through which Cu nucleation is enhanced by the hydrogen plasma pretreatment of the Ta-Si-N film surface is that the nitrogen and oxygen atoms at the Ta-Si-N film surface are effectively removed by the plasma treatment. Consequently the chemical composition was changed from Ta-Si-N(O) into Ta-Si at the Ta-Si-N film surface, which is favorable for Cu nucleation.

• 전자공학회논문지 IE
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• 제44권2호
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• pp.8-13
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• 2007

본 논문에서는 고효율의 유기발광소자 제작을 위해 플라즈마 조건 변화에 따른 ITO 특성을 분석하였다. $N_2$와 $O_2$ 가스로 RF 플라즈마 출력은 100 W, 200 W, 400 W로 가스압력은 12 mTorr, 120 mTorr로 변화실험을 하였다. $N_2$ 가스를 이용하여 플라즈마 처리한 ITO의 일함수는 $4.88{\sim}5.07$ eV의 값을 나타내었고 $O_2$ 가스를 이용하여 플라즈마 처리한 ITO는 $4.85{\sim}4.97$ eV의 일함수를 나타내었다. $N_2$ 가스에서 가스의 압력이 120 mTorr이면서 플라스마 출력이 200 W의 조건에서 RF 플라즈마 처리한 ITO의 특성이 우수하였다. ITO 표면의 rms roughness는 AFM 이미지에서 계산하여 나타낸 수치로써 $N_2$와 $O_2$ 가스가 주입된 플라즈마로 처리된 ITO는 플라즈마 출력이 200 W일 때 각각 $25.2\;{\AA}$과 $30.5\;{\AA}$로 나타났으며 플라즈마 처리되지 않은 ITO는 $44.5\;{\AA}$이었다. ITO 박막의 투과율 측정에서는 $N_2$와 $O_2$ 가스의 압력을 변화시켜도 ITO의 투과율은 거의 변동이 없었다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.551-552
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• 2006

Plasma-induced charging damage was been measured during TaN gate electrode of MISFET(TaN/$HfO_2$/Si) or interconnection metal etching step using large antenna structures. The results of these experiments were obtained that $HfO_2$ gate dielectric layer was affected about plasma charging effects and damage increased with F-N tunneling. Therefore, the etching conditions should be optimized to avoid the defects caused by plasma charging.

• Transactions on Electrical and Electronic Materials
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• 제12권4호
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• pp.144-147
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• 2011

In this work, we present a study regarding the etching characteristics on titanium nitride (TiN) thin films using an inductively coupled plasma system. The TiN thin film was etched using a $N_2/BCl_3$/Ar plasma. The studied etching parameters were the gas mixing ratio, the radio frequency (RF) power, the direct current (DC)-bias voltages, and the process pressures. The baseline conditions were as follows: RF power = 500 W, DC-bias voltage = -150 V, substrate temperature = $40^{\circ}C$, and process pressure = 15 mTorr. The maximum etch rate and the selectivity of the TiN to the $SiO_2$ thin film were 62.38 nm/min and 5.7, respectively. The X-ray photoelectron spectroscopy results showed no accumulation of etching byproducts from the etched surface of the TiN thin film. Based on the experimental results, the etched TiN thin film was obtained by the chemical etching found in the reactive ion etching mechanism.

• Asian-Australasian Journal of Animal Sciences
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• 제22권9호
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• pp.1248-1255
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• 2009

This study was carried out to evaluate the fatty acid composition in Nellore cows supplemented with either linseed (n-3) or canola grains (n-6 and n-9). Fifteen Nellore cows, aged five years and bodyweight 550 kg${\pm}$48 kg, were randomly distributed to the following treatments: CON (control), LIN (linseed) and CAN (canola grains). The cows were fed for 80 days. The concentrations of C18:0, C18:2 n-6 and C20:3 n-6 fatty acid were higher (p<0.10) in CON blood plasma in comparison to follicular liquid. Likewise, PUFA, n-6 contents, PUFA:SFA and n-6:n-3 ratios were higher (p<0.10) in blood plasma. On the other hand, C18:1 n-9, C22:5 n-3, MUFA and n-3 contents were lower (p<0.10) in blood plasma. C18:0, C18:2 n-6, C18:3 n-3, C22:5 n-3, PUFA, n-6, n-3 contents and PUFA:SFA ratio were higher (p<0.10) in LIN blood plasma than in the follicular liquid. Nevertheless, C14:0, C16:0, C16:1 n-7, PUFA, C16:0, C18:1 n-9 and MUFA contents were lower (p<0.10) in LIN blood plasma. On treatment CAN, the C18:0 and SFA contents, and n-6:n-3 ratios were higher (p<0.10) in blood plasma. However, C20:3 n-6, C22:5 n-3, PUFA and n-3 contents were lower (p<0.10) in blood plasma. C16:0, C18:0, PUFA, SFA contents and PUFA:SFA ratio did not differ (p>0.10) among the treatments. C14:0, C16:1 n-7, C18:2 n-6 and n-6 contents were higher (p<0.10) for CON and CAN than LIN. C17:1 n-7, C20:4 n-6 and C 22:0 contents were higher (p<0.10) for CAN than CON and LIN. C18:1 n-9, C18:3 n-3, MUFA and n-3 contents were higher (p<0.10) for LIN and CAN than CON. C20:3 n-6 content and n-6:n-3 ratio were higher (p<0.10) for CON than LIN and CAN. C22:5 n-3 content were higher (p<0.10) for CON and LIN than CAN. The concentrations of fatty acids in blood plasma and follicular liquid were not correlated for any fatty acid, independent of the treatment studied. Canola grain added to the diet of Nellore cows resulted in increased concentrations of fatty acids n-6 and n-3 in follicular liquid.

• Journal of Nutrition and Health
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• 제27권7호
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• pp.687-698
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• 1994

The effects of age and dietary fatty acid composition on lipid metabolism were investigated in Sprague-Dawley strain male rats. These animals weighing 88.6$\pm$2.2g were fed 10% dietary fat(W/W, 20% of total energy) with 0.5, 1, 2 P/S ratio and in each P/S ratio there were three different levels of n-6/n-3 fatty acid ratio ; 2, 4, 8. The experimental period was 1 month, 6 months and 12 months. The results of this study were as follows. The body weight of rats increased rapidly for the first two months, then increased slowly until 7 to 8 months. After 10 months of dietary regimen their weight decreased. The weight of liver, kidney and epidydimal fat pad increased along with the body weight and then decreased in the 12 months. Plasma total lipid increased with age and it decreased significantly when P/S ratio of dietary fatty acid was high. In creased with age and it decreased significantly when P/S ratio of dietary fatty acid was high. In creasing n-3 fatty acid intake in each P/S ratio resulted in lower plasma total lipid although was not statistically significant. The amount of plasma total cholesterol increased at 6 months, but decreased at 12 months. In case of 1, 12 months, increasing P/S ratio significantly plasma total cholesterol and LDL-cholesterol were decreased and hepatic cholesterol was increased, VLDL-HDL-cholesterol did not changed. The n-6/n-3 ratio did not affect any of theses. The amount of plasma triglyceride and VLDL-triglyceride increased at 6 month then decreased. When the rats consumed higher amount of n-3 fatty acid in each P/S ratio, their plasma triglyceride and hepatic triglyceride increased at 1, 12months.

• Journal of Nutrition and Health
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• 제23권7호
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• pp.477-491
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• 1990

To observe the effect of dietary n6 linoleic acid, n6 gamma-linolenic acid and n3 alphalinolenic acid aon plasma lipid composition and platelet aggregation, twenty college women were divided into 4 groups and treated for 2 weeks with experimental diets supplying fat at 23% cal which were different only in fatty acid composition. Dietary fat was corn oil(CO) as a source of n6 linoleic acid(LA), perilla oil(PO) for n3 alpha-linolenic acid(ALA) and evenign primrose oil(EPO) for n6 gamma-linolenic acid(GLA). Plasma cholesterol level was slightly decreased by PL(13.5g) but significantly increased by equal amount of CO. However, there was similar hypocholeaterolemic effect when double amount of CO(27.0g), was supplemented. Therefore, total fat unsaturation may be more important factor for plasma cholesterol-lowering effect than the structure of fatty acid itself. Plasma cholesterol level was not lowered by supplement of GLA in CO diet. There was similar trend in hypotriglyceridemic effect by PO and CO as in plasma cholesterol. Plasma TG level was rather increased but not significantly by GLA supplement to CO diet. Overall, plasma lipid-lowering effect was greater by ALA than LA and GLA effect was not greater than by LA. GLA supplement did not significantly improve lipid compositions to prevent against CHD. There was no significant change both in fatty acid composition in platelet and ADP-induced platelet aggregation by GLA supplement to corn oil diet and by ALA in PO diet in young women.

• 한국재료학회지
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• 제21권2호
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• pp.106-110
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• 2011

A high thermal conductive AlN composite coating is attractive in thermal management applications. In this study, AlN-YAG composite coatings were manufactured by atmospheric plasma spraying from two different powders: spray-dried and plasma-treated. The mixture of both AlN and YAG was first mechanically alloyed and then spray-dried to obtain an agglomerated powder. The spray-dried powder was primarily spherical in shape and composed of an agglomerate of primary particles. The decomposition of AlN was pronounced at elevated temperatures due to the porous nature of the spray-dried powder, and was completely eliminated in nitrogen environment. A highly spherical, dense AlN-YAG composite powder was synthesized by plasma alloying and spheroidization (PAS) in an inert gas environment. The AlN-YAG coatings consisted of irregular-shaped, crystalline AlN particles embedded in amorphous YAG phase, indicating solid deposition of AlN and liquid deposition of YAG. The PAS-processed powder produced a lower-porosity and higher-hardness AlN-YAG coating due to a greater degree of melting in the plasma jet, compared to that of the spray-dried powder. The amorphization of the YAG matrix was evidence of melting degree of feedstock powder in flight because a fully molten YAG droplet formed an amorphous phase during splat quenching.