• Korean Journal of Materials Research
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• v.8 no.10
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• pp.945-949
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• 1998

Ta(OC2H5)5와 NH3를 이용하여 Cycle-CVD법으로 산화탄탈륨 막을 증착하였다. Cycle-CVD법에서는 Ta(OC2H5)5와 NH3사이에 불활성 기체를 주입한다. 하나의 cycle은 Ta(OC2H5)5주입, Ar주입, NH3 주입, Ar 주입의 네 단계로 이루어진다. Cycle-CVD법으로 산화탄탈륨 막을 증착할 때, 온도 $250-280^{\circ}C$에서 박막의 증착 기구는 원자층 증착(Atomic Layer Deposition:ALD)이었다. $265^{\circ}C$에서 Ta(OC2H5)5:Ar:NH3:Ar:NH3:Ar의 한 cycle에서 각 단계의 주입 시간을 1-60초:5초:5초:5초로 Ta(OC2H5)5 주입 시간을 변화시키면서 산화탄탈륨 막을 Cycle-CVD법으로 증착하였다. Ta(OC2H5)5주입시간이 증가하여도 cycle 당 두께가 $1.5\AA$/cycle로 일정하였다. $265^{\circ}C$에서 증착된 박막의 누설 전류는 2MV/cm에서 2x10-2A/$\textrm{cm}^2$이었고 열처리후의 산화탄탈륨 막의 누설 전류값은 $10-4A\textrm{cm}^2$ 이하고 감소하였다. 증착한 산화탄탈륨 막의 성분을 Auger 전자 분광법으로 분석하였다. 2$65^{\circ}C$에서 증착한 막의 성분은 탄탈륨 33at%, 산소 50at%, 탄소 5at%, 질소 12at% 이었으며 90$0^{\circ}C$, O2300torr에서 10분 동안 열처리한 박막은 탄탈륨 33at%, 산소 60wt%, 탄소 4at%, 질소 3at%이었다. 박막의 열처리 온도가 높을수록 불순물인 탄소와 질소의 박막 내 잔류량이 감소하였다. 열처리 후의 박막은 O/Ta 화학정량비가 증가하였으며 Ta의 4f7/5와 4f 5/2의 결합 강도가 열처리 전 박막보다 증가하였다. 열처리 후 누설 전류가 감소하는 것은 불순물 감소와 화학정량비 개선 및 Ta-O 결합 강도의증가에 의한 것으로 생각된다.

• Journal of Advanced Marine Engineering and Technology
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• v.22 no.6
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• pp.782-791
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• 1998

This paper presents a computer simulation of five types of triple effect absorption cycles employ-ing the refrigerant absorbent combinations of NH3/LiNO3 low-pressure type NH3/LiNO3+H2O/LiBr binary two-stage type series flow cycle and two types of parallel flow cycle for H2O/LiBr. The absorption systems is investigated through cycle simulation to obtain the system characteristics with the cooling water inlet temperature approach temperature of absorber loss temperature of absorber and chilled water outlet temperature. The most important characteristic temperature of absorber and chilled water outlet temperature. The most important characteristic of NH3/LiNO3 low-pressure type and a NH3/LINO3+H2O/LiBr binary two-stage type is that it obtains a coefficient of performance higher than the sum of the performance coefficients of its part operating independently. As a result of this analysis the optimum designs and operating conditions were determined based on the operating conditions and the coefficient of performance.

• Korean Journal of Materials Research
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• v.8 no.5
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• pp.377-382
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• 1998

Atomic layer deposition(ALD) of amorphous TiN films on $SiO_2$ between 17$0^{\circ}C$ and 21O$^{\circ}C$ has been investigated by alternate supply of reactant sources, Ti[N($C_2,H_5,CH_3)_2]_4$ [tetrakis(ethylmethylamminoltitanium: TEMAT] and $NH_3$. Reactant sources were injected into the reactor in the order of TEMAT vapor pulse, Ar gas pulse, $NH_3$. gas pulse and Ar gas pulse. Film thickness per cycle was saturated at around 1.6 monolayer(MU per cycle with sufficient pulse times of reactant sources at 20$0^{\circ}C$. The results suggest that film thickness per cycle could be beyond 1 MLicycie in ALD, which were explained by rechemisorption mechanisms of reactant sources. The ideal linear relationship be¬tween number of cycles and film thickness is confirmed. As a results of surface limited reactions of ALD, step cover¬age was excellent. Particles caused by the gas phase reactions between TEMAT and NH3 were almost free because TEMAT was seperated from $NH_3$ by the Ar pulse. In spite of relatively low substrate temperature, carbon impurity was incorporated below 4 at%.

• Solar Energy
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• v.15 no.1
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• pp.29-38
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• 1995

This paper concerns the study of a two-stage binary absorption cycle employing the refrigerant/absorbent combinations of $LiBr/H_2O$ and $NH_3/H_2O$. This cycle consists of coupling two single-effect absorption cycles so that the first stage absorber and condenser produces heating water to evaporate refrigerant in the evaporator of the second stage. The effect of operating variables such as evaporator temperature, condenser and absorber temperature, and generator temperature on the coefficient of performance and temperature lift have been studied for two-stage binary absorption heat pump systems. It is found that this cycle has a large temperature lift at $105^{\circ}C$ of optimum generator temperature to obtain $50^{\circ}C$ of condenser temperature.

• Solar Energy
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• v.18 no.2
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• pp.31-49
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• 1998

Four main solar cooling technologies have been developed over the past twenty years are considered in this paper. These technologies include absorption, vapor compression, desiccant, adsorption, etc. All of these solar cooling technologies considered here are solar thermal ones. The destails of the thermodynamic cycle of these solar cooling technologies are given. The general concept of these solar cooling and the relative advantages among them are also presented. At last, the status and outlook for each approach are summarized.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.7 no.2
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• pp.93-100
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• 2009

This study has been carried out to look into the characteristics of an oxidative-dissolution of fission products (FP) co-dissolved with uranium (U) in a $(NH_4)_2CO_3$ carbonate solution. Simulated FP-oxides which contained 12 components have been added to the solution to examine their dissolution characteristics. It is found that $H_2O_2$ is an effective oxidant to minimize the oxidative-dissolution of FP. In the 0.5 M $(NH_4)_2CO_3$-0.5 M $H_2O_2$ solution, some elements such as Re, Te, Cs and Mo seem to be dissolved together with U, while 98${\pm}$2% for Re and Te, 94${\pm}$2% for Cs, and 29${\pm}$2 % for Mo are dissolved for 2 hours. It is revealed that dissolution rates of Re, Te and Cs are high (completely dissolved within 10${\sim}$20 minutes) due to their high solubility in the $(NH_4)_2CO_3$ solution regardless of the addition of $H_2O_2$, and independent of the concentrations of $Na_2CO_3$ and $H_2O_2$. However, the dissolution ratio of Mo seems to be slightly increased with time and about 33 % for 4 hours, indicating a very slow dissolution rate and also independent of the $(NH_4)_2CO_3$ concentration. It is found that the most important factor for the oxidative-dissolution of FP is the pH of the solution and an effective dissolution is achieved at a pH between 9${\sim}$10 in order to minimize the dissolution of FP.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.5
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• pp.438-443
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• 2004

The objective of this paper is to study the effects of the input gas flow rate and the ambient temperature variation on the absorption cycle performance. An air-cooled NH$_3$-$H_2O$ absorption chiller is tested in the present study. The nominal cooling capacity of the single effect maching is 17.6 ㎾ (5.0 USRT). The cooling capacity, coefficient of performance, burner efficiency, and each state point are measured with the variations of the heat input and the ambient temperature. It is found that the COP and cooling capacity increase with increasing the generator exit temperature up to a certain temperature and then decrease. It is also found that the COP and the cooling capacity decrease with increasing the ambient temperature. The maximum COP of 0.51 is obtained from the present experiment.

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.1249-1254
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• 2008

Industrial low temperature waste heat exists sparse in surroundings but its amount is huge. However, large portion of waste heat is discarded due to its poor recovery quality and inferior application technologies. The heat pump system in this research is based on the hybrid combination of compression cycle and absorption cycle in order to recycle various kind of industrial waste heat effectively. The prime objective is to design a compression absorption hybrid heat pump system which can produce high temperature above the level of $90^{\circ}C$ and low temperature of $20^{\circ}C$ at the same time using waste heat water of $50^{\circ}C$. A mathematical simulation was carried out as a basis to design a prototype 3 RT class hybrid heat pump. From the simulation results, fundamental parameters to design the system were obtained.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.3
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• pp.229-235
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• 2011

This research aims todevelopa compression/absorption hybrid heat pump system using an $NH_3/H_2O$ as working fluid.The heatpump cycle is based on a combination of compression and absorption cycles. The cycle consists of two-stage compressors, absorbers, a desorber, a desuperheater, solution heat exchangers, a solution pump, a rectifier, and a liquid/vapor separator. The compression/absorption hybrid heat pump was designed to produce hot water above $90^{\circ}C$ using high-temperature glide during a two-phase heat transfer. Distinct characteristics of the nonlinear temperature profile should be considered to maximize the performance of the absorber. In this study, the performance of the absorber was investigated depending on the capacity, shape, and arrangementof the plate heat exchangers with regard tothe concentration and distribution at the inlet of the absorber.

• Journal of Advanced Marine Engineering and Technology
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• v.39 no.9
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• pp.881-889
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• 2015

Ocean thermal energy conversion is an organic Rankine cycle that generates power using the temperature difference between surface water and deep water. This study analyzes the thermodynamic efficiency of the cycle, which strongly depends on the working fluid and the cycle configuration. Cycles studied included the classical simple Rankine cycle, Rankine cycles with an open feedwater heater and an integrated regenerator, as well as the Kalina cycle. Nine kinds of simple refrigerants and three kinds of mixed refrigerants were investigated as the working fluids in this study. Pinch-point analysis that set a constant pinch-point temperature difference was applied in the performance analysis of the cycle. Results showed that thermodynamic efficiency was best when RE245fa2 was used as the working fluid with the simple Rankine cycle, the Rankine cycles with an open feedwater heater and an integrated regenerator, and when the mixing ratio of $NH_3/H_2O$ was 0.9:0.1 in the Kalina cycle. If the Rankine cycles with an open feedwater heater, an integrated regenerator, and the Kalina cycle were used for ocean thermal energy conversion, efficiency increases could be expected to be approximately 2.0%, 1.0%, and 10.0%, respectively, compared to the simple Rankine cycle.