• 마이크로전자및패키징학회지
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• 제14권2호
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• pp.59-63
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• 2007

간단한 PCB 공정을 기반으로 하여 저가형의 후막 가스 센서 모듈을 제안하고자 한다. 제안된 센서 모듈은 $NO_2/H_2$ 가스 센서와 습도센서, 그리고 히터를 포함한다. $NO_2/H_2$ 가스와 상대 습도 센서들은 각각 $SnO_2$와 $BaTiO_3$ 나노 입자들을 PCB 기판에서의 IDT(interdigital Transducer)에 프린팅 함으로써 제작되었다. 처음에 1% $H_2$ 가스를 센서 쳄버에 공급하고 4분 후 $H_2$가스 공급을 멈추고 공기를 주입시켰으며, 이러한 동작을 반복적으로 수행하였다. 마찬가지로 $NO_2$로 감지하도록 같은 동작을 실행하였다. $H_2$ 가스에 대한 결과는 도전성의 증가로 인하여 0.8V에서 3.5V로 증가함을 볼 수 있었으며, $H_2$ 가스를 주입한후의 반응 시간은 65초였다. $NO_2$ 가스의 경우는 도전성이 감소함으로써 2.7 V의 전압강하가 일어 났으며, 반응시간은 3초였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.207-210
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• 2004

In oil-filled equipment such as transformers, partial discharge or local overheating will make insulating material(oil, kraft paper, proclain and wood) be stressed and generate many sort of gases($CO,\;CO_2,\;H_2,\;C_2H_4$) which are dissolved in transformer oil. The ratio of this gas can make diagnostic tecchniques of the lifetime of transfomer so, it is important to monitoring $H_2$ gas continuously. This paper developes a system of detecting about $H_2$ gas by using $H_2$ gas sensor, and we describe operation and performance of this system

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.359-359
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• 2011

This study reports the H2S gas sensing properties of CuO / ZnO nano-hetero structure bundle and the investigation of gas sensing mechanism. The 1-Dimensional ZnO nano-structure was synthesized by hydrothermal method and CuO / ZnO nano-heterostructures were prepared by photo chemical reaction. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) spectra confirmed a well-crystalline ZnO of hexagonal structure. In order to improve the H2S gas sensing properties, simple type of gas sensor was fabricated with ZnO nano-heterostructures, which were prepared by photo-chemical deposition of CuO on the ZnO nanorods bundle. The furnace type gas sensing system was used to characterize sensing properties with diluted H2S gas (50 ppm) balanced air at various operating temperature up to 500$^{\circ}C$. The H2S gas response of ZnO nanorods bundle sensor increased with increasing temperature, which is thought to be due to chemical reaction of nanorods with gas molecules. Through analysis of X-ray photoelectron spectroscopy (XPS), the sensing mechanism of ZnO nanorods bundle sensor was explained by well-known surface reaction between ZnO surface atoms and hydrogen sulfide. However at high sensing temperature, chemical conversion of ZnO nanorods becomes a dominant sensing mechanism in current system. Photo-chemically fabricated CuO/ZnO heteronanostructures show higher gas response and higher current level than ZnO nanorods bundle. The gas sensing mechanism of the heteronanostructure can be explained by the chemical conversion of sensing material through the reaction with H2S gas.

• 센서학회지
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• 제17권3호
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• pp.178-182
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• 2008

Planar type micro catalytic combustible gas sensor was developed by using nano crystalline $SnO_2$ Pt thin film as micro heater was deposited by thermal evaporation method on the alumina substrate. The thickness of the Pt heater was around 160 nm. The sensor showed high reliability with prominent selectivity against various gases(Co, $C_3H_8,\;CH_4$) at low operating temperature($156^{\circ}C$). The sensor with nano crystalline $SnO_2$ showed higher sensitivity than that without nano crystalline $SnO_2$. This can be explained by more active adsorption and oxidation of hydrogen by nano crystalline $SnO_2$ particles. The present planar-type catalytic combustible hydrogen sensor with nano crystalline $SnO_2$ is a good candidate for detection of hydrogen leaks.

• 센서학회지
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• 제32권4호
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• pp.207-212
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• 2023

H₂S is a toxic and harmful gas, even at concentrations as low as hundreds of parts per million; thus, developing an H₂S sensor with excellent performance in terms of high response, good selectivity, and fast response time is important. In this study, an H₂S sensor with a high response and fast response time, consisting of a sensing material (SnO₂), an electrode, a temperature sensor, and a micro-heater, was developed using micro-electro-mechanical system technology. The developed H₂S sensor with a micro-heater (circular type) has excellent H₂S detection performance at low H₂S concentrations (0-10 ppm), with quick response time (<16 s) and recovery time (<65 s). Therefore, we expect that the developed H₂S sensor will be considered a promising candidate for protecting workers and the general population and for responding to tightened regulations.

• 한국표면공학회지
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• 제50권2호
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• pp.125-130
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• 2017

ZnO nanowires were synthesized and annealed at various temperatures of $500-800^{\circ}C$ in oxygen atmosphere to investigate hydrogen gas sensing properties. The diameter and length of the synthesized ZnO nanowires were approximately 50-100 nm and a few $10s\;{\mu}m$, respectively. $H_2$ gas sensing performance of the ZnO nanowires sensor was measured with electrical resistance changes caused by $H_2$ gas with a concentration of 0.1-2.0%. The response of ZnO nanowires at room temperature to 2.0% $H_2$ gas is found to be two times enhanced by annealing process in $O_2$ atmosphere at $800^{\circ}C$. In the current study, the effect of heat treatment in $O_2$ atmosphere on the gas sensing performance of ZnO nanowires was studied. And the underlying mechanism for the sensing improvement of the ZnO nanowires was also discussed.

• 센서학회지
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• 제29권6호
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• pp.365-368
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• 2020

As a green and abundant source of energy, H2 has attracted the attention of researchers for use in different applications. Nevertheless, it is highly flammable, and because of its significantly small size, extreme attention is needed to detect its leakage. In this review, we discuss different effects of noble metals on the H2 gas response and performance of metal oxide-based gas sensors. In this regard, we discuss the effects of noble metals, in combination with metal oxides, on H2 gas detection. The catalytic activity towards H2 gas and the formation of heterojunctions with metal oxides are the main contributions of noble metals to the sensing improvement of H2 gas sensors. Furthermore, in the special case of Pd and somewhat Pt, the formation of PdHx and PtHx also affects the H2 sensing performance. This review paper provides useful information for researchers working in the field of H2 gas detection.

• Bulletin of the Korean Chemical Society
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• 제32권10호
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• pp.3735-3737
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• 2011

We report a simple method for fabricating ZnO gas sensors via a sonochemical route and their $H_2$ gas sensing properties. Vertically aligned ZnO nanorod arrays as a sensing material were synthesized on a Pt-electrode patterned alumina substrate under ambient conditions. The advantage of the proposed method is a high speed of processing. The gas sensor based on ZnO nanorod arrays with large specific surface area showed a high response to $H_2$ and a detection limit of 70 ppm at $250^{\circ}C$. Also, their response and recovery time were relatively short and a complete regeneration was observed. A mechanism for sensing $H_2$ gas on the surface of ZnO nanorods is proposed.

• 전기학회논문지
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• 제68권1호
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• pp.69-76
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• 2019

Microheaters with different structures were fabricated and compared to find an optimal configuration enhancing the performances of $C_2H_2$ gas sensor. Three temperature sensors were integrated on the surface of the insulation layer over the microheater, and resistance changes were observed to check the generated heat from the microheater. A low operating voltage of 1mV was applied to the temperature sensor to minimize any influence of thermal heat from the resistance type temperature sensor, whereas high voltages in the range between 10 and 20V were applied to the microheater. A microheater structure generating maximum heat at low voltage was determined. The generated heat was verified by the temperature sensors on the top of the $Si_3N_4$ and infrared camera. A long term stability and accuracy of the microheater were observed. The developed microheater was applied to enhance the performances of $C_2H_2$ gas sensor and successfully confirmed that the developed microheater greatly contributes to the improvement of sensitivity and selectivity of gas sensor.

• 센서학회지
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• 제17권2호
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• pp.147-150
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• 2008

Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.