• 분석과학
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• 제5권1호
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• pp.115-120
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• 1992

강유전체인 $LiTaO_3$ 소재는 SAW filters나 IR sensors의 기본재료로 사용되고 있다. Dopant로서 $Al_2O_3$를 $LiTaO_3$에 일부 치환함으로써 유전 특성을 변화시키고 특히 용융점을 낮춤으로써 단결정 제조를 용이하게 한다. X-선 회절분석에 의한 격자상수 변화와 Raman spectroscopy의 band broadening을 측정한 결과 $LiTaO_3$에 대한 $Al_2O_3$의 고용한계가 $Li_{1-X}Al_{2X}Ta{1-X}O_3$에서 X=0.25mol이었으며, 고용한계 이상에서는 2차상인 $Al_2O_3$상이 XRD로 관찰되었다. Grain size에 의한 Raman band의 broadening을 고려하기 위하여 단결정과 소결체 $LiTaO_3$를 측정 비교하였다.

• 마이크로전자및패키징학회지
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• 제10권2호
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• pp.55-59
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• 2003

본 연구에서는 RF-Magnetron 스퍼터링 장치를 이용하여 $Al_xTa_{1-x}$(x=0.0∼1.0) 합금박막을 성장하였고, 4탐침법, XRD, AFM, micro-Vickers 미소경도계를 사용하여 시료의 구조적, 기계적, 전기적 특성을 분석하였다. Al조성 x=0.245(Al 24.5 at.%)에서 전기저항이 가장 높게 나타났고, 결정질이 가장 우수하였다. 표면 hillock에 있어서는 낮은 Al 조성영 역에서는 x가 증가할수록 hillock이 감소하다가, x=0.245에서 hillock이 완전히 배제되었고, 이후 x 증가에 따라 hillock 밀도가 다시 급격히 증가하였다. 미소경도의 경우, Al조성 x=0.2∼0.45의 영역에서 가장 높은 경도값이 측정되었다. 본 연구의 모든 결과를 종합적으로 고려할 때, $Al_xTa_{1-x}$ 합금박막의 결정질, 전기저항, 표면형상, 미소경도는 상호 밀접한 관계를 가지고 있었으며, Al 조성 x=0.245에서 가장 우수한 물리적 특성이 나타났다.

• 마이크로전자및패키징학회지
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• 제11권4호
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• pp.23-27
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• 2004

본 연구에서는 RF-Magnetron Sputtering 장치를 이용하여 $Al_xTa_{1-x} (x=0.0{\~}1.0)$ 합금박막을 성장하였고, XRD, AFM, 4탐침법 등을 사용하여 시료의 결정질과 표면형상, 그리고 전기적 특성을 분석하였다. Al 조성을 변화시켜서 Al-Ta 합금박막을 증착하고, 그에 따라 얻어진 결과를 토대로 하여 박막 두께별 ,박막의 폭 별로 합금박막을 성장하였다. 또한 heat controller를 사용하여 시료의 발열특성을 분석하였다. 본 연구의 결과 Al-Ta 합금박막은 Al 조성 $x=6.63at\%$에서 가장 높은 전기저항이 나타났고, 박막두께가 얇아지거나 패터닝된 박막의 폭이 좁을수록 더욱 높은 전기저항이 나타났다. 발열온도는 전기저항의 변화추이와 동일한 양상을 보였고, Al 조성 $x=6.63\%$, 박막두께 d=500 nm, 박막폭 w=1.5 mm에서 가장 높은 발열온도 ($400^{\circ}C$)와 출력 ($12.6W/cm^2$)을 나타냈다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1993년도 제5회 학술발표회 논문개요집
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• pp.87-88
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• 1993

• 한국세라믹학회지
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• 제40권4호
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• pp.354-359
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• 2003

The microwave dielectric characteristics of (1-x)(Al$\_$$\frac{1}{2}$/Ta$\_$$\frac{1}{2}$/)O$_2$-x(Mg$\_$1/3/Ta$\_$2/3/)O$_2$ (0$\leq$x$\leq$1.0) ceramics were investigated by crystalstructure, variations of ionic polarizability, and microstructures. As x increased, (1-x)(Al$\_$$\frac{1}{2}$/Ta$\_$$\frac{1}{2}$/)O$_2$-x(Mg$\_$1/3/Ta$\_$2/3/)O$_2$ transformed to tetragonal structure. Because the ionic radius of (Mg$\_$1/3/Ta$\_$2/3/)$\^$4+/was slightly bigger than one of (Al$\_$$\frac{1}{2}$/Ta$\_$$\frac{1}{2}$/)$\^$4+/, the cell parameters increased with increase of (Mg$\_$1/3/Ta$\_$2/3/)O$_2$concentration and coincided with prediction of the molecular additivity rule. As x increased, the compositions revealed ordered phase and were of single phase above 60 mol%. The increase of the ordered phase and grain size enhanced the Q and when ordering was completed at x over 0.6, the grain size was major factor for the increase in the a. Though the grain size increased, however, the porosity deteriorated the q. Therefore, the a depended on the order/disorder, the porosity, and the grain size in regular order.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 연구회
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• pp.157-160
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• 2001

We have investigated the Dielectric and Piezoelectric properties of $xPb(R_{1/2}Ta_{1/2})O_3-(1-x)Pb(Zr_{0.52}Ti_{0.48})O_3$ (R=Al,Y) solid solutions in which R ions are substituted for Al and Y ions. The maximum value of electromechanical coupling factor kp of 55% and 51% were obtained at the composition of 5mol% PAT and 5mol% PYT. However mechanical quality factor$(Q_m)$ had a minimum value of 44 and 69 at the composition of 5mol% PAT and 5mol% PYT. Also, the maximum value of piezoelectctric constant of $d_{33}(329[pC/N])$ and $d_{33}(310[pC/N])$ were obtained at the composition of 5mol% PAT and 5mol% PYT.

• 한국광물학회지
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• 제2권1호
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• pp.8-10
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• 1989

Sphene from the McDonald pegmatite near Bancroft, Ontario, Canada was analyzed using EPMA. It contains 4.3 to 6.3 weight percent of Nb2O5 with an average formula Ca1.02(Ti0.62Al0.22Nb0.07Fe0.06Ta0.01)Si0.99(O4.85F0.16). Three types of subtitutions are possible; 1)2Ti4+=(Nb, Ta)5+ + (Al, Fe3+), 2) Ti + O = (Al, Fe3+) + (F, OH), and 3) 2Ti + O = Fe2+ + (Nb, Ta)5+ + (F, OH). T재 different schemes of substitutions for balancing the analysis are considered when the iron is either all ferric or all ferrous. Assuming stoichiometry fo Ca and Si, a general formula derived from the two different schemes is Ca(Ti0.64Al0.22Fe3+0.06-X {{{{Fe_{x}^{2+} }} Nb0.01)Sio4.80-XF0.16(OH)0.04+x.

• Corrosion Science and Technology
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• 제8권4호
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• pp.162-169
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• 2009

Pure titanium and its alloys are drastically used in implant materials due to their excellent mechanical properties, high corrosion resistance and good biocompatibility. However, the widely used Ti-6Al-4V is found to release toxic ions (Al and V) into the body, leading to undesirable long-term effects. Ti-6Al-4V has much higher elastic modulus than cortical bone. Therefore, titanium alloys with low elastic modulus have been developed as biomaterials to minimize stress shielding. For this reason, Ti-30Ta-xZr alloy systems have been studied in this study. The Ti-30Ta containing Zr(5, 10 and 15 wt%) were 10 times melted to improve chemical homogeneity by using a vacuum furnace and then homogenized for 24 hrs at $1000^{\circ}C$. The specimens were cut and polished for corrosion test and Ti coating and then coated with TiN, respectively, by using DC magnetron sputtering method. The analyses of coated surface were carried out by field emission scanning electron microscope(FE-SEM). The electrochemical characteristics were examined using potentiodynamic (- 1500 mV~+ 2000 mV) and AC impedance spectroscopy(100 kHz~10 mHz) in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. The equiaxed structure was changed to needle-like structure with increasing Zr content. The surface defects and structures were covered with TiN/Ti coated layer. From the polarization behavior in 0.9% NaCl solution, The corrosion current density of Ti-30Ta-xZr alloys decreased as Zr content increased, whereas, the corrosion potential of Ti-30Ta-xZr alloys increased as Zr content increased. The corrosion resistance of TiN/Ti-coated Ti-30Ta-xZr alloys were higher than that of the TiN-coated Ti-30Ta-xZr alloys. From the AC impedance in 0.9% NaCl solution, polarization resistance($R_p$) value of TiN/Ti coated Ti-30Ta-xZr alloys showed higher than that of TiN-coated Ti-30Ta-xZr alloys.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.119-122
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• 2002

The calculated and measured dielectric constant of (1-x)(Al$\sub$1/2/Ta$\sub$1/2/)O$_2$-x(Mg$\sub$1/3/Ta$\sub$2/3/)O$_2$(O$\leq$x$\leq$1.0) solid solutions were investigated by variations of ionic polarizability and crystal structure. (Al$\sub$1/2/Ta$\sub$1/2/)O$_2$ and (Mg$\sub$1/3/Ta$\sub$2/3/)O$_2$were orthorhombic and tetragonal trirutile structure, respectively. When (Al$\sub$1/2/Ta$\sub$1/2/)O$_2$ was substituted by (Mg$\sub$1/3/Ta$\sub$2/3/)O$_2$, the phase transformed to tetragonal structure over 60 mole%. Because the ionic radius of (Mg$\sub$1/3/Ta$\sub$2/3/)O$_2$was slightly bigger than one of (A1$\sub$1/2/Ta$\sub$1/2)O$_2$, the cell parameters increased with an increase of (Mg$\sub$1/3/Ta$\sub$2/3/)O$_2$ substitution. The measured dielectric constant increased with an increase of (Mg$\sub$1/3/Ta$\sub$2/3/)O$_2$ substitution and coincided with dielectric mixing rule and the calculated dielectric constant with the molecular additivity rule. There were some differences between the measured and the calculated dielectric constant. The reason of the lowered dielectric constant comparing with the calculated one was compressed stress due to the electronic structure of tantalum.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 D
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• pp.1726-1728
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• 1999

Dielectric and piezoelectric properties of xPb$(Al_{1/2}Ta_{1/2})O_3$-(1-x)Pb$(Zro_{0.52}Ti_{0.48})O_3$ system were investigated. The highest density of $7.80g/cm^3$ for PAT-PZT ceramics of 5mol% PAT was obtained. The relative permittivity of PAT-PZT ceramics of 5mol% PAT was 1.642 at room temperature. The maximum value of electromechanical coupling factor $k_p$ of 55% and $k_t$ of 33% were obtained at the composition of 5mol% PAT. The grain sizes were reduced by increasing the amount of PAT, however mechanical quality factor$(Q_m)$ had a minimum value of 44 at the composition of 5mol% PAT.