• Electrical & Electronic Materials
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• v.10 no.5
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• pp.419-424
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• 1997

It is well known that the metallo-phthalocyanines (MPcs) are sensitive to toxic gaseous molecules such as NO$_2$ as well as are chemically and thermally stable. Therefore, lots of MPcs have been studied as the potential chemical sensor for NO$_2$gas using quartz crystal microbalance(QCM) or electrical conductivity. In this study, thin films of octa(2-ethylhexyloxy)copper-phthalocyanine were prepared by Langmuir-Blodgett method and characterized by using UV-VIS absorption spectroscopy and ellipsometry. Optimal transfer condition of LB films was investigated and preliminary results of current-voltage(I-V) characteristics of these films exposed to NO$_2$gas as a function of film thickness, temperature and concentration were discussed.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1716-1718
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• 1996

It is well known that the metallophthalocyanine (MPcs) are sensitive to toxic gaseous molecules such as $NO_2$ and also chemically and thermally stable. Therefore, lots of MPcs are studied for the potential chemical sensor for $NO_2$ gas using quartz crystal microbalance(QCM) or electrical conductivity. In this study, thin films of octa(2-ethylhexyloxy) copper-phthalocyanine were prepared by Langmuir-Blodgett method and characterized by using UV-VIS spectrascopy and ellipsometry. Transfer condition, film characterization, and preliminary results of current-voltage(I-V) characteristics of these films exposed to $NO_2$ gas as a function of film thickness will be discussed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.162-165
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• 1996

It is well shown that the metallophthalocyanine (MPcs) are sensitive to tonic gaseous molecules such as NO$_2$ and also chemically and thermally stable. Therefore, lots of MPcs are studied for the potential chemical sensor for NO$_2$ gas using quartz crystal microbalance(QCM) or electrical conductivity. In this study, thin films of octa(2-ethylhexyloxy) copper-phthalocyaninc ware prepared by Langmuir-Blodgett method and characterized by using UV-VIS spectrascopy and cllipsometry. Transfer condition, film characterization, and preliminary results of current-voltage(I-V) characteristics of these films exposed to NO$_2$ gas as a function of film thickness will be discusscd.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.3
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• pp.294-298
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• 2004

Carbon nanotubes(CNTs) were synthesized by thermal chemical vapor deposition(CVD) method. To fabricate CNT gas sensor, catalyst metal layer was deposited on microstructure. The CNT gas detecting layer was grown by thermal CVD method on the catalyst metal layer. In order to investigate the gas sensing characteristics of the fabricated CNT gas sensor, it was exposed in NO$_2$ gas and sensitivity, response, and recovery time were measured. As the result, this sensor has better reproductibility and faster recovery time than another CNT gas sensors.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.1-4
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• 1997

In this study, ruin films of Octla-dodecyloxy copper-phthalocyanine were prepared by Langmuir-Blodgett (LB) method and characterirzed by using UV-Vis absorption spectroscopy and ellipsometry. [1],r[2] Optimal transfer condition of LB films was investigated and preliminary results of current-voltage(1-V) characteristics of these films exposed to NO$_2$ gas as were discussed functions of film thickness, temperature and NO$_2$ gas concentration.

• IEMEK Journal of Embedded Systems and Applications
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• v.2 no.2
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• pp.76-81
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• 2007

A novel multi-layer type micro gas sensor for $NO_X$ detection was designed and fabricated. Micro platform defined as type II-1 in this article for micro gas sensor was fabricated using the MEMS technology to meet the demanding needs of lower power consumption. Nano composite materials were fabricated with nanosized tin oxide powder and $\underline{m}$ulti-$\underline{w}$all $\underline{c}$arbon $\underline{n}$ano $\underline{t}$ube (MWCNT) to improve sensitivity. We investigated characteristics of fabricated multi-layer type micro gas sensor with $NO_2$ concentration variations at constant 2.2 V. Sensitivity (S) of micro gas sensor were observed to increase from 2.9, to 7.4 and 11.2 as concentrations of $NO_2$ gases increased from 2.4 ppm, to 3.6 ppm and 4.9 ppm. When 2.4 ppm of $NO_2$ gas was applied, response time and recovery time of micro gas sensor were recorded as 101 seconds and 142 seconds, respectively.

• Journal of the Korean Ceramic Society
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• v.34 no.4
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• pp.387-393
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• 1997

In order to apply WO3 thin films to the semiconducting NOx gas sensors as a sensing material, which have been expected to show good electrical properties, such as large sensitivity, rapid responsibility, and high selectivity, the fabrication method and their sensing characteristics were studied. The variations of surface morphologies, crystallographic orientations and crystallinity with the WO3 thin film growing methods thermal evaporation and DC sputtering methods were investigated by using scanning electron microscopy (SEM) and X-ray diffraction(XRD) analysis. As a result of sensitivity (Rgas/Rair) measurements for the 5 ppm NO2 test gas, the sensitivity values were 113 for the sputtered films and 93 for the evaporated films. It was also observed that the recovery rate of a sensing signal after measuring sensitivity was faster in the sputtered films than in the evaporated films.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.121-124
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• 1996

It is well known that the metallo- phthalocyanine (MPcs) are sensitive to toxic gaseous molecules such as NO$_2$and also chemically and thermally stable. Therefore, lots of MPcs have been studied for the potential chemical sensor for NO$_2$gas using quartz crystal microbalance(QCM) or electrical conductivity. In this study, thin films of octa(2-ethylhexyloxy) copper-phthalocyanine were prepared by Langmuir -Blodgett method and characterized by using UV-VIS spectroscopy and ellipsometry. Transfer condition, and characterization of LB films were investigated and preliminary results of current-voltage(I-V) characteristics of these films exposed to NO$_2$gas as a function of film thickness, temperature and temperature were discussed.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1247-1249
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• 1997

Langmuir-Blodgett(LB) method is one of the ways of fabricating organic ultra thin films. It is well known that It has the advantage to control the alignment and orientation of the molecules in the films. Metallo-phthalocyanines (MPcs) are sensitive to electron affinitive toxic gaseous molecules, such as $NO_2$, NO, $SO_2$. In this study, thin films of octa-dodecyloxy copper-phthalocyanine were prepared by LB method and characterized by using UV/Vis absorption spectroscopy and ellipsometry. Optimal transfer condition of LB films was investigated and preliminary results of current-voltage (I-V) characteristics of these films exposed to $NO_2$ gas as a function of film thickness.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1994.05a
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• pp.79-82
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• 1994

We have manufacture Copper-tetra-tert-butylphalocyanine (CuTBP)Langmuir-Blodgett(LB) films, which is known be sensitive to NO$_2$ gab. A response of these films to the NO$_2$ gab was studied. A surface pleasure of 25mN/m was obtained as a proper one for a film deposition. A deposited film status was identified with Uv/visible absorption spectra, ellipsometry measurements, and current-voltage(I-Y) characteristics. The NO$_2$ gas response experiments under 200ppm conducentration show that there are increment of electrical conductivity by 12 times, 5 seconds of response time, and 5 seconds of response time, and 90 seconds of recovery time.