• 한국정밀공학회지
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• 제3권1호
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• pp.69-76
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• 1986

The measuring Method by stylus, which measures surface roughness, has been widely used since G. Schmaltz developed the first equipment of that type. Withe the resent development of the measuring method by stylus, surface foughness testing instruments of the very high magnification ratio, hundreds of thousands, are manu- factured. However, as the techniques of the high precision roughness measurement are being required, the response problems due to the tip shapes and the plastic deformations of measured surface of mild material are to be serious factors. In this study, diamond stylus of tip radius $0.5\mu\textrm{m}$, $2\mu\textrm{m}$, $5\mu\textrm{m}$ and $10\mu\textrm{m}$ were used under the measuring force of 0.01gf, 0.02gf, 0.07gf, 0.4gf and 1.6gf, and from the experimental data, maximum measured value devrements between $2\mu\textrm{mR}$ stylus and $5\mu\textrm{mR}$ stylus, $2\mu\textrm{mR}$ stylus and $10\mu\textrm{mR}$ stylus are 22% and 31%, respectively when the measured value of $2\mu\textrm{mR}$ stylus goes to $0.01\mu\textrm{m Ra}$, $\lambda$ c2.5mm. And it is shown that plastic deformations on the plastic deformations on the measured surface are proportional to W/R(W;measured force, R;stylus tip radius).

• 한국정밀공학회지
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• 제8권3호
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• pp.105-113
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• 1991

The practicability of Ion-Sputter machining renders it possible to make diamond stylus for surface roughness measurement with micro stylus tip radius less than 2${\mu}mR$, and to measure surface roughness of fine-machined surface. In this study, we researched the wear or Ion-Sputtered stylus with 0.1${\mu}mR$ and 0.5${\mu}mR$ for micro-figure measurement and polished stylus with 0.5${\mu}mR$ according to measurement distance. As a result, we know that the case of Ion-Sputtered stylus is worn down easilier the case of polished stylus. And we know that in the evaluation of stylus wear, it is more useful method that examine the wear by measuring the variation of stylus tip radius than by evaluating the variation of Ra values.

• Journal of Electrical Engineering and information Science
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• 제2권6호
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• pp.212-216
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• 1997

A new metal tip fabrication process for low voltage operation is reported in this paper. The key element of the fabrication process is that isotropic silicon etching and oxidation process used in silicon tip fabrication is utilized for gate hole size reduction and gate oxide layer. A metal FEA with 625 tips was fabricated in order to demonstrate the validity of the new process and submicron gate apertures were successfully obtained from originally 1.7$\mu\textrm{m}$ diameter mask. The emission current above noise level was observed at the gate bias of 50V. The required gate voltage to obtain the anode current of 0.1${\mu}\textrm{A}$/tip was 74V and the emission current was stable above 2${\mu}\textrm{A}$/tip without any disruption. The local field conversion factor and the emitting area were calculated as 7.981${\times}$10\ulcornercm\ulcorner and 3.2${\times}$10\ulcorner$\textrm{cm}^2$/tip, respectively.

• International Journal of Aeronautical and Space Sciences
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• 제6권2호
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• pp.84-96
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• 2005

Helical tip vortex is known as stable vortex structure, however the specific frequency component of far wake perturbation induces the vortex pairing in hover and axial flight. It is expected that the tip vortex pairing phenomena may happen in transition flight and very low advance ratio flight so that inflow may be most nonuniform in the low advance ratio flight. The objectives of this paper are that a tip-vortex instability during the transition from hover into very low advance ratio forward flight is numerically predicted to understand a physics by using a time-marching free-wake method. To achieve the objectives, numerical method is firstly validated in typical axial and forward flights cases. Present scheme with trim routine can predict airloads and inflow distribution of forward flight with good accuracy. Then, the transition flight condition is calculated. The rotor used in this wake calculation is a small-scale AH-1G model. By using a tip-vortex trajectory tracking method, the tip-vortex pairing process are clearly observed in transient flight($\mu$=0.03) and disappears at a slightly higher advance ratio($\mu$=0.05). According to the steady flight simulation at $\mu$=0.03, it is confirmed the tip-vortex pairing process is continued in the rear part of rotor disk and not occurs in the front part. Time averaged inflow in this case is predicted as smooth distribution.

• 대한기계학회논문집A
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• 제36권8호
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• pp.851-856
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• 2012

마이크로 프로브 팁의 설계는 매우 복잡하고 많은 비용이 든다. 이 논문에서는 새로운 타입의 프로브 팁을 유한요소해석을 이용하여 설계하였다. 유한요소해석을 이용하여 설계를 함으로써 복잡한 설계과정을 단순화 할 수 있다. 우선, 기존 프로브 팁의 실험 결과를 이용하여 유한요소해석기법을 검증하였다. 기존 프로브 팁의 물성은 $100{\mu}m$의 압축 길이시 12.5 gf 의 접촉하중이 측정되었다. 본 연구에서는 새로운 타입의 프로브 팁을 제안하였다. 새로 설계된 프로브 팁의 재료는 NiCo 이며 프로브 팁의 물성은 $100{\mu}m$의 압축 길이시 1~2 gf 의 접촉하중을 나타내었다.

• 마이크로전자및패키징학회지
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• 제18권1호
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• pp.35-39
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• 2011

고속전단시힘의 표준화를 위한 기초 연구의 일부로 Sn-3.0wt%Ag-0.5wt%Cu 솔더 볼의 고속전단특성에 대한 연구를 수행 하였다. 고속전단 시험편 제작을 위해 직경 450 ${\mu}m$의 솔더 볼을 FR4 PCB (Printed Circuit Board) 위에 장착한 후 $245^{\circ}C$ 온도에서 리플로 솔더링을 행하였다. PCB 상의 금속 패드로는 ENIG (Electroless Nickel/mmersion Gold, i.e Cu/Ni/Au)와 OSP (Organic Solderability Preservative, Cu 패드)를 사용하였다. 고속전단 속도는 0.5~3.0 m/s 범위, 전단 팁의 높이는 10~135 ${\mu}m$ 범위에서 변화시켰다. 실험결과로서, OSP 패드의 경우 전단 팁 높이 증가에 따라 연성 파괴가 증가하였으며, 전단속도 증가에 따라 연성파괴는 감소되었다. ENIG 패드의 경우에도 전단 팁 높이 증가에 따라 연성 파괴가 증가하였다. 전단 팁 높이 10 ${\mu}m$(볼 직경의 2%)는 패드 박리 파괴가 대부분이어서 전단파면 관찰에는 부적절한 높이였다. 고속전단에너지는 OSP 및 ENIG 패드 모두 전단 팁 높이 증가에 따라 증가하는 경향을 보였다.

• 전기화학회지
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• 제9권2호
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• pp.84-88
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• 2006

본 연구에서는 주사탐침현미경을 이용한 Si 표면의 국부 산화피막 형성에 있어서, 탐침이 움직이면서 생기는 $SiO_2$의 일차원적인 선의 높이가 탐침 전위, deflection setpoint, 탐침 속도에 의해 어떻게 영향을 받는지 고찰해 보았다. -3 V 보다 작은 탐침 전위에서는 국부 산화피막 형성이 관찰되지 않았으며 -3 V 보다 큰 탐침 전위에서는, 탐침 속도가 $1{\mu}m/s$일 때, 1 V씩 증가함에 따라 0.47nm의 비율로 선의 높이가 높아졌다. Deflection setpoint는 탐침이 가하는 기계적인 힘의 표지가 되는데, $12\sim18nN$ 정도의 힘이 가해지지 않으면 국부 산화피막 형성이 관찰되지 않았다. 그 이상의 힘이 가해져야 국부 산화피막 형성이 관찰되는데 이때 선의 높이는 기계적인 힘과 무관하였다. 탐침 속도가 빨라짐에 따라 선의 높이는 낮아졌으나, 탐침 전위가 -5V인 경우, 0.7nm 이하로 낮아지지는 않았다.

• KSTLE International Journal
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• 제5권1호
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• pp.1-6
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• 2004

Nano-scale studies on adhesion and friction were conducted in Si-wafer (100) using Atomic Force Microscopy (AFM). Glass (Borosilicate) balls of radii 0.32$\mu\textrm{m}$, 1.25$\mu\textrm{m}$, and 2.5$\mu\textrm{m}$, mounted on cantilever (Contact Mode type NPS) were used as tips. Adhesion and friction between Si-wafer and glass tips were measured at ambient temperature (24${\pm}$1$^{\circ}C$) and humidity (45${\pm}$5%). Friction was measured as a function of applied normal load in the range of 0-160 nN. Results showed that, both adhesion and friction increased with the tip radii. Also, friction increased linearly as a function of applied normal load. The effect of tip size on adhesion and friction was explained as the influence of the capillary force exerted by meniscus and that of the contact area on these parameters respectively. The coefficient of friction was estimated in two different ways, as the slope from the plot of friction force against the applied normal load and as the ratio between the friction force and the applied normal load. Both these estimates showed that the coefficient of friction increased with the tip size. Further, the influence of the adhesion force on the coefficient of friction was also discussed.

• 한국전기전자재료학회논문지
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• 제21권2호
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• pp.131-136
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• 2008

The transducer for multi-directionally movable ultrasonic motor having lambda shaped vibrators has been proposed and designed. The two branches cross at a right angle with each other at the tip. FEM analyses of lambda shaped transducer were carried out to find vibration modes for ultrasonic motor. The lambda shaped transducer has one symmetric mode and two anti-symmetric modes. The symmetric mode generates the normal direction motion of the tip. The lateral and vertical direction motion of the tip are excited by two anti-symmetric modes. The normal and lateral direction motions made an lateral elliptic trajectory. And the normal and vertical direction motions made an vertical elliptic trajectory normal to previous one. The transducer with 1 mm in thickness and 25 mm in length has been fabricated and evaluated. The resonance frequencies of the transducer was 32 kHz and 103 kHz. The tangential and vertical vibration displacement of the transducer having the lateral elliptic trajectory were $1.5{\mu}m\;and\;1.1{\mu}m$, respectively at the driving voltage of 100 Vpp and frequency of 32 kHz and 103 kHz. And the tangential and vertical vibration displacement of the transducer having the vertical elliptic trajectory were $0.4{\mu}m\;and\;0.2{\mu}m$, respectively at the same driving condition.

• 대한조선학회논문집
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• 제31권1호
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• pp.84-93
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• 1994

본 연구에서는 NACA0012단면을 갖는 타원형날개끝 캐비테이션과 유기소음특성에 미치는 표면거칠기의 영향이 실험적으로 조사되었다. 사용한 표면거칠기는 조도 $200{\mu}m$의 입자로서, 날개끝 3cm 구간에 부착하였다. 또한 날개끝과 앞날에 각각 3cm의 거칠기를 준 경우도 별도로 조사되었다. 캐비테이션 발생시험 결과 캐비테이션 초기발생위치는 실험한 받음각 범위에서 날개끝으로부터 대략 1/2 코오드정도 후류이며, 캐비테이션 수가 감소함에 따라 변화하는 형상을 보였다. 날개끝 캐비테이션에 의한 소음은 주파수 3-50kHs사이의 비교적 고주파수에서 음압이 증가하는 양상을 보였으나, 더 낮은 캐비테이션수에서 날개 앞날 캐비테이션으로 확장되면 전 주파수 범위에 걸쳐서 소음이 증가하었다. 캐비테이션과 소음발생은 표면거칠기가 증가할때 개선되는 경향을 보였으나 그 차이는 크지않았다. 날개 앞날과 끝날에 거칠기를 준 경우가 낮은 캐비테이션수에서 다소 유리한 캐비테이션 특성을 보여준 반면 양력-항력비의 감소에 따른 문제점도 지적되었다.