• Transactions of the Korean Society of Mechanical Engineers A
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• v.23 no.7 s.166
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• pp.1173-1181
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• 1999

In X-ray stress measurements for uni-directionally deformed surfaces such as grinding, a strongly curved $sin^2{\Psi} diagram, so called $\Psi-splitter, has been observed recently. It has been known that this is caused by the residual shear stress induced in the deformed layer by external forces. In this case it is necessary to consider this enough for ceramics and composite materials with tri-axial stress analysis. However, sufficient studies have not been done about the tri-axial stress analysis of the macro stress and micro. stress on each phase of the composite materials. The result of obtaining is as follows. 1. $\Psi-splitter does not appear in the vertical direction though $\Psi-splitter appears in grinding direction in WC-Co cemented carbides. The reversal of $\Psi-splitter to each phase does not appear. 2. $\Psi-splitter caused in WC-Co cemented carbides has a close relation in dislocation which accumulates in WC phase and phase transformation caused in Co phase. 3. The residual stress on the surface of grinding of each phase is in the state of the compression stress.

• Journal of the Semiconductor & Display Technology
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• v.17 no.3
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• pp.70-74
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• 2018

In typical spectroscopic ellipsometry, the optical and geometrical properties of thin film and nano pattern can be obtained by measuring the polarization state of light reflected/transmitted from the object by rotating a analyzer or a compensator. We proposed a snapshot spectroscopic ellipsometric system based on a modified Michelson interferometer to overcome the time-consuring measurement principle due to rotating part. The proposed system provides spectral ellipsometric parameters (psi, delta) in real time by using a single spectral interference signal generated in the interferometric polarization module. However, it has a long-term stability problem resulting in delta(k) drift. In this paper, it is experimentally proved that the drift problem is caused by anisotropic refractive index change of the beam intersection layer in beam splitter of interferometer.