• Title/Summary/Keyword: $\Delta$ 퍼터링

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A Study on the Rotation of Uniaxial Anisotropy Field of NiFe Thin Film by Magnetic Annealing (자기장 내 열처리에 의한 퍼멀로이 박막의 일축 이방성 자기장의 회전에 관한 연구)

  • 송용진;김기출;이충선
    • Journal of the Korean Magnetics Society
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    • v.11 no.4
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    • pp.163-167
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    • 2001
  • The rotation of uniaxial anisotropy field of 700 ${\AA}$ thick sputtered NiFe thin film due to magnetic annealing was investigated. NiFe film was annealed in a magnetic field which is perpendicular to the initial induced uniaxial anisotropy field. The NiFe film becomes nearly isotropic after 1 hour annealing at 160 $^{\circ}C$. With increase of annealing temperature over 160 $^{\circ}C$, the film gets uniaxial anisotropy field again. An abrupt increase of H$\sub$c/ was observed with annealing temperature over 400 $^{\circ}C$. The X-ray diffraction analysis and Auger electron spectroscopy with Ar ion etching showed extensive grain growth in NiFe film with (111) texturing and interdiffusion with adjacent Au electrode layer by 400 $^{\circ}C$ magnetic annealing.

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