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http://dx.doi.org/10.5228/KSPP.2005.14.5.477

Fabrication of Micro Mirror Array for Small Form Factor Optical Pick-up by Micro UV-Molding  

Choi Yong (연세대학교 기계공학부)
Lim Jiseok (연세대학교 기계공학부)
Kim Seokmin (연세대학교 기계공학부)
Sohn Jin-Seung (삼성종합기술원)
Kim Hae-Sung (삼성종합기술원)
Kang Shinill (연세대학교)
Publication Information
Transactions of Materials Processing / v.14, no.5, 2005 , pp. 477-481 More about this Journal
Abstract
Wafer scale micro mirror array with high surface quality for small form factor (SFF) optical pick-up was fabricated by micro UV-molding. To replicate micro mirror array for SFF optical pick-up, a high- precision mold was fabricated using micro-machining technology. Wafer scale micro mirror array was UV-molded using the mold and then the process was optimized experimentally. The surface flatness and roughness of UV-molded micro mirror array were measured by white light scanning interferomety system and analyzed the transcribing characteristics. Finally, the measured flatness of UV-molded micro mirror away for SFF optical pick-up, which was fabricated in the optimum processing condition, was less than 70nm.
Keywords
Wafer Scale Micro Mirror Array; Micro UV-Molding; Flatness;
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