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http://dx.doi.org/10.5228/KSPP.2004.13.3.236

Fabrication of Microlens Array by UV-molding  

김석민 (연세대학교 대학원 기계공학과)
임지석 (연세대학교 대학원 기계공학)
강신일 (연세대학교 기계공학)
전병희 (인덕대학 컴퓨터응용기계계열)
Publication Information
Transactions of Materials Processing / v.13, no.3, 2004 , pp. 236-241 More about this Journal
Abstract
UV-molded microlens arrays with high replication quality were fabricated using a parametric design method. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, nickel mold inserts for microlens arrays with lenses having diameters between $3\mu\textrm{m}$ and $230\mu\textrm{m}$ were fabricated by electroforming process. An UV-molding system was designed and constructed, a simple technique to avoid micro-air bubbles was first suggested, and the effects of the compression pressure and UV-curing dose on the replication quality of UV-molded microlens arrays with a diameter of $14\mu\textrm{m}$ were examined experimentally. Finally, geometrical and optical properties of the replicated microlens arrays were measured and analyzed.
Keywords
UV Molding; Photopolymer; Microlens Array; Replication Quality; Shrinkage;
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