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http://dx.doi.org/10.4191/KCERS.2007.44.2.116

Effects of Sintering Conditions on the Electrical Conductivity of 1 wt% Y2O3-Doped AlN Ceramics  

Lee, Won-Jin (Korea Institute of Ceramic Engineering and Technology)
Lee, Sung-Min (Korea Institute of Ceramic Engineering and Technology)
Shim, Kwang-Bo (Department of Materials Science and Engineering, Hanyang University)
Kim, Hyung-Tae (Korea Institute of Ceramic Engineering and Technology)
Publication Information
Journal of the Korean Ceramic Society / v.44, no.2, 2007 , pp. 116-123 More about this Journal
Abstract
Electrical properties of AlN ceramics sintered with 1 wt% $Y_2O_3$ have been investigated. From the impedance spectroscopy, electrical conductivity of grain boundary was found to be much lower than that of grain. DC conductivity measurement showed the electrode polarization effects caused by blocking electrode. The heat-treatment at $1700^{\circ}C$ of the specimen sintered at $1850^{\circ}C$ transformed continuous pain boundary phases along triple boundary junctions into isolated particles in grain comers. The heat-treatment induced decreases both in grain and grain boundary conductivity, and in DC electrical conductivities. From the analysis on the transference number, ionic conductivity was shown to be more dominant than electron conductivity, which was due to ion compensation mechanism during oxygen incorporation into grain.
Keywords
AlN; Electrostatic chuck (ESC); DC conductivity; Impedance spectroscopy; Ionic conductivity;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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