A Study on the Holding of LED Sapphire Substrate Using Alumina Electrostatic Chuck with Fine Electrode Pattern |
Kim, Hyung-Ju
(Department of Advanced Materials Engineering, Kyonggi University)
Shin, Yong-Gun (Department of Advanced Materials Engineering, Kyonggi University) Ahn, Ho-Kap (Aegisco Co. Ltd.) Kim, Dong-Won (Department of Advanced Materials Engineering, Kyonggi University) |
1 | T. Watanabe, T. Kitabayashi, C. Nakayama, Jpn. J. Appl. Phys., 32 (1993) 864. DOI |
2 | R. Atkinson, Br. J. Appl. Phys., 2 (1969) 325. |
3 | D. R. Wright, D. C. Hartman, U. C. Sridharan, M. Kent, T. Jasinski, S. Kang, J. Vac. Sci. Technol., A, 10 (1992) 1065. DOI |
4 | J. S. Choi, J. Yoo, S. J. Hong, T. H. Kim, S. J. Lee, Key Eng. Mater., 326 (2006) 1221. DOI |
5 | K. Asano, F. Hatakeyama, K. Yatsuzuka, IEEE Trans. Ind. Appl., 38 (2002) 840. DOI |
6 | G. I. Shim, Hideo Sugai, Plasma Fusion Res., 3 (2008) 051. DOI |
7 | J. Yoo, J. S. Choi, S. J. Hong, T. H. Kim, S. J. Lee, Proceedings of International Conference on Electrical Machines and Systems, Seoul, 2007. |
8 | S. Qin, A. McTeer, Jpn. J. Appl. Phys., 102 (2007) 064901. DOI ScienceOn |