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http://dx.doi.org/10.5757/vacmag.2.2.24

Electron sources for electron microsocpes  

Cho, Boklae (한국표준과학연구원)
Publication Information
Vacuum Magazine / v.2, no.2, 2015 , pp. 24-28 More about this Journal
Abstract
The brightness of an electron source, along with the aberrations of an objective lens, determines the image resolution and beam current on samples, which are two important parameters for evaluating the performance of an electron microscope. Here we introduce thermal electron source, Schottky emitter and cold field electron emitter. Thermal electron source is the cheapest and stable electron source but it has the lowest brightness. Schottky emitter is 10000 times brighter than tungsten thermal electron source, but requires ultrahigh vacuum operating condition. Cold field electron emitter is 10 times brighter than Schottky emitters, but it is rather unstable and its operation requires most stringent vacuum condition, hindering its widespread use.
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