Physical Property of W-C-N Diffusion Barrier through Stress-Strain curve
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Lee, Kyu-Young
(Department of Nano & Electronic Physics, Kookmin University)
Kim, Soo-In (Department of Nano & Electronic Physics, Kookmin University) Park, Sang-Jae (Korea Science Academy) Lee, Dong-Kwan (Korea Science Academy) Jeong, Yong-Rok (Korea Science Academy) Jung, Jun (Korea Science Academy) Lee, Jong-Rim (Korea Science Academy) Lee, Chang-Woo (Department of Nano & Electronic Physics, Kookmin University) |
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