Design of an Antireflection Coating for High-efficiency Superconducting Nanowire Single-photon Detectors |
Choi, Jiman
(Quantum Technology Institute, Korea Research Institute of Standards and Science)
Choi, Gahyun (Quantum Technology Institute, Korea Research Institute of Standards and Science) Lee, Sun Kyung (Quantum Technology Institute, Korea Research Institute of Standards and Science) Park, Kibog (Department of Physics, Ulsan National Institute of Science and Technology) Song, Woon (Quantum Technology Institute, Korea Research Institute of Standards and Science) Lee, Dong-Hoon (Department of Science of Measurement, University of Science and Technology) Chong, Yonuk (Department of Nano Engineering, Sungkyunkwan University) |
1 | C. H. Bennett, "Quantum cryptography using any two nonorthogonal states," Phys. Rev. Lett. 68, 3121-3124 (1992). DOI |
2 | S.-K. Liao, W.-Q. Cai, W.-Y. Liu, L. Zhang, Y. Li, J.-G. Ren, J. Yin, Q. Shen, Y. Cao, Z.-P. Li, F.-Z. Li, X.-W. Chen, L.-H. Sun, J.-J. Jia, J.-C. Wu, X.-J. Jiang, J.-F. Wang, Y.-M. Huang, Q. Wang, Y.-L. Zhou, L. Deng, T. Xi, L. Ma, T. Hu, Q. Zhang, Y.- A. Chen, N.-L. Liu, X.-B. Wang, Z.-C. Zhu, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, and J.-W. Pan, "Satellite-to-ground quantum key distribution," Nature 549, 43-47 (2017). DOI |
3 | J. L. O'Brien, "Optical quantum computing," Science 318, 1567-1570 (2007). DOI |
4 | R. Blatt and D. Wineland, "Entangled states of trapped atomic ions," Nature 453, 1008-1015 (2008). DOI |
5 | S. Pirandola, B. R. Bardhan, T. Gehring, C. Weedbrook, and S. Lloyd, "Advances in photonic quantum sensing," Nat. Photonics 12, 724-733 (2018). DOI |
6 | Y.-Q. Fang, W. Chen, T.-H. Ao, C. Liu, L. Wang, X.-J. Gao, J. Zhang, and J.-W. Pan, "InGaAs/InP single-photon detectors with 60% detection efficiency at 1550 nm," Rev. Sci. Instrum. 91, 083102 (2020). DOI |
7 | N. Gisin, G. Ribordy, W. Tittel, and H. Zbinden, "Quantum cryptography," Rev. Mod. Phys. 74, 145 (2002). DOI |
8 | A. H. Myerson, D. J. Szwer, S. C. Webster, D. T. C. Allcock, M. J. Curtis, G. Imreh, J. A. Sherman, D. N. Stacey, A. M. Steane, and D. M. Lucas, "High-fidelity readout of trapped-ion qubits," Phys. Rev. Lett. 100, 200502 (2008). DOI |
9 | C. Lv, W. Zhang, L. You, P. Hu, H. Wang, H. Li, C. Zhang, J. Huang, Y. Wang, X. Yang, Z. Wang, and X. Xie, "Improving maximum count rate of superconducting nanowire single-photon detector with small active area using series attenuator," AIP Adv. 8, 105018 (2018). DOI |
10 | D. Shin, F. Xu, D. Venkatraman, R. Lussana, F. Villa, F. Zappa, V. K. Goyal, F. N. C. Wong, and J. H. Shapiro, "Photon-efficient imaging with a single-photon camera," Nat. Commun. 7, 12046 (2016). DOI |
11 | G. Gol'tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Dzardanov, K. Smirnov, A. Semenov, B. Voronov, C. Williams, and R. Sobolewski, "Fabrication and properties of an ultrafast NbN hot-electron single-photon detector," IEEE Trans. Appl. Supercond. 11, 574-577 (2001). DOI |
12 | C. M. Natarajan, M. G. Tanner, and R. H. Hadfield, "Superconducting nanowire single-photon detectors: physics and applications," Supercond. Sci. Technol. 25, 063001 (2012). DOI |
13 | I. E. Zadeh, J. W. N. Los, R. B. M. Gourgues, J. Chang, A. W. Elshaari, J. R. Zichi, Y. J. Van Staaden, J. P. E. Swens, N. Kalhor, A. Guardiani, Y. Meng, K. Zou, S. Dobrovolskiy, A. W. Fognini, D. R. Schaart, D. Dalacu, P. J. Poole, M. E. Reimer, X. Hu, S. F. Pereira, V. Zwiller, and S. N. Dorenbos, "Efficient single-photon detection with 7.7 ps time resolution for photoncorrelation measurements," ACS Photonics 7, 1780-1787 (2020). DOI |
14 | D. V. Reddy, R. R. Nerem, S. W. Nam, R. P. Mirin, and V. B. Verma, "Superconducting nanowire single-photon detectors with 98% system detection efficiency at 1550 nm," Optica 7, 1649-1653 (2020). DOI |
15 | J. Chang, J. W. N. Los, J. O. Tenorio-Pearl, N. Noordzij, R. Gourgues, A. Guardiani, J. R. Zichi, S. F. Pereira, H. P. Urbach, V. Zwiller, S. N. Dorenbos, and I. Esmaeil Zadeh, "Detecting telecom single photons with (99.5 +0.5 -2.07 ) % system detection efficiency and high time resolution," APL Photonics 6, 036114 (2021). DOI |
16 | A. J. Miller, A. E. Lita, B. Calkins, I. Vayshenker, S. M. Gruber, and S. W. Nam, "Compact cryogenic self-aligning fiberto-detector coupling with losses below one percent," Opt. Express 19, 9102-9110 (2011). DOI |
17 | A. Mukhtarova, L. Redaelli, D. Hazra, H. Machhadani, S. Lequien, M. Hofheinz, J.-L. Thomassin, F. Gustavo, J. Zichi, V. Zwiller, E. Monroy, and J.-M. Gerard, "Polarization-insensitive fiber-coupled superconducting-nanowire single photon detector using a high-index dielectric capping layer," Opt. Express 26, 17697-17704 (2018). DOI |
18 | B. Korzh, Q.-Y. Zhao, J. P. Allmaras, S. Frasca, T. M. Autry, E. A. Bersin, A. D. Beyer, R. M. Briggs, B. Bumble, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, A. E. Lita, F. Marsili, G. Moody, C. Pena, E. Ramirez, J. D. Rezac, N. Sinclair, M. J. Stevens, A. E. Velasco, V. B. Verma, E. E. Wollman, S. Xie, D. Zhu, P. D. Hale, M. Spiropulu, K. L. Silverman, R. P. Mirin, S. W. Nam, A. G. Kozorezov, M. D. Shaw, and K. K. Berggren, "Demonstration of sub-3 ps temporal resolution with a superconducting nanowire single-photon detector," Nat. Photonics 14, 250-255 (2020). DOI |
19 | L. Redaelli, V. Zwiller, E. Monroy, and J. M. Gerard, "Design of polarization-insensitive superconducting single photon detectors with high-index dielectrics," Supercond. Sci. Technol. 30, 035005 (2017). DOI |
20 | B. Baek, A. E. Lita, V. Verma, and S. W. Nam, "Superconducting a-WxSi1-x nanowire single-photon detector with saturated internal quantum efficiency from visible to 1850 nm," Appl. Phys. Lett. 98, 251105 (2011). DOI |
21 | R. Gourgues, J. W. N. Los, J. Zichi, J. Chang, N. Kalhor, G. Bulgarini, S. N. Dorenbos, V. Zwiller, and I. E. Zadeh, "Superconducting nanowire single photon detectors operating at temperature from 4 to 7 K," Opt. Express 27, 24601-24609 (2019). DOI |
22 | G. Lavareda, Y. Vygranenko, A. Amaral, C. Nunes de Carvalho, N. P. Barradas, E. Alves, and P. Brogueira, "Dependence of optical properties on composition of silicon carbonitride thin films deposited at low temperature by PECVD," J. Non. Cryst. Solids 551, 120434 (2021). DOI |
23 | E. A. Dauler, M. E. Grein, A. J. Kerman, F. Marsili, S. Miki, S. W. Nam, M. D. Shaw, H. Terai, V. B. Verma, and T. Yamashita, "Review of superconducting nanowire single-photon detector system design options and demonstrated performance," Opt. Eng. 53, 081907 (2014). DOI |
24 | O. Kahl, S. Ferrari, V. Kovalyuk, G. N. Goltsman, A. Korneev, and W. H. P. Pernice, "Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths," Sci. Rep. 5, 10941 (2015). DOI |
25 | H. Li, X. Yang, L. You, H. Wang, P. Hu, W. Zhang, Z. Wang, and X. Xie, "Improving detection efficiency of superconducting nanowire single-photon detector using multilayer antireflection coating," AIP Adv. 8, 115022 (2018). DOI |
26 | F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, "Detecting single infrared photons with 93% system efficiency," Nat. Photonics 7, 210-214 (2013). DOI |
27 | V. B. Verma, B. Korzh, F. Bussieres, R. D. Horansky, A. E. Lita, F. Marsili, M. D. Shaw, H. Zbinden, R. P. Mirin, and S. W. Nam, "High-efficiency WSi superconducting nanowire single-photon detectors operating at 2.5 K," Appl. Phys. Lett. 105, 122601 (2014). DOI |
28 | V. B. Verma, B. Korzh, F. Bussieres, R. D. Horansky, S. D. Dyer, A. E. Lita, I. Vayshenker, F. Marsili, M. D. Shaw, H. Zbinden, R. P. Mirin, and S. W. Nam, "High-efficiency superconducting nanowire single-photon detectors fabricated from MoSi thin-films," Opt. Express 23, 33792-33801 (2015). DOI |
29 | Corning, "Corning® SMF-28® ultra optical fiber," (Corning, Published date: November 2014), https://www.corning.com/media/worldwide/coc/documents/Fiber/SMF-28%20Ultra.pdf (Accessed date: 15 February 2021) |
30 | W. Zhang, Q. Jia, L. You, X. Ou, H. Huang, L. Zhang, H. Li, Z. Wang, and X. Xie, "Saturating intrinsic detection efficiency of superconducting nanowire single-photon detectors via defect engineering," Phys. Rev. Appl. 12, 044040 (2019). DOI |
31 | I. H. Malitson, "Interspecimen comparison of the refractive index of fused silica," J. Opt. Soc. Am. 55, 1205-1209 (1965). DOI |
32 | R. R. Willey, Field Guide to Optical Thin Films (SPIE Press, Bellingham, WA, USA, 2006). |
33 | R. H. Hadfield, "Single-photon detectors for optical quantum information applications," Nat. Photonics 3, 696-705 (2009). DOI |
34 | S. Miki, M. Yabuno, T. Yamashita, and H. Terai, "Stable, high-performance operation of a fiber-coupled superconducting nanowire avalanche photon detector," Opt. Express 25, 6796-6804 (2017). DOI |
35 | S. Chen, L. You, W. Zhang, X. Yang, H. Li, L. Zhang, Z. Wang, and X. Xie, "Dark counts of superconducting nanowire single-photon detector under illumination," Opt. Express 23, 10786-10793 (2015). DOI |
36 | L. Gao, F. Lemarchand, and M. Lequime, "Exploitation of multiple incidences spectrometric measurements for thin film reverse engineering," Opt. Express 20, 15734-15751 (2012). DOI |
37 | T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D: Appl. Phys. 50, 025106 (2017). DOI |
38 | I.-S. Lee, J.-W. Kim, C.-J. Youn, S.-K. Park, and Y.-B. Hahn, "Preparation and characterization of TiO2 thin films by PECVD on Si substrate," Korean J. Chem. Eng. 13, 473-477 (1996). DOI |
39 | S. Krapick, M. Hesselberg, V. B. Verma, I. Vayshenker, S. W. Nam, and R. P. Mirin, "Superconducting single-photon detectors with enhanced high-efficiency bandwidth," arXiv:1706.00004 (2017). |