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http://dx.doi.org/10.3807/KJOP.2004.15.5.435

The signal processing of moire fringes obtained by the superposition of a fixed self-imaging elongated circular(EC) grating and a moved EC grating for the precise measurement of linear transverse displacements  

Lee Sang Il (Applied Optics and Electromagnetics, School of Natural Sciences, Hannam University)
Baek Seung Sun (Applied Optics and Electromagnetics, School of Natural Sciences, Hannam University)
Jo Jae Heung (Applied Optics and Electromagnetics, School of Natural Sciences, Hannam University)
Publication Information
Korean Journal of Optics and Photonics / v.15, no.5, 2004 , pp. 435-442 More about this Journal
Abstract
We obtained precise linear transverse displacements from the results of signal processing on moire fringes measured by the superposition of a fixed self-imaging elongated circular(EC) grating and a moved EC grating. The linear displacement less than one pitch of the moving EC grating was calculated from the position of a bright moire fringe generated on the linear grating part of the EC gratings. The moire signals were high-frequency-filtered, smoothed, curve-fitted, and first-differentiated moire signals in sequence. Also the linear displacement created by movement by the unit of integer times of a pitch was readily measured by the count of the even number of zero-crossing points corresponding to bright moire fringes obtained by the above same processing without curve fitting. Then we can measure linear transverse displacements with the accuracy of better than 3 %, which are more accurate values than those by the traditional visual method within the displacement of 80 ${\mu}{\textrm}{m}$.
Keywords
Moire method; self-imaging; elongated circular grating; automatic measurement; filtering and smoothing;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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