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http://dx.doi.org/10.13067/JKIECS.2021.16.2.233

Structure and Optical Properties of ZnS:Nd Thin filmsss Produced by RF Sputtering and Rapid Thermal Annealing Process  

Kim, Won-Bae (Dept. Electrical Song-won University)
Publication Information
The Journal of the Korea institute of electronic communication sciences / v.16, no.2, 2021 , pp. 233-240 More about this Journal
Abstract
For the production of neodymium-doped zinc sulfide thin films in various amounts, zinc sulfide and neodymium were simultaneously deposited using an RF magnetron sputtering equipment to form a thin films, and rapid thermal annealing was performed at 400℃ for 30 minutes as a post-treatment process. The structure, shape, and optical properties of ZnS thin films having various neodymium doping contents (0.35at.%, 1.31at.%, 1.82at.% and 1.90at.%) were studied. The X-ray diffraction pattern was grown to a (111) cubic structure in all thin films. The surface and structural morphology of the thin films due to the neodymium doping content was explained through SEM and AFM images. Only elements of Zn, S, and Nd that do not contain other impurities were identified through EDAX. The transmittance and band gap of the prepared thin films were confirmed using the UV-vis spectrum.
Keywords
CIGS thin film solar cell; Zinc sulfide; Neodymium; RF Magnetron Sputtering; Rapid Thermal Annealing;
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Times Cited By KSCI : 2  (Citation Analysis)
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