Effect of Native Oxide Layer on the Water Contact Angle to Determine the Surface Polarity of SiC Single Crystals |
Park, Jin Yong
(Department of Advanced Materials Engineering, Dong-Eui University)
Kim, Jung Gon (WaferMasters, Inc.) Kim, Dae Sung (Department of Advanced Materials Engineering, Dong-Eui University) Yoo, Woo Sik (WaferMasters, Inc.) Lee, Won Jae (Department of Advanced Materials Engineering, Dong-Eui University) |
1 | R. A. Stein and P. Lanig, J. Cryst. Growth, 131, 71 (1993). [DOI: https://doi.org/10.1016/0022-0248(93)90397-F] DOI |
2 | B. Hornetz, H. J. Michel, and J. Halbritter, J. Mater. Res., 9, 3088 (1994). [DOI: https://doi.org/10.1557/JMR.1994.3088] DOI |
3 | Y. Song, S. Dhar, L. C. Feldman, G. Chung, and J. R. Williams, J. Appl. Phys., 95, 4953 (2004). [DOI: https://doi.org/10.1063/1.1690097] DOI |
4 | H. Matsunami, Diamond Relat. Mater., 2, 1043 (1993). [DOI: https://doi.org/10.1016/0925-9635(93)90271-3] DOI |
5 | R.C.A. Harris, J. Am. Ceram. Soc., 58, 7 (1975). [DOI: https://doi.org/10.1111/j.1151-2916.1975.tb18969.x] DOI |
6 | C. P. Saini, A. Barman, D. Das, B. Satpati, S. R. Bhattacharyya, D. Kanjilal, A. Ponomaryov, S. Zvyagin, and A. Kanjilal, J. Phys. Chem. C, 121, 278 (2016). [DOI: https://doi.org/10.1021/acs.jpcc.6b08991] DOI |
7 | M. Syvajarvi, R. Yakimova, and E. Janzen, J. Electrochem. Soc., 146, 1565 (1999). [DOI: https://doi.org/10.1149/1.1391805] DOI |
8 | W. J. Choyke and G. Pensl, MRS Bull., 22, 25 (1997). [DOI: https://doi.org/10.1557/S0883769400032723] DOI |
9 | C. H. Park, B. H. Cheong, K. H Lee, and K. J. Chang, Phys. Rev. B, 49, 4485 (1994). [DOI: https://doi.org/10.1103/PhysRevB.49.4485] DOI |
10 | K. Karch, F. Bechstedt, P. Pavone, and D. Strauch, Phys. Rev. B, 53, 13400 (1995). [DOI: https://doi.org/10.1103/PhysRevB.53.13400] |
11 | E. Schmitt, T. Straubinger, M. Rasp, M. Vogel, and A. Wohlfart, J. Cryst. Growth, 310, 966 (2008). [DOI: https://doi.org/10.1016/j.jcrysgro.2007.11.185] DOI |
12 | R. Yakimova, M. Syvajarvi, T. Iakimov, H. Jacobsson, R. Raback, A. Vehanen, and E. Janzen, J. Cryst. Growth, 217, 255 (2000). [DOI: https://doi.org/10.1016/S0022-0248(00)00488-7] DOI |
13 | R. A. Stein, P. Lanig, and S. Leibenzeder, Mater. Sci. Eng., B, 11, 69 (1992). [DOI: https://doi.org/10.1016/0921-5107(92)90193-D] DOI |