Design of Non-Contact Pick-Up Head for Carrying Large Flat Sheets |
Kim, Joon Hyun
(Department of Mechanical and Automotive Engineering, Seoul National University of Science & Technology)
Kim, Young Geul (Department of Mechanical and Automotive Engineering, Seoul National University of Science & Technology) Ahn, Sung Wook (Department of Mechanical and Automotive Engineering, Seoul National University of Science & Technology) Kim, Young Sung (Graduate School of NID Fusion Technology, Nano-IT Program, Seoul National University of Science & Technology) |
1 |
Wafer-Handling Com, viewed 3 july. 2013, |
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Taesung Eng. Co. Ltd, viewed 18 May. 2012, |
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