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http://dx.doi.org/10.4313/TEEM.2003.4.5.033

A Study of Deposition Mechanism of Laser CVD SiO2 Film  

Sung, Yung-Kwon (Department of Electrical Engineering, College of Engineering, Korea University)
Song, Jeong-Myeon (Department of Electrical Engineering, College of Engineering, Korea University)
Moon, Byung-Moo (Department of Electrical Engineering, College of Engineering, Korea University)
Publication Information
Transactions on Electrical and Electronic Materials / v.4, no.5, 2003 , pp. 33-37 More about this Journal
Abstract
This study was performed to investigate the deposition mechanism of SiO$_2$ by ArF excimer laser(l93nm) CVD with Si$_2$H$\_$6/ and N$_2$O gas mixture and evaluate laser CVD quantitatively by modeling. With ArF excimer laser CVD, thin films can be deposited at low temperature(below 300$^{\circ}C$), with less damage and good uniformity owing to generation of conformal reaction species by singular wavelength of the laser beam. In this study, new model of SiO$_2$ deposition process by laser CVD was introduced and deposition rate was simulated by computer with the basis on this modeling. And simulation results were compared with experimental results measured at various conditions such as reaction gas ratio, chamber pressure, substrate temperature and laser beam intensity.
Keywords
Quantitative analysis; Deposition mechanism; Laser CVD;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 T. W. Choi, C. S. Lee, and S. C. Yoo, 'Electrical and mechanical properties of ceramics', Trans. on EEM, Vol. 15, No. 1, p. 10, 2001
2 Tae Wuk Choi and Sang Chul Yoo, 'Electrical and mechanical properties of ceramics', J. Mater. Sci, Vol. 15, No. 1, p. 10, 2001
3 T. W. Choi, 'Electrical properties of ceramics', Korea Report, No. KR-R250, p. 10, 2001
4 T. W. Choi and S. C. Yoo, 'Electrical ceramics', SID' 95 digest paper, p. 10, 1995
5 T. W. Choi and S. C. Yoo, 'Electrical ceramics', Proc. 2002 Summer Conf. KIEEME, p. 10, 2002
6 T. W. Choi, 'Electrical properties of ceramics', US Patent, 1,234,567, 2001
7 T. W. Choi, 'Electrical and mechanical properties of ceramics', Bulletin of KIEEME, Vol. 15, No. 1, p. 10. 2001
8 T.-W. Choi and S.-C. Yoo, 'Electhcal and mechanical properties of ceramics', J. of KIEEME(in Korean), Vol. 15, No. 1, p. 10, 2001
9 D. A. Neamen, 'Semiconductor Physics and Devices'. Irwin, p. 10, 1997