Browse > Article
http://dx.doi.org/10.3807/JOSK.2004.8.3.127

Femtosecond Micromachining Applications for Optical Devices  

Sohn, Ik-Bu (Optical Network and Systems Laboratory, Information and Communication University)
Lee, Man-Seop (Optical Network and Systems Laboratory, Information and Communication University)
Woo, Jeong-Sik (Phoco Co. Ltd.)
Publication Information
Journal of the Optical Society of Korea / v.8, no.3, 2004 , pp. 127-131 More about this Journal
Abstract
This paper investigates applications of femtosecond lasers for the micromachining of transparent materials and fabrication of optical devices. We show commercial micromachining examples of transparent materials which have been fabricated for various applications. Near infrared femtosecond laser processing is an attractive method to fabricate three-dimensional optical waveguides into various transparent materials. Focused femtosecond laser pulses induce a permanent refractive-index change only near the focal point. We also demonstrate a Y coupler with the splitting ratio of 1:1 written by femtosecond laser pulses into a fused silica glass. The minimum propagation loss of 0.8 ㏈/㎝ awl the refractive-index change of 0.006-0.01 at the wavelength of 1550 ㎚ were achieved by optimization of the laser fluence.
Keywords
Citations & Related Records
연도 인용수 순위
  • Reference
1 S. Juodkazis, S. Matsuo, H. Misawa, V. Mizeikis, A. Marcinkevicius, H. B. Sun, Y. Tokuda, M. Takahashi, T. Yoko, and J. Nishii, "Application of femtosecond laser pulses for microfabrication of transparent media," Applied Surface Science, vol. 197-198, pp. 705-709, 2002   DOI   ScienceOn
2 T. Juhasz, F. H. Loesel, R. M. Kurtz, C. Horvath, J. F. Bille, and G. Moruou, 'Corneal refractive surgery with femtosecond lasers,' IEEE J. Quantum Electron., vol. 5, no. 4, pp. 902-910, 1999   DOI   ScienceOn
3 K. H. Leong, A. A. Said, and R. L. Maynard, "Femtosecond micromachining applications for electro-optic components," in Electronic Components and Technology Conference, IEEE, vol. 29, pp. 210-214, 200l   DOI
4 W. Rudolph, P. Dorn, X. Liu, N. Vretenar, and R. Stock, 'Microscopy with femtosecond laser pulses: applications in engineering, physics and biomedicine,' Applied Surface Science, vol. 9614, pp. 1-6, 2003   DOI   ScienceOn
5 A. Salleo, T. Sands, and F. Y. Genin, 'Machining of transparent materials using an IR and UV nanosecond pulsed laser,' Appl. Phys. A, vol. 71, pp. 601-608, 2000   DOI
6 J. Zhang, K. Sugioka, and K. Midorikawa, 'High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers,' Appl. Phys. A, vol. 69, pp. 879-882, 1999   DOI
7 K. Hirao and K. Miura, 'Writing waveguides and gratings in silica and related materials by a femtosecond laser,' J. Non-Cryst. Solids, vol. 239, pp. 91-95, 1998   DOI   ScienceOn
8 Y. Kondo, K. Nouchi, T. Mitsuyu, M. Watanabe, P. Kazansky, and K. Hirao, 'Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses,' Optics Lett., vol. 24, no. 10, pp. 646-1648, 1999   DOI   ScienceOn
9 Y. Sikorski, A. A. Said, P. Bado, R. Maynard, C. Flrea, and D. K. Killinger, 'Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,' Electron. Lett., vol. 36, pp. 396-398, 2000   DOI   ScienceOn
10 D. Homoelle, S. Wielandy, and A. Gaeta, 'Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses,' Opt. Lett., vol. 24, no. 18, pp. 1311-1313, 1999   DOI
11 R. Teghil, L. D'Alessio, A. Santagata, M. Zaccagnino, D. Ferro, and D. J. Sordelet, 'Picosecond and femtosecond pulsed laser ablation and deposition of quasicrystals,' Applied Surface Science, vol. 210, pp. 307-317, 2003   DOI   ScienceOn
12 M. R. Kasaai, V. Kacham, F. Theberge, and S. L. Chin, 'The interaction of femtosecond and nanosecond laser pulses with the surface of glass,' J. Non-Crystalline Solids, vol. 319, pp. 129-135, 2003   DOI   ScienceOn
13 K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, 'Photowritten optical waveguides in various glasses with ultrashort pulse laser,' Appl. Phys. Lett., vol. 71, no. 23, pp. 3329-3331, 1997   DOI   ScienceOn