Transverse Wave Propagation in [ab0] Direction of Silicon Single Crystal |
Yun, Sangjin
(Applied Acoustics Lab, Korea Science Academy of KAIST)
Kim, Hye-Jeong (Applied Acoustics Lab, Korea Science Academy of KAIST) Kwon, Seho (Applied Acoustics Lab, Korea Science Academy of KAIST) Kim, Young H. (Applied Acoustics Lab, Korea Science Academy of KAIST) |
1 | Joseph L. Rose, "Ultrasonic Waves in Solid Media," Cambridge University Press, New York, pp. 225-226 (2004) |
2 | N. N. Hsu, "Acoustical birefringence and the use of ultrasonic waves for experimental stress analysis," Experimental Mechanics, Vol. 14, pp. 169-176 (1973) |
3 | A. Arora, "Effect of texture and stress on acoustic birefringence," Scripta Metallurgica, Vol. 18, pp. 763-766 (1984) DOI |
4 | K. Goebbels and S. Hirsekorn, "A new ultrasonic method for stress determination in textured materials," NDT International, Vol. 17, pp. 337-341 (1984) DOI |
5 | A. V. Clark, Jr. "On the use of acoustic birefringence to determine components of plane stress," Ultrasonics, Vol. 23, pp. 21-30 (1985) DOI |
6 | M. Taniguchi and Y. Iwashimizu, "Ultrasonic study on the change in elastic anisotropy with plastic compressive deformation," Ultrasonics, Vol. 25, pp. 160-165 (1987) DOI |
7 | E. Schneider, "Ultrasonic birefringence effect -its application for materials characterizations," Optics and Lasers in Engineering, Vol. 22, pp. 305-323 (1995) DOI |
8 | H.-J. Jeong, and L. W. Schmerr, Jr. "Effects of material anisotropy on ultrasonic beam propagation: diffraction and beam skew," Journal of the Korean Society for Nondestructive Testing, Vol. 26, No. 3, pp. 198-205 (2006) |
9 | H.-J. Jeong and L. W. Schmerr, Jr. "Ultrasonic beam propagation in highly anisotropic materials simulated by multigaussian beams," Journal of Mechanical Science and Technology, Vol. 21, No. 8, pp. 1184-1190 (2007) DOI |
10 | H. F. Pollard, "Sound Waves in Solids," Pion, London, pp. 11-20, (1977) |
11 | M. A. Hopcroft, W. D. Nix and T. W. Kenny, "What is the Young's modulus of silicon?," Journal of Microelectromechanical Systems, Vol. 19, pp. 229-238 (2010) DOI |
12 | N. Maluf and K. Williams, "An Introduction to Microelectromechanical Systems Engineering, 2nd Ed." Artech House, Boston, pp. 13-17 (2004) |
13 | G. Ensell, "Alignment of mask patterns to crystal orientation," Sensors Actuators A, Vol. 53, pp. 345-348 (1996) DOI |
14 | F. Tseng and K. Chang, "Precise [100] crystal orientation determination on 110-oriented silicon wafers," Journal of Micromechanics and Microengineering., Vol. 13, No. 1, pp. 47-52 (2003) DOI |