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Optical Analysis of the ITO/Ag/ITO Multiple Layers as a Highly Conductive Transparent Electrode  

Yoon, Yeo Tak (Department of Electronics Engineering, Gachon University)
Cho, Eou Sik (Department of Electronics Engineering, Gachon University)
Kwon, Sang Jik (Department of Electronics Engineering, Gachon University)
Publication Information
Journal of the Semiconductor & Display Technology / v.18, no.1, 2019 , pp. 87-91 More about this Journal
Abstract
As a highly conductive and transparent electrode, ITO/Ag/ITO multilayers are fabricated using an in-line sputtering method. Optimal thickness conditions have been investigated in terms of the optical transmittance and the electrical conductance. Considering the optical properties, in this study, the experimental characteristics are analyzed based on theoretical phenomena, and they are compared with the simulated results. The simulations are based on the finite-difference-time-domain (FDTD) method in solving linear Maxwell equations. Consequently, the results showed that ITO/Ag/ITO multilayer structures with respective thicknesses of 39.2 nm/10.7 nm/39.2 nm are most suitable with an average transmittance of about 87% calculated for wavelengths ranging from 400-800 nm and a sheet resistance of about $7.1{\Omega}/{\square}$.
Keywords
Transparent Conductive Oxide; Multilayers; ITO/Ag/ITO; In-line Sputtering; Full-wave Simulation;
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