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A Study of the Device Development for the Contamination Detection in the Delivery Line  

Jeong, Yi Ha (Department of Industrial Design Engineering, KOREATECH)
Kim, Byung Han (SGM Co., Ltd.)
Hong, Joo-Pyo (Department of Industrial Design Engineering, KOREATECH)
Publication Information
Journal of the Semiconductor & Display Technology / v.14, no.1, 2015 , pp. 45-49 More about this Journal
Abstract
Process gases with vapor or liquid phase as well as gas phase may experience alteration in itself or be contaminated in the fluid pipe to the process chamber. And thus it result in as particles or defects on the substrates in semiconductor, LCD, LED manufacturing. Purifiers and filters are used for control of contamination. However, none of detection device is available in the delivery line. In this paper, we propose simple device with lighting and sensing in order to predict contamination of the fluid or the tube wall. For some general purpose gases, it showed constant voltage output regardless of the flow rates. But, the smoke and the moisture in the air lowered the figure due to its concentration. Numerical values for several solid and liquid media were obtained. And, the operating temperature tendency was investigated.
Keywords
contamination detection; light and sense; gas delivery; flow rate; semiconductor manufacturing;
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Times Cited By KSCI : 3  (Citation Analysis)
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